177081 ⎘
Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor; Exposure; Apparatus therefor; Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source using a laser
Sub-classes:LINE SCANNING TEMPORALLY FOCUSED TWO-PHOTON LITHOGRAPHY SYSTEM
#2SYSTEM AND METHOD FOR MITIGATING TRAILING EDGE VOIDS IN FLEXO PRINTING
#3RESIST COMPOSITION AND PATTERN FORMING PROCESS
#4MICROPATTERNING METHOD, MICROPATTERNING APPARATUS AND MICROPATTERNING CHIP FOR SILICONE-BASED ELASTOMER
#5METHOD FOR MANUFACTURING MASTER, METHOD FOR MANUFACTURING TRANSFERRED OBJECT, METHOD FOR MANUFACTURING REPLICA MASTER, AND APPARATUS FOR MANUFACTURING MASTER
#6METHOD FOR SMOOTHER TONAL RESPONSE IN FLEXOGRAPHIC PRINTING
#7METHOD FOR NON-INVASIVE PRODUCTION OF DEFINED STRUCTURES INSIDE COMPARTMENTS AND COMPARTMENT
#8EMBEDDING REDISTRIBUTION LAYER METAL TRACES IN A POLYMERIC DIELECTRIC
#9RESIST COMPOSITION AND PATTERN FORMING PROCESS
#10Method and apparatus for direct writing photoetching by parallel interpenetrating super-resolution high-speed laser
#11Laser interference photolithography system
#12SYSTEM AND METHOD FOR MITIGATING TRAILING EDGE VOIDS IN FLEXO PRINTING
#13SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE FLOATING AMOUNT MEASUREMENT METHOD
#14APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING A SUBSTRATE
#15DETECTING UNIT AND SUBSTRATE TREATING APPARATUS INCLUDING THE SAME
#16METHOD AND APPARATUS FOR LITHOGRAPHY-BASED GENERATIVE MANUFACTURING OF A THREE-DIMENSIONAL COMPONENT
#17LIGNIN BASED LASER LITHOGRAPHY PROCESS FOR FABRICATING 3D GRAPHENE ELECTRODE AND METHOD
#18Micropatterning method, micropatterning apparatus and micropatterning chip for silicone-based elastomer
#19SYSTEMS AND METHODS FOR COMBINATORIAL ARRAYS USING DYNAMIC INTERFERENCE LITHOGRAPHY
#20PHOTOEXCITATION METHOD
#21Two-photon-polymerization laser direct writing system based on acousto-optic deflector
#22Laser focussing module
#23Method and apparatus for writing imageable material using multiple beams
#24Method and device for processing print data and for printing according to such print data
#25IN-SITU SYNTHESIS AND DEPOSITION OF HIGH ENTROPY ALLOY AND MULTI METAL OXIDE NANO/MICRO PARTICLES BY FEMTOSECOND LASER DIRECT WRITING
#26Method of producing a test body for diffusion tensor imaging
#27Integrated super-resolution laser direct-writing device and direct-writing method
#28Substrate deforming device for proximity exposure, and substrate deforming method for proximity exposure using same
#29Method for smoother tonal response in flexographic printing
#30Method for producing an optical system and optical system
#31Nanoscale Etching of Light Absorbing Materials using Light and an Electron Donor Solvent
#32METHODS FOR FORMING PATTERNED INSULATING LAYERS ON CONDUCTIVE LAYERS AND DEVICES MANUFACTURED USING SUCH METHODS
#33GAS LASER APPARATUS, AND ELECTRONIC DEVICE MANUFACTURING METHOD
#34Optical patterning systems and methods
#35METHOD FOR PRODUCING A THREE-DIMENSIONAL OBJECT BY A MULTIPHOTON PHOTOPOLYMERIZATION PROCESS AND ASSOCIATED DEVICE
#36Lignin based laser lithography process for fabricating 3D graphene electrode and method
#37Maskless exposure apparatus and method, and manufacturing method of a semiconductor device including the maskless exposure method
#38Resist composition and patterning process
#39Method for smoother tonal response in flexographic printing
#40Lithographic exposure system and method for exposure and curing a solder resist
#41MASK-LESS LASER DIRECT IMAGING SYSTEM
#42Photolithography for Making Electrochemical Measurements
#43Structured nanoporous materials, manufacture of structured nanoporous materials and applications of structured nanoporous materials
#44Actinic ray-sensitive or radiation-sensitive resin composition, resist film, pattern forming method, and method for manufacturing electronic device
#45Exposure apparatus and exposure method
#46Method for producing a radiation-emitting component, and radiation-emitting component
#47Fast fabrication of polymer out-of-plane optical coupler by gray-scale lithography
#48Excimer laser apparatus and electronic-device manufacturing method
#49Resist composition and patterning process
#50Lithographic printing plate precursor, method of producing lithographic printing plate, and lithographic printing method
#51Resist composition and method for producing resist pattern
#52A CLEAR-OUT TOOL, A LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD
#53PHOTOSENSITIVE RESIN COMPOSITION, RESIST FILM, PATTERN FORMING METHOD, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE
#54Method for removing photosensitive material on a substrate
#55Resist underlayer film-forming composition comprising polymer having structural unit having urea linkage
#56ONIUM SALT, RESIST COMPOSITION, AND PATTERN FORMING PROCESS
#57HIGH-RESOLUTION FLEXOGRAPHIC PRINTING PLATE AND MEANS FOR PRODUCING SAME
#58Portion of layer removal at substrate edge
#59Additive manufacturing of architectured materials
#60LITHOGRAPHY SYSTEM AND LITHOGRAPHY METHOD
#61MASKLESS EXPOSURE APPARATUS AND METHOD, AND MANUFACTURING METHOD OF A SEMICONDUCTOR DEVICE INCLUDING THE MASKLESS EXPOSURE METHOD
#62Target supply device, extreme ultraviolet light generation device, and target supply method
#63Method for manufacturing electrically conductive structures on a carrier material
#64Resist composition and patterning process
#65Method for smoother tonal response in flexographic printing
#66Nanoscale etching of light absorbing materials using light and an electron donor solvent
#67Actinic ray-sensitive or radiation sensitive resin composition, actinic raysensitive or radiation-sensitive film, pattern forming method, method for manufacturing electronic device, and photoacid generator
#68ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE RESIN COMPOSITION, ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE FILM, PATTERN FORMING METHOD, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE
#69Method and device for exposure of photosensitive layer
#70Target generation device replacement trolley, target generation device replacement system, and target generation device replacement method
#71Method for producing an optical system and optical system
#72RESIST COMPOSITION, PATTERN FORMING METHOD, AND METHOD OF MANUFACTURING ELECTRONIC DEVICE
#73Device and method for laser-assisted processing of bodies or surfaces
#74FLEXIBLE CONDUCTIVE TRANSPARENT FILMS, ARTICLES AND METHODS OF MAKING SAME
#75Fluid flow device and method for making the same
#76DIRECT EXPOSURE MACHINE WITHOUT MASK
#77LITHOGRAPHIC PRINTING PLATE PRECURSOR, METHOD OF PRODUCING LITHOGRAPHIC PRINTING PLATE, AND LITHOGRAPHIC PRINTING METHOD
#78Critical dimension control by use of a photo agent
#79Fabrication methods for nanodelivery systems for long term controlled delivery of active pharmaceutical ingredients
#80Exposure apparatus and exposure method
#81Cleaning composition
#82Exposure optics and device for producing a three-dimensional object
#83Photosensitive resin composition and color filter using the same
#84Method for manufacturing information recording medium
#85Photolithography for making electrochemical measurements
#86ANTI-REFLECTION FILM, OPTICAL COMPONENT, OPTICAL DEVICE, AND METHOD OF PRODUCING ANTI-REFLECTION FILM
#87Semi-submersible microscope objective with protective element and use of the same in multiphoton imaging method
#88Maskless photolithographic system in cooperative working mode for cross-scale structure
#89Light-diffusion powder, quantum-dot-containing photoresist, and quantum-dot-containing color film, and preparation methods
#90Chemically amplified negative resist composition and resist pattern forming process
#91Mask blank, phase-shift mask and method for manufacturing semiconductor device
#92HIGHLY RESOLVED PHOTOCHEMISTRY BELOW THE DIFFRACTION LIMIT BY MEANS OF SWITCHABLE PHOTO-ENOLIZATION
#93Laser chamber with metal damper member
#94Method for producing a structure with spatial encoded functionality
#95Pattern manufacturing apparatus, pattern manufacturing method, and pattern manufacturing program
#96ADDITIVE MANUFACTURING OF ARCHITECTURED MATERIALS
#97Sulfonium compound, resist composition, and patterning process
#98Photoacid-generating compound, polymer derived therefrom, photoresist composition including the photoacid-generating compound or polymer, and method of forming a photoresist relief image
#99Surface treatment method for dielectric anti-reflective coating (DARC) to shrink photoresist critical dimension (CD)
#100Pattern drawing apparatus and pattern drawing method
#101Critical dimension control by use of a photo agent
#102Chipless radio frequency identification (RFID) made using photographic process
#103Exposure method, exposure equipment and 3-D structure
#104Negative-working photoresist compositions for laser ablation and use thereof
#105System and method for micro-nano machining by femtosecond laser two-photon polymerization
#106Method for manufacturing master, transfer copy, and replica master
#107Luminescent complex, luminescent material, substrate for display and production method thereof, and display apparatus
#108NEGATIVE-WORKING PHOTORESIST COMPOSITIONS FOR LASER ABLATION AND USE THEREOF
#109Liquid crystal display device
#110Color filter including quantum dots and metal nanoparticles and display apparatus including the same
#111RESIST COMPOSITION AND PATTERNING PROCESS
#112Resist composition and patterning process
#113Resist composition and pattern forming process
#114Cleaning composition for photolithography and method of forming photoresist pattern using the same
#115Composition for forming resist underlayer film and patterning process
#116Polymer for preparing resist underlayer film, resist underlayer film composition containing the polymer and method for manufacturing semiconductor device using the composition
#117Polymer for preparing resist underlayer film, resist underlayer film composition containing the polymer and method for manufacturing semiconductor device using the composition
#118Pattern forming process
#119Resist composition and patterning process
#120Mask blank, phase-shift mask and method for manufacturing semiconductor device
#121Polymer-containing coating liquid applied to resist pattern
#122Patterning process
#123RADIATION-SENSITIVE RESIN COMPOSITION AND RESIST PATTERN-FORMING METHOD
#124ACTIVE LIGHT SENSITIVE OR RADIATION SENSITIVE RESIN COMPOSITION, PATTERN FORMING METHOD, METHOD FOR MANUFACTURING ELECTRONIC DEVICE, AND ELECTRONIC DEVICE
#125Sulfonium salt, chemically amplified resist composition, and patterning process
#126Active light sensitive or radiation sensitive resin composition, pattern forming method, method for manufacturing electronic device, and electronic device
#127Pattern formation method, etching method, electronic device manufacturing method, and electronic device
#128RESIST COMPOSITION AND PATTERNING PROCESS
#129Photosensitive resin composition, photosensitive element, method for forming resist pattern, and method for producing printed wiring board
#130Resist composition and patterning process
#131Onium salt, resist composition, and patterning process
#132Liquid photoreactive composition and method of fabricating structures
#133Laser annealing and electric field
#134Semi-submersible microscope objective with protective element and use of the same in multiphoton imaging method
#135Onium salt compound, resist composition, and pattern forming process
#136Method and apparatus for making a high resolution light pattern generator on a transparent substrate
#137Resist underlayer film formation composition and method for forming resist pattern using the same
#138Optical element, display device, master, and method for manufacturing optical element
#139Rinse solution for pattern formation and pattern forming process
#140Photolithography for making electrochemical measurements
#141Additive for resist underlayer film-forming composition and resist underlayer film-forming composition containing the same
#142Method for producing a three-dimensional structure
#143Patterning process and chemically amplified negative resist composition
#144Mask, method of manufacturing the same, and method of manufacturing a display panel using the same
#145NANOSTRUCTURE
#146Laser micro/nano processing system and method
#147MICROFLUIDIC DEVICE AND A METHOD FOR PREPARING THE MICROFLUIDIC DEVICE FROM A PHOTOSENSITIVE ELEMENT
#148Resist composition and patterning process
#149Chemically amplified resist composition and patterning process
#150PATTERN-FORMING METHOD, ELECTRONIC DEVICE AND METHOD FOR PRODUCING SAME, AND DEVELOPING FLUID
#151Maskless exposure method and a maskless exposure device for performing the exposure method
#152Lithographic apparatus and device manufacturing method
#153Photo acid generator, chemically amplified resist composition, and patterning process
#154Process for the laser treatment of coatings
#155Nanostructure and method of manufacturing the same
#156Display device
#157Extreme ultraviolet/soft X-ray laser nano-scale patterning using the demagnified Talbot effect
#158Optically transitioned metal-insulator surface
#159Fabrication method for pattern-formed structure
#160Photoresist with rare-earth sensitizers
#161Multiphoton Curing Methods Using Negative Contrast Compositions
#162Developer for photosensitive resist material and patterning process
#163Developer for photosensitive resist material and patterning process
#164Optical recording head and image forming apparatus
#165Mask manufacturing apparatus and method of manufacturing mask using laser beam
#166Multi-photon exposure system
#167Lithography using photoresist with photoinitiator and photoinhibitor
#168Extreme ultraviolet/soft X-ray laser nano-scale patterning using the demagnified talbot effect
#1693D mold for manufacturing of sub-micron 3D structures using 2-D photon lithography and nanoimprinting and process thereof
#170Selective masking by photolithography (SMP) for making electrochemical measurements
#171Three-dimensional direct-write lithography
#172Apparatus for forming fine patterns capable of switching direction of polarization interference pattern in laser scanning method and method of forming fine patterns using the same
#173Laser micro/nano processing system and method
#174Laser apparatus for generating a line-shaped intensity distribution in a working plane
#175Patterning methods and products
#176Method and apparatus for making a high resolution light pattern generator on a transparent substrate
#177Laser-engraveable compositions and flexographic printing precursors comprising organic porous particles
#178Laser-engraveable compositions and flexographic printing precursors
#179Laser exposure method and product
#180Method of marking a metal component surface with modifying sequences in which the segments of the markings are formed
#181Method of manufacturing interconnection member and electronic device
#182MANUFACTURING DEVICE OF OPTICAL DEFLECTOR AND MANUFACTURING METHOD OF THE SAME
#183PHOTOSENSITIVE COMPOSITION AND METHOD OF MANUFACTURING A SUBSTRATE FOR A DISPLAY DEVICE USING THE SAME
#184MESH STRUCTURE FOR SURFACE PLASMON RESONANCE SPECTROSCOPY
#185UV curing creating flattop and roundtop structures on a single printing plate
#186FLOW RESTRICTOR FOR MEDICAL DEVICES
#187Polyol photosensitizers, carrier gas UV laser ablation sensitizers, and other additives and methods for making and using same
#188FUNCTIONALLY GRADIENT INORGANIC RESIST, SUBSTRATE WITH FUNCTIONALLY GRADIENT INORGANIC RESIST, CYLINDRICAL BASE MATERIAL WITH FUNCTIONALLY GRADIENT INORGANIC RESIST, METHOD FOR FORMING FUNCTIONALLY GRADIENT INORGANIC RESIST AND METHOD FOR FORMING FINE PATTERN, AND INORGANIC RESIST AND METHOD FOR FORMING THE SAME
#189Lithography using photoresist with photoinitiator and photoinhibitor
#190Method and system for raman, fluorescence, lithographic, stimulated emission and photochemical imaging beyond the diffraction limit
#191Apparatuses and methods for compensation of carrier distortions from measurement machines
#192Digital optical chemistry micromirror imager
#193Optical element manufacturing method, optical element exposure device, optical element, lighting optical device, display device, and electronic apparatus
#194Methods for mastering microstructures through a substrate using negative photoresist
#195Compositions, optical data storage media and methods for using the optical data storage media
#1963D mold for manufacturing of sub-micron 3D structures using 2-D photon lithography and nanoimprinting and process thereof
#197Method and system for photolithographic fabrication with resolution far below the diffraction limit
#198Method for processing workpiece with photoresist layer
#199Multi-photon exposure system
#200Substrate patterning using a digital optical chemistry micromirror imager
#201Optical recording material, optical recording method, photosensitive material and method
#202TOOL FOR MAKING MICROSTRUCTURED ARTICLES
#203MICROSTRUCTURE SYNTHESIS BY FLOW LITHOGRAPHY AND POLYMERIZATION
#204Composition for radical polymerization and method of forming pattern using the composition
#205Aqueous microfabrication of functional bioelectronic architectures
#206Multiphoton curing to provide encapsulated optical elements
#207Method and apparatus for making a high resolution light pattern generator on a transparent substrate
#208Method and apparatus for processing multiphoton curable photoreactive compositions
#209Method of optical fabrication of three-dimensional polymeric structures with out of plane profile control
#210Three-dimensional direct-write lithography
#211Polyol photosensitizers, carrier gas UV laser ablation sensitizers, and other additives and methods for making and using same
#212Fluorescent photopolymerizable resins and uses thereof
#213Laser direct imaging apparatus and imaging method
#214THREE-DIMENSIONAL MICROFABRICATION METHOD USING PHOTOSENSITIVE NANOCRYSTALS AND DISPLAY DEVICE
#215Multi-photon reacted articles with inorganic particles and method for fabricating structures
#216Fabrication Of Polymeric Structures
#217PHOTOSENSITIVE COMPOSITION AND TWO-PHOTON ABSORPTION PHOTORECORDING MEDIUM
#218Multi-photon polymerizable pre-ceramic polymeric compositions
#219Photosensitive polymeric material for worm optical data storage with two-photon fluorescent readout
#220Resists for lithography
#221Dual layer workpiece masking and manufacturing process
#222Fabrication method for pattern-formed structure
#223Process for producing photonic crystals and controlled defects therein
#224MULTI-PHOTON REACTIVE COMPOSITIONS WITH INORGANIC PARTICLES AND METHOD FOR FABRICATING STRUCTURES
#225Single- and multi-photon polymerizable pre-ceramic polymeric compositions
#226Digital optical chemistry micromirror imager
#227Patterning methods and products
#228Microstructure synthesis by flow lithography and polymerization
#229Dual layer workpiece masking and manufacturing process
#230MULTIPASS MULTIPHOTON ABSORPTION METHOD AND APPARATUS
#231Scanner system
#232Multiphoton curing to provide encapsulated optical elements
#233Image forming apparatus
#234Method of forming a conductive wiring pattern by laser irradiation and a conductive wiring pattern
#2353-d holographic recording method and 3-d holographic recording system
#2363-D holographic recording method and 3-D holographic recording system
#237Exposure device
#238Multiphoton curing to provide encapsulated optical elements
#239Process of preparing planographic printing plate
#240Materials, methods, and uses for photochemical generation of acids and/or radical species
#241Optical component formation method
#242Methods for mastering microstructures through a substrate using negative photoresist
#243Multiphoton photosensitization system
#244Methods of patterning a monolayer
#245Pattern production system, exposure system, and exposure method
#246Digital inkjet flatbed printer having separate laser processing machine