ClassID:

177026

G03F7/0751 - CPC Classification

Classification description:

Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor; Photosensitive materials; Silicon-containing compounds used as adhesion-promoting additives or as means to improve adhesion

Recent Application in this class:
#1
20260071151
2026-03-12

THINNER COMPOSITION, METHOD FOR SUBSTRATE PROCESSING AND MODIFIED PHOTORESIST

#2
20260063999
2026-03-05

NEGATIVE PHOTOSENSITIVE RESIN COMPOSITION, PRODUCTION METHOD FOR POLYIMIDE CURED FILM USING SAME, AND POLYIMIDE CURED FILM

#3
20260044081
2026-02-12

COMPOSITION FOR FORMING SILICON-CONTAINING RESIST FILM AND PATTERNING PROCESS

#4
20250271758
2025-08-28

PHOTOSENSITIVE RESIN COMPOSITION, PHOTOSENSITIVE ELEMENT, PRINTED WIRING BOARD, AND METHOD FOR PRODUCING PRINTED WIRING BOARD

#5
20250155812
2025-05-15

PHOTOSENSITIVE RESIN COMPOSITION, PHOTOSENSITIVE RESIN FILM, PHOTOSENSITIVE DRY FILM, AND PATTERN-FORMING PROCESS

#6
20250044691
2025-02-06

PHOTOSENSITIVE COMPOSITION

#7
20240431190
2024-12-26

METHOD FOR PRODUCING DISPLAY DEVICE, AND DISPLAY DEVICE

#8
20240361695
2024-10-31

STRUCTURES INCLUDING A SiOCN PHOTORESIST ADHESION LAYER AND METAL-OXIDE RESIST AND METHODS OF FORMING SAME

#9
20240288772
2024-08-29

PHOTOSENSITIVE RESIN COMPOSITION, PHOTOSENSITIVE RESIN FILM, PHOTOSENSITIVE DRY FILM, AND PATTERN FORMATION METHOD

#10
20240184205
2024-06-06

Pellicle Frame, Pellicle, Photomask with Pellicle, Exposure Method, Method for Manufacturing Semiconductor Device, and Method for Manufacturing Liquid Crystal Display

#11
20230333472
2023-10-19

THERMOSETTING IODINE- AND SILICON-CONTAINING MATERIAL, COMPOSITION CONTAINING THE MATERIAL FOR FORMING RESIST UNDERLAYER FILM FOR EUV LITHOGRAPHY, AND PATTERNING PROCESS

#12
20220373887
2022-11-24

Adhesion promoter and photosensitive resin composition containing same

#13
20220281224
2022-09-08

Photoresist imaging and development for enhanced nozzle plate adhesion

#14
20220146936
2022-05-12

Low temperature cure photoimageable dielectric compositions and methods of their use

#15
20210325781
2021-10-21

Semiconductor resist composition, and method of forming patterns using the composition

#16
20210139708
2021-05-13

Composition, film, near infrared cut filter, laminate, pattern forming method, solid image pickup element, image display device, infrared sensor, and color filter

#17
20210103218
2021-04-08

Adhesion layer for multi-layer photoresist

#18
20210011382
2021-01-14

Dry film formulation

#19
20200159120
2020-05-21

Thermosetting iodine- and silicon-containing material, composition containing the material for forming resist underlayer film for EUV lithography, and patterning process

#20
20200150532
2020-05-14

Adhesion promoters

#21
20200117089
2020-04-16

Photosensitive resin composition, photosensitive dry film, and pattern forming process

#22
20200117085
2020-04-16

Semiconductor resist composition, and method of forming patterns using the composition

#23
20200098558
2020-03-26

Adhesion layer for multi-layer photoresist

#24
20200090936
2020-03-19

Method to improve adhesion of photoresist on silicon substrate for extreme ultraviolet and electron beam lithography

#25
20200073246
2020-03-05

Tunable adhesion of EUV photoresist on oxide surface

#26
20200026191
2020-01-23

Silicon-containing resist underlayer film-forming composition having phenyl group-containing chromophore

#27
20190256655
2019-08-22

Di-amine compound, and heat-resistant resin and resin composition using the same

#28
20190207100
2019-07-04

Process for improving photoresist pillar adhesion during MRAM fabrication

#29
20190187565
2019-06-20

Tunable adhesion of EUV photoresist on oxide surface

#30
20190179227
2019-06-13

Photoresist compositions, intermediate products, and methods of manufacturing patterned devices and semiconductor devices

#31
20190081258
2019-03-14

Resin and photosensitive resin composition

#32
20190004423
2019-01-03

Cured film and method for producing same

#33
20180348635
2018-12-06

Silane coupling agent and method of manufacturing wire grid pattern using the same

#34
20180337048
2018-11-22

Method to improve adhesion of photoresist on silicon substrate for extreme ultraviolet and electron beam lithography

#35
20180305552
2018-10-25

Composition, film, near infrared cut filter, laminate, pattern forming method, solid image pickup element, image display device, infrared sensor, and color filter

#36
20180284609
2018-10-04

Photosensitive compositions, color filter and microlens derived therefrom

#37
20180233363
2018-08-16

Method to improve adhesion of photoresist on silicon substrate for extreme ultraviolet and electron beam lithography

#38
20180233362
2018-08-16

Method to improve adhesion of photoresist on silicon substrate for extreme ultraviolet and electron beam lithography

#39
20180017867
2018-01-18

Photosensitive resin composition for thin film transistors, cured film, thin film transistor, liquid crystal display device or organic electroluminescent display device, method for producing cured film, method for manufacturing thin film transistor, and method for manufacturing liquid crystal display device or organic electroluminescent display device

#40
20170343900
2017-11-30

Embossing lacquer and method for embossing, and substrate surface coated with the embossing lacquer

#41
20170322492
2017-11-09

Resist pattern-forming method

#42
20170285471
2017-10-05

Fluorine-containing composition, substrate for pattern formation, photodegradable coupling agent, pattern formation method and transistor production method

#43
20170255099
2017-09-07

Photosensitive resin composition for forming interlayer insulating film, interlayer insulating film, and method for forming interlayer insulating film

#44
20170168389
2017-06-15

Photoresist compositions, intermediate products, and methods of manufacturing patterned devices and semiconductor devices

#45
20170146906
2017-05-25

Silicon-containing resists underlayer film-forming composition having phenyl group-containing chromophore

#46
20170102614
2017-04-13

Photosensitive resin composition, resist laminate, cured product of photosensitive resin composition, and cured product of resist laminate (11)

#47
20170090285
2017-03-30

Silane coupling agent and method of manufacturing wire grid pattern using the same

#48
20170088722
2017-03-30

Surface treatment agent and surface treatment method

#49
20170052446
2017-02-23

Photosensitive resin composition and application thereof

#50
20170017155
2017-01-19

Radiation-sensitive resin composition and electronic device

#51
20160326276
2016-11-10

Composition and a method for manufacturing a component

#52
20160291467
2016-10-06

Resin, resist composition and method for producing resist pattern

#53
20160291466
2016-10-06

Resist composition and method for producing resist pattern

#54
20160252813
2016-09-01

Lithographic printing plate precursors and coating

#55
20160238931
2016-08-18

Photoimageable compositions containing photobase generators

#56
20160223908
2016-08-04

Photosensitive compositions and applications thereof

#57
20160187775
2016-06-30

Photoimageable compositions containing thermal base generators

#58
20160160102
2016-06-09

Photosensitive resin composition, film adhesive, adhesive sheet, adhesive pattern, semiconductor wafer with adhesive layer, and semiconductor device

#59
20160147145
2016-05-26

Photoimageable compositions containing oxetane functionality

#60
20160102404
2016-04-14

Copolymers of diglycidyl ether terminated polysiloxane compounds and non-aromatic polyamines

#61
20150342063
2015-11-26

Copolymers of diglycidyl ether terminated polysiloxane compounds and non-aromatic polyamines

#62
20150337116
2015-11-26

Polymide precursor resin composition

#63
20150309409
2015-10-29

Photosensitive resin composition, resist laminate, and articles obtained by curing same (7)

#64
20150301450
2015-10-22

Photosensitive resin composition, resist laminate, and cured product thereof (2)

#65
20150299501
2015-10-22

Modified nano-silica and method for preparing the same, pigment dispersion and photosensitive resin composition

#66
20150293444
2015-10-15

Photosensitive resin composition, resist laminate, and articles obtained by curing same (5)

#67
20150261092
2015-09-17

Method of forming pattern and laminate

#68
20150261088
2015-09-17

UV-curable adhesive silicone composition, UV-curable adhesive silicone composition sheet, optical semiconductor apparatus and method for manufacturing the same

#69
20150205200
2015-07-23

Photoresist composition, method of forming a pattern and method of manufacturing a thin film transistor substrate

#70
20150168837
2015-06-18

Lithographic printing plate precusor

#71
20150125789
2015-05-07

Photosensitive resin composition, pattern formed using same and display panel comprising same

#72
20150079792
2015-03-19

Silicon-containing EUV resist underlayer film-forming composition including additive

#73
20150050600
2015-02-19

Resist pattern-forming method

#74
20150024326
2015-01-22

Photoimageable compositions and processes for fabrication of relief patterns on low surface energy substrates

#75
20150004791
2015-01-01

Composition for forming a coating type BPSG film, substrate formed a film by said composition, and patterning process using said composition

#76
20140329175
2014-11-06

Photosensitive negative resin composition, fine structure, production process of fine structure and liquid ejection head

#77
20140322647
2014-10-30

Photosensitive compositions and applications thereof

#78
20140234776
2014-08-21

Photosensitive resin composition and method of forming pattern using the same

#79
20140178817
2014-06-26

Curable coatings for photoimaging

#80
20140170562
2014-06-19

Positive photosensitive resin composition

#81
20140134544
2014-05-15

Resist pattern-forming method

#82
20140038112
2014-02-06

Aqueous base-developable negative-tone films based on functionalized norbornene polymers

#83
20130216956
2013-08-22

Monolayer or multilayer forming composition

#84
20130210236
2013-08-15

Silicon-containing surface modifier, resist underlayer film composition containing this, and patterning process

#85
20130210229
2013-08-15

Silicon-containing surface modifier, resist lower layer film-forming composition containing the same, and patterning process

#86
20130168859
2013-07-04

Positive photosensitive resin composition, method of creating resist pattern, and electronic component

#87
20130137271
2013-05-30

Silicon-containing resist underlayer film-forming composition and patterning process

#88
20130137036
2013-05-30

Positive photosensitive resin composition, photosensitive resin film prepared by using the same, and semiconductor device including the photosensitive resin film

#89
20130078570
2013-03-28

Method of forming pattern and laminate

#90
20130071561
2013-03-21

Compositions and antireflective coatings for photolithography

#91
20130045601
2013-02-21

Composition for forming a silicon-containing resist underlayer film and patterning process using the same

#92
20130034814
2013-02-07

Silane-based compounds and photosensitive resin composition comprising the same

#93
20130005150
2013-01-03

Composition for forming resist underlayer film and patterning process using the same

#94
20130004898
2013-01-03

Making a microfluidic device with improved adhesion

#95
20120315765
2012-12-13

Resist underlayer film forming composition containing silicon having nitrogen-containing ring

#96
20120296053
2012-11-22

PHOTOSENSITIVE COMPOSITION, CURED FILM AND ELECTRONIC PART

#97
20120251949
2012-10-04

Positive type photosensitive resin composition

#98
20120238095
2012-09-20

Patterning process and composition for forming silicon-containing film usable therefor

#99
20120183908
2012-07-19

Resist pattern-forming method

#100
20120183752
2012-07-19

Curable composition for imprints, patterning method and pattern

#101
20120178261
2012-07-12

Silicon-containing composition having sulfonamide group for forming resist underlayer film

#102
20120171614
2012-07-05

Positive photosensitive resin composition, photosensitive resin film prepared by using the same, and semiconductor device including the photosensitive resin film

#103
20120171610
2012-07-05

Positive photosensitive resin composition, photosensitive resin film prepared by using the same, and semiconductor device including the photosensitive resin film

#104
20120171609
2012-07-05

Positive photosensitive resin composition, photosensitive resin layer prepared by using the same, and semiconductor device including the photosensitive resin layer

#105
20120171433
2012-07-05

Fluorinated coating and phototools made therewith

#106
20120164565
2012-06-28

Fluorinated coating and phototools made therewith

#107
20120156622
2012-06-21

Ortho-nitrobenzyl ester compound and positive type photosensitive resin composition including the same

#108
20120058433
2012-03-08

Process for producing ink jet head

#109
20120001135
2012-01-05

Antireflective coatings for via fill and photolithography applications and methods of preparation thereof

#110
20110269078
2011-11-03

Substrate treatment to reduce pattern roughness

#111
20110171578
2011-07-14

Positive photosensitive resin composition

#112
20110136952
2011-06-09

Positive-type photosensitive resin composition, cured film, protective film, insulating film, and semiconductor device and display device including the cured film

#113
20110076618
2011-03-31

LITHOGRAPHIC PRINTING PLATE PRECURSOR AND PLATE MAKING METHOD THEREOF

#114
20110070543
2011-03-24

Aqueous base-developable negative-tone films based on functionalized norbornene polymers

#115
20110065824
2011-03-17

CURABLE COMPOSITION FOR IMPRINTS

#116
20110028587
2011-02-03

Curable composition, color filter and process for production thereof, and solid-state imaging device

#117
20110003248
2011-01-06

Positive photosensitive resin composition

#118
20100264114
2010-10-21

MICROPROCESSING OF SYNTHETIC QUARTZ GLASS SUBSTRATE

#119
20100255427
2010-10-07

CONFORMAL PHOTO-SENSITIVE LAYER AND PROCESS

#120
20100244328
2010-09-30

CURABLE COMPOSITION FOR PHOTOIMPRINT, AND METHOD FOR PRODUCING CURED PRODUCT USING SAME

#121
20100209851
2010-08-19

Method of making a lithographic printing plate

#122
20100159138
2010-06-24

RESIST SOLUTION AND METHOD OF FORMING PATTERN USING THE SAME

#123
20100151384
2010-06-17

Composition for resist underlayer film and process for producing same

#124
20100137530
2010-06-03

Photocurable resin composition for sealing organic EL device

#125
20100119973
2010-05-13

POSITIVE PHOTOSENSITIVE RESIN COMPOSITION AND CURED FILM FORMING METHOD USING THE SAME

#126
20090308842
2009-12-17

Photochemical method for manufacturing nanometrically surface-decorated substrates

#127
20090246715
2009-10-01

PLATING METHOD AND METHOD OF FORMING MAGNETIC POLE

#128
20090201338
2009-08-13

Photoimageable dry film formulation

#129
20090191484
2009-07-30

Photosensitive resin composition controlling solubility and pattern formation method of double-layer structure using the same

#130
20090186299
2009-07-23

Methods for imaging and processing negative-working imageable elements

#131
20090170026
2009-07-02

Positive-type photosensitive resin composition, cured film, protecting film, insulating film and semiconductor device and display device using these films

#132
20090123867
2009-05-14

Photosensitive resin composition and adhesion promoter

#133
20090092923
2009-04-09

Modified silica particles, and photosensitive composition and photosensitive lithographic printing plate each containing the particles

#134
20090076291
2009-03-19

Photoactive adhesion promoter

#135
20090050020
2009-02-26

Composition for resist underlayer film and process for producing same

#136
20090023100
2009-01-22

Patterning a surface comprising silicon and carbon

#137
20080305431
2008-12-11

PRETREATMENT COMPOSITIONS

#138
20080286665
2008-11-20

Color filter and method for producing the same

#139
20080261145
2008-10-23

Alkaline-resistant negative photoresist for silicon wet-etch without silicon nitride

#140
20080227024
2008-09-18

Photosensitive composition, and cured relief pattern production method and semiconductor device using the same

#141
20080166656
2008-07-10

Positive photoresist composition

#142
20080108723
2008-05-08

Photosensitive resin composition

#143
20080097032
2008-04-24

Positive Photosensitive Insulating Resin Composition And Cured Product Thereof

#144
20080085479
2008-04-10

PATTERN FORMING METHOD AND DEVICE PRODUCTION PROCESS USING THE METHOD

#145
20070248896
2007-10-25

Photoresist formulation for high aspect ratio plating

#146
20070246441
2007-10-25

Method for forming a resist pattern

#147
20070218398
2007-09-20

Photosensitive silane coupling agent, method of modifying surface, method of forming pattern, and method of fabricating device

#148
20070218373
2007-09-20

Photosensitive silane coupling agent, method of forming pattern, and method of fabricating device

#149
20070099111
2007-05-03

Positive photosensitive polybenzoxazole precursor compositions

#150
20060286484
2006-12-21

Pretreatment compositions

#151
20060275699
2006-12-07

Photosensitive resin compositions

#152
20060216641
2006-09-28

Photosensitive resin compositions

#153
20060214326
2006-09-28

Resin composition for mold used in forming micropattern, and method for fabricating organic mold therefrom

#154
20060141394
2006-06-29

Photoresist formulation for high aspect ratio plating

#155
20060099829
2006-05-11

Photoresist application over hydrophobic surfaces

#156
20050271980
2005-12-08

Photosensitive resin compositions

#157
20050171277
2005-08-04

Antireflective coatings for via fill and photolithography applications and methods of preparation thereof

#158
20050170284
2005-08-04

Photosensitive conducting composition for a plasma display panel

#159
20050164126
2005-07-28

Silazane compound amd methods for using the same

#160
20050158651
2005-07-21

Adhesive compound and method for forming photoresist pattern using the same

#161
20050023665
2005-02-03

Curable encapsulant compositions

#162
20050014876
2005-01-20

Photosensitive resin precursor composition

#163
20050014096
2005-01-20

Photoactive adhesion promoter