ClassID:

177060

G03F7/201 - CPC Classification

Classification description:

Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor; Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image characterised by an oblique exposure; characterised by the use of plural sources; characterised by the rotation of the optical device; characterised by a relative movement of the optical device, the light source, the sensitive system or the mask

Recent Application in this class:
#1
20260058429
2026-02-26

LASER APPARATUS, LASER SYSTEM, AND METHOD OF MANUFACTURING ELECTRONIC DEVICE

#2
20250348003
2025-11-13

Apparatus and Method for Lithographic Exposure of Large Area Substrates

#3
20250178334
2025-06-05

UV LED RADIATION SOURCES FOR USE IN PHOTOPOLYMER EXPOSURE

#4
20250155804
2025-05-15

PHOTORESIST COMPOSITION

#5
20250053095
2025-02-13

A METHOD AND APPARATUS FOR IMPROVING THE UNIFORMITY OF EXPOSURE OF A PERIODIC PATTERN

#6
20250021005
2025-01-16

SYSTEM AND METHOD FOR REDUCING EXTREME ULTRAVIOLET (EUV) VESSEL TIN DEPOSITION

#7
20240393696
2024-11-28

UV LITHOGRAPHY SYSTEM AND METHOD

#8
20240369934
2024-11-07

METHOD AND APPARATUS FOR EXPOSURE OF FLEXOGRAPHIC PRINTING PLATES USING LIGHT EMITTING DIODE (LED) RADIATION SOURCES

#9
20240264531
2024-08-08

Exposure unit with improved light intensity uniformness for exposing a relief plate precursor

#10
20240241446
2024-07-18

METHODS AND APPARATUS TO REDUCE EXTREME ULTRAVIOLET LIGHT FOR PHOTOLITHOGRAPHY

#11
20240219840
2024-07-04

METHOD FOR MANUFACTURING A TIMEPIECE COMPONENT

#12
20240201597
2024-06-20

DUV LITHOGRAPHY SYSTEM

#13
20240184209
2024-06-06

LITHOGRAPHIC PROCESSES FOR MAKING POLYMER-BASED ELEMENTS

#14
20240168373
2024-05-23

PHOTORESIST AND FORMATION METHOD THEREOF

#15
20240061341
2024-02-22

APPARATUS AND METHOD FOR IMPROVED EXPOSURE OF RELIEF PRECURSORS

#16
20240061340
2024-02-22

METHOD FOR EXPOSURE OF RELIEF PRECURSORS WITH MULTIPLE PROFILES

#17
20230333468
2023-10-19

RESIN COMPOSITION, CURED FILM, METHOD FOR MANUFACTURING CURED FILM, SUBSTRATE HAVING MULTILAYER FILM, METHOD FOR PRODUCING PATTERNED SUBSTRATE, PHOTOSENSITIVE RESIN COMPOSITION, METHOD FOR PRODUCING PATTERN CURED FILM, METHOD FOR PRODUCING POLYMER, AND METHOD FOR PRODUCING RESIN COMPOSITION

#18
20230290858
2023-09-14

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

#19
20230236517
2023-07-27

METHOD TO ACHIEVE TILTED PATTERNING WITH A THROUGH RESIST THICKNESS USING PROJECTION OPTICS

#20
20230229088
2023-07-20

LASER APPARATUS AND METHOD FOR MANUFACTURING ELECTRONIC DEVICES

#21
20230213693
2023-07-06

Mask orientation

#22
20230043353
2023-02-09

MULTIPLE CAMERA APPARATUS FOR PHOTOLITHOGRAPHIC PROCESSING

#23
20220357659
2022-11-10

ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS AND METHOD OF MANUFACTURING ARTICLE

#24
20220305769
2022-09-29

UV LED radiation sources for use in photopolymer exposure

#25
20220276568
2022-09-01

Apparatus and method for exposure of relief precursors

#26
20220269178
2022-08-25

Method and apparatus for exposure of flexographic printing plates using light emitting diode (LED) radiation sources

#27
20220221795
2022-07-14

METHODS FOR DETECTING TRAUMATIC BRAIN INJURY

#28
20220128745
2022-04-28

Mask orientation

#29
20210397094
2021-12-23

Systems and methods that utilize angled photolithography for manufacturing light guide elements

#30
20210335601
2021-10-28

Method of fabrication and control of nano-structure array by angle-resolved exposure in proximity-field nano patterning

#31
20210286256
2021-09-16

Mask, Layout, And Lithography System And Lithography Process Of The Same

#32
20210240083
2021-08-05

Nonlinear Scattering Lithography

#33
20210208317
2021-07-08

Mask orientation

#34
20210191282
2021-06-24

Method to achieve tilted patterning with a through resist thickness using projection optics

#35
20210165330
2021-06-03

MICROSTRUCTURE PATTERNS

#36
20210096466
2021-04-01

Light source device, illuminating apparatus, exposing apparatus, and method for manufacturing article

#37
20200350344
2020-11-05

Method of preparing thin film transistor substrate

#38
20200341378
2020-10-29

Method and apparatus for exposure of flexographic printing plates using light emitting diode (LED) radiation sources

#39
20200285152
2020-09-10

Positive resist composition and patterning process

#40
20200233313
2020-07-23

Producing light-exposed structures on a workpiece

#41
20200183276
2020-06-11

Photoactive Catalyst Compositions

#42
20200174377
2020-06-04

Light source apparatus, illumination apparatus, exposure apparatus, and method for manufacturing object

#43
20200174373
2020-06-04

Exposure apparatus, manufacturing method of flat-panel display, device manufacturing method, and exposure method

#44
20200142312
2020-05-07

Systems and methods that utilize angled photolithography for manufacturing light guide elements

#45
20200064738
2020-02-27

Method to achieve tilted patterning with a through resist thickness

#46
20190204754
2019-07-04

Method for exposing transparent substrate

#47
20190204751
2019-07-04

Exposure system and method for manufacturing display panel using the same

#48
20190113849
2019-04-18

Microlithographic illumination unit

#49
20190113847
2019-04-18

CONTROL METHOD OF EXPOSURE APPARATUS AND CONTROL APPARATUS OF EXPOSURE APPARATUS

#50
20190088472
2019-03-21

Methods of forming semiconductor device structures

#51
20190079387
2019-03-14

Reflection type exposure mask and pattern forming method

#52
20190041754
2019-02-07

Substrate processing apparatus and substrate processing method

#53
20190035629
2019-01-31

Method for manufacturing thin film transistor and mask for use in the manufacturing method

#54
20190032869
2019-01-31

Light source device

#55
20190018218
2019-01-17

Prism rotation adjustment mechanism, stepper exposure system, and stepper

#56
20180364577
2018-12-20

Methods for detecting traumatic brain injury

#57
20180348637
2018-12-06

Methods for patterning hydrogels into multi-well plates

#58
20180341181
2018-11-29

Bottom up apparatus design for formation of self-propagating photopolymer waveguides

#59
20180314167
2018-11-01

Lithography patterning with a gas phase resist

#60
20180307138
2018-10-25

Microstructure patterns

#61
20180210345
2018-07-26

Process and apparatus for controlled exposure of flexographic printing plates and adjusting the floor thereof

#62
20180210344
2018-07-26

UV mask device and method for using the same

#63
20180203357
2018-07-19

METHOD FOR CONTROLLING RADIATION EMITTING FROM ONE OR MORE TUBULAR LAMPS IN AN EXPOSURE APPARATUS

#64
20180164687
2018-06-14

Position adjusting unit of optical element and maskless exposure apparatus including the same

#65
20180144941
2018-05-24

Methods and apparatus for fabricating IC chips with tilted patterning

#66
20180126721
2018-05-10

Automated UV-LED exposure of flexographic printing plates

#67
20180067397
2018-03-08

Exposure apparatus, manufacturing method of flat-panel display, device manufacturing method, and exposure method

#68
20180031973
2018-02-01

Method of making a flexographic printing plate

#69
20180017877
2018-01-18

Light source arrangement for a photolithography exposure system and photolithography exposure system

#70
20180004093
2018-01-04

Method for producing a flexographic printing frame through multiple exposures using UV LEDS

#71
20170365684
2017-12-21

Method for forming mask pattern, thin film transistor and method for forming the same, and display device

#72
20170351175
2017-12-07

SYNTHETIC PAPER

#73
20170315435
2017-11-02

Patterned multi-beam nanoshift lithography for on-the-fly, high throughput production of customizable shape-designed microparticles, nanoparticles, and continuous films

#74
20170285493
2017-10-05

Projection exposure method and projection exposure apparatus

#75
20170269480
2017-09-21

METHOD AND APPARATUS FOR USING PATTERNING DEVICE TOPOGRAPHY INDUCED PHASE

#76
20170261847
2017-09-14

Exposure method, method of fabricating periodic microstructure, method of fabricating grid polarizing element and exposure apparatus

#77
20170131630
2017-05-11

Pattern forming method

#78
20170090289
2017-03-30

Method of manufacturing a structure on a substrate

#79
20170057193
2017-03-02

Sparse truss structures and methods of making the same

#80
20160363869
2016-12-15

Light-curing type 3D printing device and image exposure system thereof

#81
20160229173
2016-08-11

Automated UV-LED exposure of flexographic printing plates

#82
20160223913
2016-08-04

Exposure device and lighting unit

#83
20160207299
2016-07-21

Device and method for the in-line production of flexographic printing plates

#84
20160170306
2016-06-16

Method for producing a medical device or a device with structure elements, method for modifying the surface of a medical device or of a device with structure elements, medical device and laminated composite with a substrate

#85
20160091740
2016-03-31

Substrate patterning using a digital liquid crystal array

#86
20160041468
2016-02-11

Exposure apparatus and a method for exposing a photosensitive element and a method for preparing a printing form from the photosensitive element

#87
20150198754
2015-07-16

Optical wavelength dispersion device and method of manufacturing the same

#88
20150177568
2015-06-25

Photo-alignment exposure device and photo-alignment exposure method

#89
20150168840
2015-06-18

Method for optical transmission of a structure into a recording medium

#90
20150153648
2015-06-04

Optical wavelength dispersion device and method of manufacturing the same

#91
20150132477
2015-05-14

Cliché and printing apparatus comprising same

#92
20150098071
2015-04-09

Optical arrangement for three-dimensionally patterning a material layer

#93
20150009478
2015-01-08

Exposure head and exposure device

#94
20140368748
2014-12-18

Light exposure system comprising a plurality of moving stages and light exposure process

#95
20140315132
2014-10-23

Exposure apparatus and a method for exposing a photosensitive element and a method for preparing a printing form from the photosensitive element

#96
20140313497
2014-10-23

Exposure apparatus and a method for controlling radiation from a lamp for exposing a photosensitive element

#97
20140295352
2014-10-02

Method of improving print performance in flexographic printing plates

#98
20140057207
2014-02-27

Method of improving print performance in flexographic printing plates

#99
20140049978
2014-02-20

LED-based photolithographic illuminator with high collection efficiency

#100
20130329209
2013-12-12

Mask, exposure apparatus and device manufacturing method

#101
20130323651
2013-12-05

System and method for production of nanostructures over large areas

#102
20130135740
2013-05-30

Optical wavelength dispersion device and method of manufacturing the same

#103
20130135602
2013-05-30

Scanning exposure apparatus using a plurality of microlens arrays with adjustable inclination

#104
20130114928
2013-05-09

Optical wavelength dispersion device and method of manufacturing the same

#105
20130095416
2013-04-18

PHOTOMASK AND PATTERN FORMATION METHOD

#106
20130057842
2013-03-07

Solution to optical constraint on microtruss processing

#107
20130033689
2013-02-07

Dynamic masking method for micro-truss foam fabrication

#108
20120264065
2012-10-18

Method of optical fabrication of three-dimensional polymeric structures with out of plane profile control

#109
20120258289
2012-10-11

Method of fabricating nanostructure array and device including nanostructure array

#110
20120248339
2012-10-04

Light processing apparatus

#111
20120224159
2012-09-06

METHOD AND APPARATUS FOR PATTERNING A DISK

#112
20120214104
2012-08-23

Method for producing microstructure

#113
20110310374
2011-12-22

Lithographic fabrication of general periodic structures by exposing a photosensitive layer to a range of lateral intensity distributions

#114
20110207054
2011-08-25

Self-aligned, sub-wavelength optical lithography

#115
20110195361
2011-08-11

Solution to optical constraint on microtruss processing

#116
20110090480
2011-04-21

Dynamic masking method for micro-truss foam fabrication

#117
20110079158
2011-04-07

Method of improving print performance in flexographic printing plates

#118
20100195082
2010-08-05

Device, System, And Method For Multidirectional Ultraviolet Lithography

#119
20100141732
2010-06-10

IMAGE RECORDING DEVICE AND METHOD

#120
20100112465
2010-05-06

OPTICAL ARRANGEMENT FOR THREE-DIMENSIONALLY PATTERNING A MATERIAL LAYER

#121
20100051943
2010-03-04

Method for forming pattern, thin film transistor, display device, method for manufacturing thereof, and television apparatus

#122
20100046079
2010-02-25

Polymer pattern and metal film pattern, metal pattern, plastic mold using thereof, and method of the forming the same

#123
20100044913
2010-02-25

Method for producing surface convexes and concaves

#124
20100021647
2010-01-28

Dry adhesives and methods for making dry adhesives

#125
20100009140
2010-01-14

LITHOGRAPHIC METHOD FOR WIRING A SIDE SURFACE OF A SUBSTRATE

#126
20090297989
2009-12-03

Method and device for patterning a disk

#127
20090294696
2009-12-03

Curing of photo-curable printing plates with flat tops or round tops

#128
20090290891
2009-11-26

Curing of photo-curable printing plates using a light tunnel of mirrored walls and having a polygonal cross-section like a kaleidoscope

#129
20090261491
2009-10-22

Method for producing surface convexes and concaves

#130
20090170014
2009-07-02

Mask, exposure apparatus and device manufacturing method

#131
20090162798
2009-06-25

Method of manufacturing master plate, method of manufacturing microneedle patch and apparatus exposure apparatus

#132
20090102018
2009-04-23

Localized masking for semiconductor structure development

#133
20090042137
2009-02-12

Method for translating a structured beam of energetic particles across a substrate in template mask lithography

#134
20080305438
2008-12-11

Method for fabricating polymer ridged waveguides by using tilted immersion lithography

#135
20080213691
2008-09-04

Method to print photoresist lines with negative sidewalls

#136
20080182081
2008-07-31

Polymer or resist pattern, and metal film pattern, metal pattern and plastic mold using the same, and fabrication methods thereof

#137
20080165338
2008-07-10

Self-aligned, sub-wavelength optical lithography

#138
20070160936
2007-07-12

Adhesion method using gray-scale photolithography

#139
20070159611
2007-07-12

Source Multiplexing in Lithography

#140
20070138699
2007-06-21

Imprint lithography

#141
20070054221
2007-03-08

Method of manufacturing nozzle plate

#142
20070048677
2007-03-01

Exposure method for making separator

#143
20070042299
2007-02-22

Method to print photoresist lines with negative sidewalls

#144
20060269848
2006-11-30

Exposure mask and method of manufacturing the same, and semiconductor device manufacturing method

#145
20060214105
2006-09-28

Micromachining process, system and product

#146
20060110694
2006-05-25

Method and systems to print contact hole patterns

#147
20060051679
2006-03-09

Lithographic method for wiring a side surface of a substrate

#148
20060006448
2006-01-12

Localized masking for semiconductor structure development

#149
20050263725
2005-12-01

Source multiplexing in lithography

#150
20050263724
2005-12-01

Source multiplexing in lithography

#151
20050263723
2005-12-01

Source multiplexing in lithography

#152
20050221203
2005-10-06

Method for forming pattern, thin film transistor, display device, method for manufacturing thereof, and television apparatus

#153
20050207018
2005-09-22

Out-of-plane pre-aligned refractive micro lens

#154
20050151944
2005-07-14

Patterning apparatus and method for fabricating continuous pattern using the same

#155
20050147921
2005-07-07

High resolution lithography system and method

#156
20050064343
2005-03-24

Method for fabricating complex three-dimensional structures on the submicrometric scale by combined lithography of two resists

#157
20050058952
2005-03-17

Method to print photoresist lines with negative sidewalls

#158
20050025403
2005-02-03

Dynamic pressure bearing manufacturing method, dynamic pressure bearing and dynamic pressure bearing manufacturing device

#159
20050014099
2005-01-20

Method for providing apertures having sublithographic dimensions in silicon substrates