177077 ⎘
Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor; Exposure; Apparatus therefor using originals with apertures, e.g. stencil exposure masks
Sub-classes:SCREEN MASK FOR SCREEN PRINTING AND MANUFACTURING METHOD OF THE SAME
#2WAFER BOW COMPENSATION BY PATTERNED UV CURE
#3BLANKING APERTURE ARRAY SYSTEM AND MULTI CHARGED PARTICLE BEAM WRITING APPARATUS
#4SEMICONDUCTOR FABRICATION APPARATUS
#5Method and system for nanoscale data recording
#6CIRCUIT PATTERN FORMING SHEET, CIRCUIT PATTERN MANUFACTURING APPARATUS, CIRCUIT PATTERN MANUFACTURING METHOD, AND CIRCUIT PATTERN MANUFACTURING PROGRAM
#7Stretchable transparency-adjusting film having an orientated heterogeneous interface, method for manufacturing the same and smart window having stretchable transparency-adjusting film
#8Method and system for nanoscale data recording
#9Method and process for stochastic driven detectivity healing
#10Custom multiwell plate design for rapid assembly of photo-patterned hydrogels
#11Devices and methods for non-planar photolithography of nail polish
#12Exposure device
#13Circuit pattern forming sheet, circuit pattern manufacturing apparatus, circuit pattern manufacturing method, and circuit pattern manufacturing program
#14EXPOSURE METHOD AND EXPOSURE MACHINE
#15Mask plate and method for manufacturing array substrate
#16Mask Device for Optical Alignment and Equipment Thereof
#17Mask processing using films with spatially selective birefringence reduction
#18Exposure device and exposure method
#19Methods for optical proximity correction in the design and fabrication of integrated circuits using extreme ultraviolet lithography
#20Generalization of shot definitions for mask and wafer writing tools
#21Projection patterning with exposure mask
#22Apparatus and method for irradiating
#23Special layout design printed rectangular pattern and improved pattern critical dimension uniformity
#24LIGHT EXPOSURE METHOD, LIGHT EXPOSURE DEVICE, AND REFLECTIVE PROJECTION LIGHT EXPOSURE MASK
#25Adaptive photomasks and methods for using the same
#26Reticles for use in forming implant masking layers and methods of forming implant masking layers
#27Photomask for exposure and method of manufacturing pattern using the same
#28Lithography using photoresist with photoinitiator and photoinhibitor
#29Reticles for use in forming implant masking layers and methods of forming implant masking layers
#30Optical element, illumination device, measurement apparatus, photomask, exposure method, and device manufacturing method
#31Illuminating waveguide fabrication method
#32Nanolithography system
#33Illuminating waveguide fabrication method
#34Nanolithography system
#35Nanolithography system
#36Resistless lithography method for fabricating fine structures