Patents-Review.com
ClassID:

177142 ⎘

G03F7/70116 - CPC Classification

Classification description:

Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor; Exposure apparatus for microlithography; Mask illumination systems; Illumination settings, i.e. intensity distribution in the pupil plane, angular distribution in the field plane; On-axis or off-axis settings, e.g. annular, dipole, quadrupole; Partial coherence control, i.e. sigma or numerical aperture [NA] Off-axis setting using a programmable means, e.g. LCD or DMD

Recent Application in this class:
#1
20260147181
2026-05-28

MEMS MIRROR ARRAY MODULE

 #2
20260133503
2026-05-14

MASKLESS EXPOSURE SYSTEM HAVING IMAGE PROCESSING FUNCTION FOR SUBSTRATE POSITIONING

 #3
20260093183
2026-04-02

SUBSTRATE PROCESSING METHOD

 #4
20260043996
2026-02-12

INDIVIDUAL MIRROR FOR A FACETED MIRROR OF AN ILLUMINATION OPTICAL UNIT OF A PROJECTION EXPOSURE SYSTEM

 #5
20260036913
2026-02-05

EXTREME ULTRAVIOLET LITHOGRAPHY DEVICE AND OPERATING METHOD THEREOF

 #6
20260029724
2026-01-29

DATA TRANSFER DEVICE, EXPOSURE DEVICE, DEVICE, AND DEVICE MANUFACTURING METHOD

 #7
20260023329
2026-01-22

METHOD OF DETERMINATION OF OPTICAL PROPERTIES OF AN OPTICAL SYSTEM

 #8
20260023328
2026-01-22

LITHOGRAPHY APPARATUS AND METHOD FOR OPERATING A LITHOGRAPHY APPARATUS

 #9
20260023327
2026-01-22

SQUARE PIXEL PATTERNS FOR HIGH RESOLUTION DIGITAL LITHOGRAPHY

 #10
20260023325
2026-01-22

DIGITAL LITHOGRAPHY APPARATUS WITH IMAGING DEVICE POSITIONED TO MITIGATE MOIRE EFFECT

 #11
20250321496
2025-10-16

SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION

 #12
20250258367
2025-08-14

MIRROR ASSEMBLY FOR MICROMIRROR ARRAY

 #13
20250216792
2025-07-03

METHOD FOR OPERATING A PROJECTION EXPOSURE SYSTEM

 #14
20250199422
2025-06-19

INDIVIDUAL MIRROR OF A PUPIL FACET MIRROR AND PUPIL FACET MIRROR FOR AN ILLUMINATION OPTICAL UNIT OF A PROJECTION EXPOSURE APPARATUS

 #15
20250199414
2025-06-19

MICROELECTROMECHANICAL DEVICE

 #16
20250116939
2025-04-10

METHOD FOR OPERATING A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS, MICROLITHOGRAPHIC MASK AND PROJECTION EXPOSURE APPARATUS

 #17
20250044703
2025-02-06

METHOD FOR MEASURING AN ILLUMINATION ANGLE DISTRIBUTION ON AN OBJECT FIELD AND ILLUMINATION OPTICS UNIT HAVING AN ILLUMINATION CHANNEL ALLOCATION INTENDED THEREFOR

 #18
20240411229
2024-12-12

HIGH RESOLUTION PHOTOLITHOGRAPHY

 #19
20240272058
2024-08-15

INSPECTION SYSTEM FOR RETICLE PARTICLE DETECTION USING A STRUCTURAL ILLUMINATION WITH APERTURE APODIZATION

 #20
20240255855
2024-08-01

PATTERN EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD

 #21
20240045338
2024-02-08

High-performance EUV microscope device with free-form illumination system structure having elliptical mirror

 #22
20240019785
2024-01-18

FACET SYSTEM AND LITHOGRAPHY APPARATUS

 #23
20240012332
2024-01-11

HIGH FORCE LOW VOLTAGE PIEZOELECTRIC MICROMIRROR ACTUATOR

 #24
20240004184
2024-01-04

HIGH ACCURACY TEMPERATURE-COMPENSATED PIEZORESISTIVE POSITION SENSING SYSTEM

 #25
20230393484
2023-12-07

Extreme ultraviolet lithography device and method of operating extreme ultraviolet lithography device

 #26
20230384686
2023-11-30

FIELD FACET SYSTEM AND LITHOGRAPHY APPARATUS

 #27
20230384685
2023-11-30

FIELD FACET SYSTEM AND LITHOGRAPHY APPARATUS

 #28
20230367230
2023-11-16

EXPOSURE APPARATUS

 #29
20230221649
2023-07-13

DIGITAL MICROMIRROR DEVICE FOR AN ILLUMINATION OPTICAL COMPONENT OF A PROJECTION EXPOSURE SYSTEM

 #30
20230161266
2023-05-25

Method of assembling a facet mirror of an optical system

 #31
20230152709
2023-05-18

SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION

 #32
20230053682
2023-02-23

Method and apparatus to register template with spatial light modulator

 #33
20220404718
2022-12-22

MATCHING PUPIL DETERMINATION

 #34
20220342199
2022-10-27

Micromirror arrays

 #35
20220283428
2022-09-08

Micromirror arrays

 #36
20220260927
2022-08-18

Method for controlling extreme ultraviolet light

 #37
20220236645
2022-07-28

Method and apparatus for photolithographic imaging

 #38
20220004107
2022-01-06

Optical arrangement and lithography apparatus

 #39
20210364931
2021-11-25

Method and apparatus for controlling extreme ultraviolet light

 #40
20210302844
2021-09-30

Matching pupil determination

 #41
20210132504
2021-05-06

Tunable illuminator for lithography systems

 #42
20210124272
2021-04-29

Apparatus and related method to control radiation transmission through mask pattern

 #43
20210033982
2021-02-04

Photolithography device having illuminator and method for adjusting intensity uniformity

 #44
20200249582
2020-08-06

Exposure apparatus and article manufacturing method

 #45
20200096326
2020-03-26

Test of operational status of a digital scanner during lithographic exposure process

 #46
20200041911
2020-02-06

Illumination optical unit and optical system for EUV projection lithography

 #47
20200033734
2020-01-30

Mirror array

 #48
20190339479
2019-11-07

MIRROR ASSEMBLY WITH HEAT TRANSFER MECHANISM

 #49
20190271917
2019-09-05

Spatial light modulator, method of driving same, and exposure method and apparatus

 #50
20190243089
2019-08-08

Tilting an optical element

 #51
20190212654
2019-07-11

Component for a mirror array for EUV lithography

 #52
20190204074
2019-07-04

Determination of operability of a digital scanner with shearing interferometry

 #53
20190195659
2019-06-27

Sensor device

 #54
20190179228
2019-06-13

Imprint system and imprinting process with spatially non-uniform illumination

 #55
20190163068
2019-05-30

Illumination optical assembly, exposure device, and device manufacturing method

 #56
20190155165
2019-05-23

Discrete source mask optimization

 #57
20190155017
2019-05-23

Spatial light modulator unit, illumination optical system, exposure device, and device manufacturing method

 #58
20190146353
2019-05-16

Method for adjusting a lighting setting

 #59
20190137887
2019-05-09

Illumination optical system, exposure apparatus, device production method, and light polarization unit

 #60
20190004432
2019-01-03

Method for predicting at least one illumination parameter for evaluating an illumination setting

 #61
20180341179
2018-11-29

Method for producing a reflective optical element and reflective optical element

 #62
20180335702
2018-11-22

Illumination system for illuminating a mask in a microlithographic exposure apparatus

 #63
20180314165
2018-11-01

ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS

 #64
20180314162
2018-11-01

ILLUMINATION OPTICAL APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

 #65
20180314156
2018-11-01

Beam transmission system, exposure device, and illumination optical system of the exposure device

 #66
20180284622
2018-10-04

Illumination system of a microlithographic projection device and method for operating such a system

 #67
20180246415
2018-08-30

METHOD AND DEVICE FOR MONITORING MULTIPLE MIRROR ARRAYS IN AN ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS

 #68
20180246413
2018-08-30

Optical assembly with a protective element and optical arrangement therewith

 #69
20180224751
2018-08-09

Lithographic method and apparatus

 #70
20180224750
2018-08-09

Illumination system for EUV projection lithography

 #71
20180217506
2018-08-02

Method of operating a microlithographic projection apparatus and illumination system of such an apparatus

 #72
20180203363
2018-07-19

Controller for optical device, exposure method and apparatus, and method for manufacturing device

 #73
20180188656
2018-07-05

Sensor arrangement for a lithography system, lithography system, and method for operating a lithography system

 #74
20180172437
2018-06-21

Determination of operability of a digital scanner with shearing interferometry

 #75
20180164691
2018-06-14

PROJECTION EXPOSURE METHODS AND SYSTEMS

 #76
20180143444
2018-05-24

OPTICAL UNIT, ILLUMINATION OPTICAL APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

 #77
20180129137
2018-05-10

Lighting system of a microlithographic projection exposure system and method for operating such a lighting system

 #78
20180107122
2018-04-19

Lithography apparatus and method for operating a lithography apparatus

 #79
20180107121
2018-04-19

Microelectromechanical mirror assembly

 #80
20180101002
2018-04-12

Mirror element, in particular for a microlithographic projection exposure apparatus

 #81
20180074410
2018-03-15

Illumination optic for EUV projection lithography

 #82
20180074236
2018-03-15

Faceted mirror for EUV projection lithography and illumination optical unit with same

 #83
20180067302
2018-03-08

Spatial light modulator unit, illumination optical system, exposure device, and device manufacturing method

 #84
20180059551
2018-03-01

Illumination system of a microlithographic projection exposure apparatus

 #85
20170351183
2017-12-07

Illumination system for illuminating a mask in a microlithographic exposure apparatus

 #86
20170336716
2017-11-23

EUV lithography system for dense line patterning

 #87
20170336715
2017-11-23

Euv lithography system for dense line patterning

 #88
20170328538
2017-11-16

Illumination device for optimizing polarization in an illumination pupil

 #89
20170315450
2017-11-02

Lithographic apparatus and method

 #90
20170293229
2017-10-12

Illumination system

 #91
20170276842
2017-09-28

Mirror device

 #92
20170261861
2017-09-14

Illumination system of a microlithographic projection exposure apparatus

 #93
20170261859
2017-09-14

Arrangement for actuating at least one optical element in an optical system

 #94
20170255005
2017-09-07

ILLUMINATION APPARATUS, ILLUMINATION METHOD, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

 #95
20170184978
2017-06-29

Illumination optical system, exposure apparatus, device production method, and light polarization unit

 #96
20170176865
2017-06-22

Facet mirror for an illumination optical unit for projection lithography

 #97
20170168312
2017-06-15

Flexible illuminator

 #98
20170160644
2017-06-08

Illumination optical assembly for projection lithography

 #99
20170160643
2017-06-08

Illumination optical assembly for a projection exposure apparatus

 #100
20170160641
2017-06-08

Illumination optical unit for projection lithography

 #101
20170131518
2017-05-11

Tilting an optical element

 #102
20170108788
2017-04-20

Mirror arrangement for microlithographic projection exposure apparatus and related method

 #103
20170090300
2017-03-30

Controller for optical device, exposure method and apparatus, and method for manufacturing device

 #104
20170090297
2017-03-30

Illumination optical assembly, exposure device, and device manufacturing method

 #105
20170082928
2017-03-23

Optical system of a microlithographic projection exposure apparatus

 #106
20170038555
2017-02-09

Device and method for controlling positioning of multiple adjustable mirror elements in a multi-mirror arrangement

 #107
20160370707
2016-12-22

Optical component

 #108
20160357113
2016-12-08

Lighting system of a microlithographic projection exposure system and method for operating such a lighting system

 #109
20160349624
2016-12-01

Lighting system of a microlithographic projection exposure system and method for operating such a lighting system

 #110
20160342095
2016-11-24

Mirror array

 #111
20160342094
2016-11-24

Method for illuminating an object field of a projection exposure system

 #112
20160327868
2016-11-10

Illumination optical unit for projection lithography

 #113
20160320608
2016-11-03

Method for displacing at least one optical component

 #114
20160313646
2016-10-27

Facet mirror for use in a projection exposure apparatus for microlithography

 #115
20160266502
2016-09-15

Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus

 #116
20160259249
2016-09-08

Support apparatus for an optical device, optical device and lithography system

 #117
20160252823
2016-09-01

Illumination system for EUV projection lithography

 #118
20160246186
2016-08-25

Device for determining a tilt angle of at least one mirror of a lithography system, and method

 #119
20160231558
2016-08-11

Spatial light modulator unit, illumination optical system, exposure device, and device manufacturing method

 #120
20160209759
2016-07-21

Illumination system of a microlithographic projection exposure apparatus

 #121
20160209758
2016-07-21

Illumination optical device, illumination method, and exposure method and device

 #122
20160209664
2016-07-21

Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method

 #123
20160195820
2016-07-07

Microlithography illumination system and microlithography illumination optical unit

 #124
20160195816
2016-07-07

Illumination system and illumination optical unit for EUV projection lithography

 #125
20160195815
2016-07-07

Illumination system of a microlithographic projection exposure apparatus with a birefringent element

 #126
20160187789
2016-06-30

Illumination system for illuminating a mask in a microlithographic exposure apparatus

 #127
20160187786
2016-06-30

Illumination optical unit for EUV projection lithography

 #128
20160187784
2016-06-30

Illumination optical unit and illumination system for EUV projection lithography

 #129
20160170308
2016-06-16

Facet mirror for a projection exposure apparatus

 #130
20160124314
2016-05-05

Controller for optical device, exposure method and apparatus, and method for manufacturing device

 #131
20160116848
2016-04-28

Lithographic apparatus and method

 #132
20160109807
2016-04-21

Optical component

 #133
20160109806
2016-04-21

Illumination device and method for using the same in the projection lithography machine

 #134
20160070176
2016-03-10

Illumination system of a microlithographic projection exposure apparatus

 #135
20160062245
2016-03-03

Method for stress-adjusted operation of a projection exposure system and corresponding projection exposure system

 #136
20160048083
2016-02-18

Reflecting coating with optimized thickness

 #137
20160025952
2016-01-28

Optical module

 #138
20160004164
2016-01-07

Illumination system for an EUV lithography device and facet mirror therefor

 #139
20150378262
2015-12-31

Discrete source mask optimization

 #140
20150355555
2015-12-10

Illumination optical unit for projection lithography

 #141
20150355552
2015-12-10

Optical assembly for increasing the etendue

 #142
20150346604
2015-12-03

Illumination optical unit for projection lithography

 #143
20150323786
2015-11-12

Method for evaluating and improving pupil luminance distribution, illumination optical system and adjustment method thereof, exposure apparatus, exposure method, and device manufacturing method

 #144
20150309305
2015-10-29

Arrangement for the actuation of at least one element in an optical system

 #145
20150300807
2015-10-22

Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus

 #146
20150286150
2015-10-08

Illumination system of a microlithographic projection exposure apparatus

 #147
20150277235
2015-10-01

Optical system of a microlithographic projection exposure apparatus

 #148
20150277233
2015-10-01

Actuation mechanism, optical apparatus, lithography apparatus and method of manufacturing devices

 #149
20150261096
2015-09-17

Illumination optical apparatus, exposure apparatus, and device manufacturing method

 #150
20150261093
2015-09-17

Actuation mechanism, optical apparatus, lithography apparatus and method of manufacturing devices

 #151
20150253677
2015-09-10

Optical system of a microlithographic projection exposure apparatus

 #152
20150241792
2015-08-27

Illumination system and lithographic apparatus

 #153
20150212424
2015-07-30

Illumination apparatus, illumination method, exposure apparatus, and device manufacturing method

 #154
20150198894
2015-07-16

Monitor system for determining orientations of mirror elements and EUV lithography system

 #155
20150198892
2015-07-16

Arrangement for actuating at least one optical element in an optical system

 #156
20150198891
2015-07-16

Method for assigning a pupil facet of a pupil facet mirror of an illumination optical unit of a projection exposure apparatus to a field facet of a field facet mirror of the illumination optical unit

 #157
20150192860
2015-07-09

Illumination optical unit for EUV projection lithography

 #158
20150192859
2015-07-09

Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method

 #159
20150185621
2015-07-02

Illumination system having a beam deflection array for illuminating a mask in a microlithographic projection exposure apparatus

 #160
20150177623
2015-06-25

Microlithographic projection exposure apparatus having a multi-mirror array with temporal stabilisation

 #161
20150173163
2015-06-18

EUV light source for generating a usable output beam for a projection exposure apparatus

 #162
20150168849
2015-06-18

Method of operating a microlithographic apparatus

 #163
20150160566
2015-06-11

Optical system for a microlithographic projection exposure apparatus and microlithographic exposure method

 #164
20150160565
2015-06-11

Projection exposure methods and systems

 #165
20150153652
2015-06-04

Method for adjusting an illumination setting

 #166
20150153650
2015-06-04

Method for operating a microlithographic projection exposure apparatus

 #167
20150146184
2015-05-28

Illumination system of a microlithographic projection exposure apparatus

 #168
20150146183
2015-05-28

Illumination system of a microlithographic projection exposure apparatus

 #169
20150124233
2015-05-07

Illumination system for an EUV projection lithographic projection exposure apparatus

 #170
20150116685
2015-04-30

Extreme ultraviolet lithography process to print low pattern density features

 #171
20150116684
2015-04-30

Spatial light modulator and exposure apparatus

 #172
20150092174
2015-04-02

Illumination optical unit

 #173
20150085272
2015-03-26

Optical system of a microlithographic projection exposure apparatus

 #174
20150070671
2015-03-12

Illumination system of a microlithographic projection exposure apparatus

 #175
20150062549
2015-03-05

Assembly for a projection exposure apparatus for EUV projection lithography

 #176
20150055110
2015-02-26

Illumination optical unit for projection lithography

 #177
20150055107
2015-02-26

Microelectromechanical mirror assembly

 #178
20150042970
2015-02-12

Mirror assembly with heat transfer mechanism

 #179
20150036115
2015-02-05

Illumination optical unit for EUV projection lithography

 #180
20150029480
2015-01-29

Optical system of a microlithographic projection exposure apparatus

 #181
20150029477
2015-01-29

Optical system for a microlithographic projection exposure apparatus

 #182
20150017589
2015-01-15

Apparatus and method for compensating a defect of a channel of a microlithographic projection exposure system

 #183
20150002925
2015-01-01

Illumination system for EUV lithography

 #184
20140362362
2014-12-11

Method for adjusting an optical system of a microlithographic projection exposure apparatus

 #185
20140362360
2014-12-11

Illumination optical unit for a projection exposure apparatus

 #186
20140347645
2014-11-27

Illumination optical system, exposure apparatus, optical element and manufacturing method thereof, and device manufacturing method

 #187
20140333912
2014-11-13

Microlithographic projection exposure apparatus

 #188
20140327896
2014-11-06

Optical component

 #189
20140327895
2014-11-06

Optical component

 #190
20140313501
2014-10-23

Controller for optical device, exposure method and apparatus, and method for manufacturing device

 #191
20140307239
2014-10-16

Illumination system of a microlithographic projection exposure apparatus having a temperature control device

 #192
20140292812
2014-10-02

Visual training devices, systems, and methods

 #193
20140247437
2014-09-04

Illumination system of a microlithographic projection exposure apparatus

 #194
20140233008
2014-08-21

Illumination optical system, exposure apparatus, device production method, and light polarization unit

 #195
20140233006
2014-08-21

Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus

 #196
20140226141
2014-08-14

Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus

 #197
20140218708
2014-08-07

Light modulator and illumination system of a microlithographic projection exposure apparatus

 #198
20140218703
2014-08-07

Illumination method, illumination optical device, and exposure device

 #199
20140211187
2014-07-31

Optical module for guiding a radiation beam

 #200
20140211174
2014-07-31

Illumination optical assembly, exposure device, and device manufacturing method

 #201
20140168743
2014-06-19

Spatial light modulation element and exposure apparatus

 #202
20140132942
2014-05-15

Optical system of a microlithographic projection exposure apparatus, and microlithographic exposure

 #203
20140111785
2014-04-24

Illumination optical unit for projection lithography

 #204
20140104589
2014-04-17

Facet mirror device

 #205
20140055767
2014-02-27

Mirror array

 #206
20140007025
2014-01-02

Method and system for creation of binary spatial filters

 #207
20130293861
2013-11-07

Illumination system of a microlithographic projection exposure apparatus

 #208
20130265560
2013-10-10

EUV lithography system

 #209
20130250264
2013-09-26

Illumination system for illuminating a mask in a microlithographic exposure apparatus

 #210
20130229639
2013-09-05

Illumination optical system, exposure apparatus, optical element and manufacturing method thereof, and device manufacturing method

 #211
20130188160
2013-07-25

Optical system of a microlithographic projection exposure apparatus and method of reducing image placement errors

 #212
20130148359
2013-06-13

Illumination device for optimizing polarization in an illumination pupil

 #213
20130132037
2013-05-23

Microlithographic projection exposure apparatus

 #214
20130114060
2013-05-09

Illumination system of a microlithographic projection exposure apparatus

 #215
20130088698
2013-04-11

Methods and devices for driving micromirrors

 #216
20130077077
2013-03-28

Optical system for a microlithographic projection exposure apparatus and microlithographic exposure method

 #217
20130077076
2013-03-28

Microlithography illumination optical system and microlithography projection exposure apparatus including same

 #218
20130077074
2013-03-28

Microlithographic projection exposure apparatus

 #219
20130050673
2013-02-28

Optical system of a microlithographic projection exposure apparatus

 #220
20130044303
2013-02-21

Method for stress-adjusted operation of a projection exposure system and corresponding projection exposure system

 #221
20130021591
2013-01-24

Illumination system of a microlithographic projection exposure apparatus

 #222
20120327385
2012-12-27

Optical system for semiconductor lithography

 #223
20120293785
2012-11-22

Optical element having a plurality of reflective facet elements

 #224
20120293784
2012-11-22

Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus

 #225
20120287414
2012-11-15

FACET MIRROR FOR USE IN MICROLITHOGRAPHY

 #226
20120262690
2012-10-18

ILLUMINATION SYSTEM, LITHOGRAPHIC APPARATUS AND ILLUMINATION METHOD

 #227
20120262689
2012-10-18

Illumination system for lithographic apparatus with control system to effect an adjustment of an imaging parameter

 #228
20120262688
2012-10-18

Optical apparatus for conditioning a radiation beam for use by an object, lithography apparatus and method of manufacturing devices

 #229
20120249989
2012-10-04

Illumination optical device, illumination method, and exposure method and device

 #230
20120236284
2012-09-20

Illumination optical system, exposure apparatus, and device manufacturing method

 #231
20120229787
2012-09-13

Lithographic apparatus and device manufacturing method with corrective positioning of reflective element

 #232
20120212799
2012-08-23

Spatial light modulation unit, illumination optical apparatus, exposure apparatus, and device manufacturing method

 #233
20120202157
2012-08-09

Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method

 #234
20120194794
2012-08-02

Illumination system, lithographic apparatus and method

 #235
20120188526
2012-07-26

ILLUMINATION OPTICAL APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

 #236
20120178028
2012-07-12

Spatial light modulator unit, illumination optical system, exposure device, and device manufacturing method

 #237
20120171627
2012-07-05

Inspection device and inspecting method for spatial light modulator, illumination optical system, method for adjusting the illumination optical system, exposure apparatus, and device manufacturing method

 #238
20120162627
2012-06-28

Illumination optical unit for microlithography

 #239
20120154777
2012-06-21

Illumination system, lithographic apparatus and method of adjusting an illumination mode

 #240
20120147345
2012-06-14

Optical apparatus, and method of orienting a reflective element

 #241
20120133915
2012-05-31

Light source optimizing method, exposure method, device manufacturing method, program, exposure apparatus, lithography system, light source evaluation method, and light source modulation method

 #242
20120105865
2012-05-03

Microlithographic projection exposure apparatus and related method

 #243
20120105818
2012-05-03

LITHOGRAPHIC APPARATUS AND METHOD

 #244
20120044474
2012-02-23

OPTICAL MODULE FOR GUIDING A RADIATION BEAM

 #245
20120038895
2012-02-16

Lens heating compensation in photolithography

 #246
20120013882
2012-01-19

Illumination system, lithographic apparatus and method of forming an illumination mode

 #247
20120008134
2012-01-12

Method to match exposure tools using a programmable illuminator

 #248
20120002185
2012-01-05

Microlithographic projection exposure apparatus

 #249
20120002184
2012-01-05

Illumination system of a microlithographic projection exposure apparatus

 #250
20110310372
2011-12-22

Illumination system and lithographic apparatus

 #251
20110270522
2011-11-03

Visual training devices, systems, and methods

 #252
20110261342
2011-10-27

OPTICAL UNIT, ILLUMINATION OPTICAL APPARATUS, EXPOSURE APPARTUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD

 #253
20110228247
2011-09-22

Illumination system and lithographic apparatus

 #254
20110223543
2011-09-15

Radiation system, radiation collector, radiation beam conditioning system, spectral purity filter for radiation system and method for forming a spectral purity filter

 #255
20110216390
2011-09-08

Speckle reduction

 #256
20110216302
2011-09-08

ILLUMINATION METHODS AND DEVICES FOR PARTIALLY COHERENT ILLUMINATION

 #257
20110211183
2011-09-01

Illumination optical system, aligner, and process for fabricating device

 #258
20110188017
2011-08-04

Methods and devices for driving micromirrors

 #259
20110181852
2011-07-28

Microlithographic projection exposure apparatus

 #260
20110181850
2011-07-28

Illumination system of a microlithographic projection exposure apparatus having a temperature control device

 #261
20110141445
2011-06-16

Illumination optical unit for EUV microlithography

 #262
20110122392
2011-05-26

Microlithography illumination system and microlithography illumination optical unit

 #263
20110122388
2011-05-26

Illumination system of a microlithographic projection exposure apparatus

 #264
20110117503
2011-05-19

EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD

 #265
20110102758
2011-05-05

Illumination system for a microlithography projection exposure apparatus, microlithography projection exposure apparatus comprising such an illumination system, and fourier optical system

 #266
20110096316
2011-04-28

Illumination system for microlithography

 #267
20110085151
2011-04-14

Illumination optical system for microlithography and illumination system and projection exposure system with an illumination optical system of this type

 #268
20110069305
2011-03-24

Inspection device and inspecting method for spatial light modulator, illumination optical system, method for adjusting the illumination optical system, exposure apparatus, and device manufacturing method

 #269
20110063597
2011-03-17

OPTICAL SYSTEM FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS AND MICROLITHOGRAPHIC EXPOSURE METHOD

 #270
20110027724
2011-02-03

SPATIAL LIGHT MODULATING UNIT, ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

 #271
20110012010
2011-01-20

Illumination system for illuminating a mask in a microlithographic projection exposure apparatus

 #272
20110001947
2011-01-06

Facet mirror for use in a projection exposure apparatus for microlithography

 #273
20100316943
2010-12-16

ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

 #274
20100315616
2010-12-16

Illumination device of a microlithographic projection exposure apparatus, and microlithographic projection exposure method

 #275
20100315615
2010-12-16

Measurement apparatus and method

 #276
20100309449
2010-12-09

Illumination system for a microlithographic projection exposure apparatus

 #277
20100283985
2010-11-11

Microlithographic projection exposure apparatus having a multi-mirror array with temporal stabilisation

 #278
20100283984
2010-11-11

Microlithographic projection exposure apparatus

 #279
20100277708
2010-11-04

Illumination system of a microlithographic projection exposure apparatus

 #280
20100265482
2010-10-21

Illumination system for illuminating a mask in a microlithographic exposure apparatus

 #281
20100259742
2010-10-14

OBLIQUE MIRROR-TYPE NORMAL-INCIDENCE COLLECTOR SYSTEM FOR LIGHT SOURCES, PARTICULARLY EUV PLASMA DISCHARGE SOURCES

 #282
20100253927
2010-10-07

SPATIAL LIGHT MODULATING UNIT, ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

 #283
20100231882
2010-09-16

Bundle-guiding optical collector for collecting the emission of a radiation source

 #284
20100195077
2010-08-05

ILLUMINATION SYSTEM FOR A MICROLITHOGRAPHY PROJECTION EXPOSURE INSTALLATION

 #285
20100165318
2010-07-01

Illumination system of a microlithographic projection exposure apparatus with a birefringent element

 #286
20100157269
2010-06-24

Illumination system having a beam deflection array for illuminating a mask in a microlithographic projection exposure apparatus

 #287
20100157268
2010-06-24

Illumination system of a microlithographic projection exposure apparatus

 #288
20100149504
2010-06-17

ILLUMINATION DEVICE OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS, AND MICROLITHOGRAPHIC PROJECTION EXPOSURE METHOD

 #289
20100103400
2010-04-29

Illumination system of a microlithographic projection exposure apparatus

 #290
20100060873
2010-03-11

Illumination system for illuminating a mask in a microlithographic exposure apparatus

 #291
20100045954
2010-02-25

Controllable radiation lithographic apparatus and method

 #292
20100039629
2010-02-18

Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus

 #293
20090280437
2009-11-12

Projection exposure methods and systems

 #294
20090279066
2009-11-12

Lithographic apparatus and method involving a pockels cell

 #295
20090262324
2009-10-22

ILLUMINATION OPTICS FOR PROJECTION MICROLITHOGRAPHY AND RELATED METHODS

 #296
20090257038
2009-10-15

Exposure apparatus and a method of manufacturing a device that conduct exposure using a set light source shape

 #297
20090213345
2009-08-27

Microlithography exposure apparatus using polarized light and microlithography projection system having concave primary and secondary mirrors

 #298
20090207396
2009-08-20

Optical system for semiconductor lithography

 #299
20090185154
2009-07-23

OPTICAL UNIT, ILLUMINATION OPTICAL APPARATUS, EXPOSURE APPARTUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD

 #300
20090174877
2009-07-09

Lithographic apparatus and device manufacturing method