174553 ⎘
Systems with reflecting surfaces, with or without refracting elements; Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using more than three curved mirrors on-axis systems with at least one of the mirrors having a central aperture
Multichannel Close-up Imaging Device
#2Optical system and plane spectroscopic device
#3Multi-mirror UV-LED optical lithography system
#4On-axis four mirror anastigmat telescope
#5Multi-channel optical system
#6Method for Designing Imaging Objective Lens System of Anamorphic Magnification
#7Imaging optical unit for imaging an object field into an image field, and projection exposure apparatus including such an imaging optical unit
#8Imaging optical unit for EUV projection lithography
#9Imaging optical unit for EUV projection lithography
#10METHOD AND APPARATUS FOR USING PATTERNING DEVICE TOPOGRAPHY INDUCED PHASE
#11Optical assembly, projection system, metrology system and EUV lithography apparatus
#12All reflective wafer defect inspection and review systems and methods
#13Imaging optical unit for EUV projection lithography
#14IMAGING OPTICAL SYSTEM AND PROJECTION EXPOSURE SYSTEM FOR MICROLITHOGRAPHY
#15OPTICAL DEVICE, IMAGING SYSTEM WHICH INCORPORATES THE OPTICAL DEVICE AND METHOD IMPLEMENTED BY THE IMAGING SYSTEM FOR IMAGING A SPECIMEN
#16Catoptric objectives and systems using catoptric objectives
#17Imaging optical system and projection exposure installation for microlithography with an imaging optical system of this type
#18System and method for online inspection of turbines using an optical tube with broadspectrum mirrors
#19Imaging optical system and projection exposure system for microlithography
#20Imaging system with multiple focal plane array sensors
#21Laser pulse stretching unit and method for using same
#22Catoptric objectives and systems using catoptric objectives
#23IMAGING OPTICS
#24Imaging optical system and projection exposure installation for microlithography with an imaging optical system of this type
#25Imaging optics and projection exposure installation for microlithography with an imaging optics
#26Imaging optical system and projection exposure installation for microlithography with an imaging optical system of this type
#27Catoptric objectives and systems using catoptric objectives
#28System in space for reinforcing photosynthesis and method
#29Panoramic projection device, and method implemented by this device
#30Integrated telescope baffle and mirror support
#31All-reflective relayed focal telescope derived from the first two mirrors of an afocal three-mirror anastigmat
#32Optical device
#33Imaging optical system and projection exposure system for microlithography
#34All-reflective afocal telescope derived from the first two mirrors of a focal three-mirror anastigmat telescope
#35Catoptric objectives and systems using catoptric objectives
#36Pointable optical system with coude optics having a short on-gimbal path length
#37CATOPTRIC OBJECTIVES AND SYSTEMS USING CATOPTRIC OBJECTIVES
#38Pointable optical system with coude optics having a short on-gimbal path length
#39Projection system for EUV lithography
#40Projection system for EUV lithography
#41Catoptric objectives and systems using catoptric objectives
#42Projection system for EUV lithography
#43Grazing incidence relays
#44Objective with pupil obscuration
#45Multiple field cassegrain-type optical combination