SUBSTARATE PROCESSING APPARATUS WITH VUV INTENSITY CONTROL

DIGITAL LITHOGRAPHY APPARATUS WITH AUTOFOCUS POSITION CONTROL AND METHODS OF USE THEREOF

SYSTEMS AND METHODS FOR DIGITAL LITHOGRAPHY SCAN SEQUENCING

MASKLESS PHOTOLITHOGRAPHY PROCESS FOR THE SYNTHESIS OF METALLIC NANOSTRUCTURES OF FRACTAL GEOMETRY DIRECTLY ON 2D PRINTED CARBON-BASED NANOSHEETS UNDER ROOM TEMPERATURE UV IRRADIATION

STRUCTURE COMPRISING MICROCHANNEL, PRODUCTION METHOD FOR SAID STRUCTURE, AND MICROCHANNEL DEVICE

ENHANCING EFFICIENCY OF RESIST PATTERNING

METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING

Maskless based lithography methods

MASKLESS EXPOSURE DEVICE AND DISPLAY DEVICE

Multi Pattern Maskless Lithography Method and System

Manufacturing method for cured substance, manufacturing method for laminate, and manufacturing method for semiconductor device, and treatment liquid

TOOL DRIFT COMPENSATION WITH MACHINE LEARNING

METHODS TO IMPROVE PROCESS WINDOW AND RESOLUTION FOR DIGITAL LITHOGRAPHY WITH TWO EXPOSURES

PHOTORESISTS CONTAINING TANTALUM

MASKLESS PHOTOLITHOGRAPHY DEVICES, METHODS, AND SYSTEMS

METHODS AND SYSTEMS FOR PHOTOPATTERNING AND MINIATURIZATION

Method and system for nanoscale data recording

CIRCUIT PATTERN FORMING SHEET, CIRCUIT PATTERN MANUFACTURING APPARATUS, CIRCUIT PATTERN MANUFACTURING METHOD, AND CIRCUIT PATTERN MANUFACTURING PROGRAM

Methods for variable etch depths

SYSTEMS AND METHODS FOR OPTIMIZATION OF PARAMETERS FOR EXPOSING FLEXOGRAPHIC PHOTOPOLYMER PLATES

Method and apparatus for illuminating image points

DEVELOPMENT METHOD AND TREATMENT METHOD FOR PATTERNING METAL LAYER

Digital exposure machine and exposure control method thereof

Method and system for nanoscale data recording

Maskless photolithography devices, methods, and systems

Light irradiating device, light irradiating method and recording medium

Digital masking system, pattern imaging apparatus and digital masking method

Method and system for nanoscale data recording

Digital Projection System for the Development of Photolithography Devices

Image exposure device

Photoactive Catalyst Compositions

Method and system for nanoscale data recording

Grating structure, manufacturing method thereof and display device

Method for manufacturing array substrate and method for manufacturing liquid crystal antenna

Liquid masks for microfabrication processes

MASKLESS PHOTOLITHOGRAPHY DEVICES, METHODS, AND SYSTEMS

Systems, devices, and methods for printing on three-dimensional objects

Method and device for exposure of photosensitive layer

Critical dimension correction via calibrated trim dosing

Creating rewritable lenses

Line edge roughness reduction via step size alteration

LM guide assembling method using half division and computer-readable record medium having program recorded for executing same

Method and system for nanoscale data recording

Maskless exposure method, maskless exposure apparatus and method of manufacturing a semiconductor device using the same

DIGITAL MASKING SYSTEM, PATTERN IMAGING APPARATUS AND DIGITAL MASKING METHOD

Critical dimension control by use of a photo agent

Method for manufacturing pattern for electronic devices, and fiber-type electronic device comprising the pattern for electronic devices

Method of providing photopatterned functional surfaces

Nanoscale pattern exposure system

Position adjusting unit of optical element and maskless exposure apparatus including the same

Circuit pattern forming sheet, circuit pattern manufacturing apparatus, circuit pattern manufacturing method, and circuit pattern manufacturing program

System and method for generating mask pattern and exposure system

IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE

Active eye-to-eye with alignment by X-Y capacitance measurement

Critical dimension control by use of a photo agent

Exposure method, exposure equipment and 3-D structure

Grid refinement method

Method of reducing shot count in direct writing by a particle or photon beam

Line edge roughness reduction via step size alteration

Exposure head, exposure apparatus and method of operating an exposure head

System for creating nanoscale patterns

PHOTOCONDUCTIVE LAYER WITH ADJUSTABLE ELECTRICAL PROPERTY

Grid refinement method

Maskless lithography for web based processing

System and method for maskless direct write lithography

CORE-SHELL NANOPARTICLES, METHODS OF MAKING SAME, AND USES OF SAME

Reagent for enhancing generation of chemical species

METHOD OF MANUFACTURING PHOTOSENSITIVE GLASS SUBSTRATE

Metering device for metering a light-curing material in a manually controlled manner

Systems, devices, and methods for printing on three-dimensional objects

Super-resolution exposure system

Maskless digital lithography systems and methods with image motion compensation

Maskless exposure device, maskless exposure method and display substrate manufactured by the maskless exposure device and the maskless exposure method

Grid refinement method

Exposure apparatus and a method for exposing a photosensitive element and a method for preparing a printing form from the photosensitive element

Electric/magnetic field guided acid profile control in a photoresist layer

Method for writing nanoscale patterns

Apparatus and method of direct writing with photons beyond the diffraction limit using two-color resist

Composition for forming resist underlayer film for nanoimprint

METHOD FOR RECORDING AN IMAGE AND ASSOCIATED MEDIUM

Method and system for nanopatterning

Forming method and substrate

Digital exposure device using digital micro-mirror device and a method for controlling the same

Grid refinement method

Method and apparatus for the formation of conductive films on a substrate

Exposure apparatus and exposure method

Exposure apparatus and a method for exposing a photosensitive element and a method for preparing a printing form from the photosensitive element

Exposure apparatus and a method for controlling radiation from a lamp for exposing a photosensitive element

Flow through MEMS package

Programmable photolithography

Methods of patterning block copolymer layers and patterned structures

Pattern generator for a lithography system

Maskless process for pre-tilting liquid crystal molecules

Method and apparatus for merging multiple geometrical pixel images and generating a single modulator pixel image

Method and apparatus for merging multiple geometrical pixel images and generating a single modulator pixel image

Method and system for improving critical dimension uniformity using shaped beam lithography

Composition, process of preparation and method of application and exposure for light imaging paper

Photoresist composition and method of forming a black matrix using the same

METHOD OF EXPOSING A SEMICONDUCTOR WAFER AND EXPOSURE APPARATUS

Optical writer for flexible foils

Photoresist composition and method of forming a color filter using the same

IMPRINT MOLD FOR MANUFACTURING BIT-PATTERNED MEDIUM AND MANUFACTURING METHOD OF THE SAME

Grid refinement method

Fabrication of enclosed nanochannels using silica nanoparticles

Support, lithographic apparatus and device manufacturing method

Method of direct writing with photons beyond the diffraction limit

Optical irradiation apparatus with super luminescent diodes

Illuminating waveguide fabrication method

Flow through MEMS package

Method of optical fabrication of three-dimensional polymeric structures with out of plane profile control

Nanolithography system

Use of patterned UV source for photolithography

COMPOSITION FOR FORMING RESIST UNDERLAYER FILM FOR NANOIMPRINT

Diffraction unlimited photolithography

Method and apparatus for merging multiple geometrical pixel images and generating a single modulator pixel image

Beam pen lithography

Method of exposing a semiconductor wafer and exposure apparatus

Maskless exposure apparatus and stitching exposure method using the same

Composition, process of preparation and method of application and exposure for light imaging paper

Self-aligned, sub-wavelength optical lithography

ELECTROCHEMICAL CELL

Electrochemical cell

ELECTROCHEMICAL CELL

METHOD AND APPARATUS FOR HIGH DENSITY STORAGE OF ANALOG DATA IN A DURABLE MEDIUM

Illuminating waveguide fabrication method

Nanolithography system

Curing of photo-curable printing plates using a light tunnel of mirrored walls and having a polygonal cross-section like a kaleidoscope

Method for Producing Two-Dimensional Periodic Structures in a Polymeric Medium

MANUFACTURING METHOD OF CIRCUIT BOARD

Self-aligned, sub-wavelength optical lithography

Method for Manufacturing a Device Using Imprint Lithography and Direct Write Technology

Image Recording Device and Image Recording Method

Nanolithography system

Method for manufacturing a patterned structure

Patterning method

Maskless photolithography for etching and deposition

Pulse light pattern writer

System and method for manufacturing printed circuit boards employing non-uniformly modified images

Apparatus and method for repairing resist latent images

Method and apparatus for controlling the vacuum distribution in an exposer for printing originals

Fabrication of enclosed nanochannels using silica nanoparticles

Automatic optimization of etch process for accelerated yield ramp with matched charged particle multi-beam systems

Matched multiple charged particle beam systems for lithographic patterning, inspection, and accelerated yield ramp

Automatic optimization of etch process for accelerated yield ramp with matched charged particle multi-beam systems

Matched multiple charged particle beam systems for lithographic patterning, inspection, and accelerated yield ramp