Patents-Review.com
ClassID:

177088 ⎘

G03F2007/2067 - CPC Classification

Classification description:

Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor; Exposure; Apparatus therefor Apparatus for microlithography

Recent Application in this class:
#1
20230120789
2023-04-20

EXPOSURE APPARATUS

 #2
20230005738
2023-01-05

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES AND PATTERN FORMATION METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICES

 #3
20220236652
2022-07-28

OPTICAL SYSTEM

 #4
20220163893
2022-05-26

Curing a shaped film using multiple images of a spatial light modulator

 #5
20200409273
2020-12-31

Fabricating Devices with Reduced Isolation Regions

 #6
20200401048
2020-12-24

Digital masking system, pattern imaging apparatus and digital masking method

 #7
20200073232
2020-03-05

System and method for illuminating edges of an imprint field with a gradient dosage

 #8
20190354025
2019-11-21

OPTICAL SYSTEM

 #9
20190025718
2019-01-24

Scan reflective mirror monitoring system and method, focusing and leveling system

 #10
20180329310
2018-11-15

Freeform distortion correction

 #11
20180101105
2018-04-12

Optical system

 #12
20180012730
2018-01-11

Charged-particle beam exposure method and charged-particle beam correction method

 #13
20170329242
2017-11-16

Amplitude monitoring system, focusing and leveling device, and defocusing amount detection method

 #14
20170322497
2017-11-09

Method and apparatus for generating illuminating radiation

 #15
20170293233
2017-10-12

Metrology target, method and apparatus, target design method, computer program and lithographic system

 #16
20170212422
2017-07-27

Lithographic apparatus and device manufacturing method

 #17
20170205714
2017-07-20

Lithographic apparatus and device manufacturing method

 #18
20170160639
2017-06-08

Reflective optical element

 #19
20170144363
2017-05-25

Imprint apparatus, imprint method, and method for manufacturing article

 #20
20160231648
2016-08-11

Lithography apparatus, control method therefor, and method of manufacturing article

 #21
20160181133
2016-06-23

Substrate processing apparatus and substrate processing method

 #22
20160076147
2016-03-17

Mould with a mould pattern, and device and method for producing same

 #23
20160039122
2016-02-11

Device and method of manufacturing a structure made of a curable material by means of molding

 #24
20160026095
2016-01-28

Lithographic apparatus and device manufacturing method

 #25
20160026085
2016-01-28

Lithographic apparatus and device manufacturing method

 #26
20150108674
2015-04-23

Imprint apparatus, and method of manufacturing article

 #27
20140306375
2014-10-16

Resin mold

 #28
20140226139
2014-08-14

Lithographic method with the capability of spectrum engineering to create complex microstructures

 #29
20140218703
2014-08-07

Illumination method, illumination optical device, and exposure device

 #30
20130070219
2013-03-21

Lithographic apparatus and device manufacturing method

 #31
20110037958
2011-02-17

Lithographic apparatus and device manufacturing method

 #32
20080074630
2008-03-27

Lithographic apparatus and device manufacturing method

 #33
20060250601
2006-11-09

Lithographic apparatus and device manufacturing method

 #34
20060197927
2006-09-07

Lithographic apparatus and device manufacturing method

 #35
15894813
2020-01-07

Electron flood lithography