Patents-Review.com
ClassID:

177221 ⎘

G03F7/70775 - page 2 - CPC Classification

Classification description:

Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor; Exposure apparatus for microlithography; Handling of masks or wafers Position control

Recent Application in this class:
#301
20190056675
2019-02-21

Apparatus and method for using scanning light beam for film or surface modification

 #302
20190056674
2019-02-21

Method for detecting the position of a mask holder on a measuring table

 #303
20190049864
2019-02-14

Wavelength combining of multiple source

 #304
20190049863
2019-02-14

MOVABLE BODY DRIVE METHOD AND SYSTEM, PATTERN FORMATION METHOD AND APPARATUS, EXPOSURE METHOD AND APPARATUS FOR DRIVING MOVABLE BODY BASED ON MEASUREMENT VALUE OF ENCODER AND INFORMATION ON FLATNESS OF SCALE, AND DEVICE MANUFACTURING METHOD

 #305
20190049862
2019-02-14

MOVABLE BODY DRIVE METHOD AND SYSTEM, PATTERN FORMATION METHOD AND APPARATUS, EXPOSURE METHOD AND APPARATUS FOR DRIVING MOVABLE BODY BASED ON MEASUREMENT VALUE OF ENCODER AND INFORMATION ON FLATNESS OF SCALE, AND DEVICE MANUFACTURING METHOD

 #306
20190049850
2019-02-14

Particle irradiation apparatus, beam modifier device, and semiconductor device including a junction termination extension zone

 #307
20190041244
2019-02-07

Measuring apparatus and method, processing apparatus and method, pattern forming apparatus and method, exposure apparatus and method, and device manufacturing method

 #308
20190025715
2019-01-24

Method and apparatus for adjusting exposure gap

 #309
20190025713
2019-01-24

Substrate processing apparatus, processing apparatus, and method for manufacturing device

 #310
20190011843
2019-01-10

Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method

 #311
20190004440
2019-01-03

Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method

 #312
20180373169
2018-12-27

MOVABLE BODY DRIVE SYSTEM AND MOVABLE BODY DRIVE METHOD, PATTERN FORMATION APPARATUS AND METHOD, EXPOSURE APPARATUS AND METHOD, DEVICE MANUFACTURING METHOD, AND DECISION-MAKING METHOD

 #313
20180373156
2018-12-27

Lithographic apparatus having an active base frame support

 #314
20180373152
2018-12-27

Exposure method, exposure apparatus, and device manufacturing method

 #315
20180373141
2018-12-27

Membrane assembly

 #316
20180364595
2018-12-20

EXPOSURE APPARATUS, FLAT PANEL DISPLAY MANUFACTURING METHOD, AND DEVICE MANUFACTURING METHOD

 #317
20180364594
2018-12-20

Position measurement system and lithographic apparatus

 #318
20180364592
2018-12-20

PATTERN FORMING APPARATUS AND PATTERN FORMING METHOD, MOVABLE BODY DRIVE SYSTEM AND MOVABLE BODY DRIVE METHOD, EXPOSURE APPARATUS AND EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD

 #319
20180364023
2018-12-20

Height measurement using optical interference

 #320
20180364022
2018-12-20

Height measurement using optical interference

 #321
20180356739
2018-12-13

EXPOSURE APPARATUS, MANUFACTURING METHOD OF FLAT-PANEL DISPLAY, DEVICE MANUFACTURING METHOD, AND EXPOSURE METHOD

 #322
20180356738
2018-12-13

Movable support and lithographic apparatus

 #323
20180348652
2018-12-06

Exposure apparatus, manufacturing method of flat-panel display, device manufacturing method, and exposure method

 #324
20180348647
2018-12-06

Lithographic method and apparatus

 #325
20180348638
2018-12-06

Exposure method, exposure apparatus, and device manufacturing method

 #326
20180341187
2018-11-29

MOVABLE BODY DRIVE SYSTEM AND MOVABLE BODY DRIVE METHOD, PATTERN FORMATION APPARATUS AND METHOD, EXPOSURE APPARATUS AND METHOD, DEVICE MANUFACTURING METHOD, AND DECISION-MAKING METHOD

 #327
20180335705
2018-11-22

Positioning device, lithographic apparatus and device manufacturing method

 #328
20180330976
2018-11-15

Systems and methods for wafer alignment

 #329
20180329294
2018-11-15

LITHOGRAPHY APPARATUS AND METHOD OF MANUFACTURING ARTICLE

 #330
20180321605
2018-11-08

Control method of movable body, exposure method, device manufacturing method, movable body apparatus, and exposure apparatus

 #331
20180321601
2018-11-08

Movable body apparatus, exposure apparatus, manufacturing method of flat panel display, device manufacturing method, and movable body drive method

 #332
20180314169
2018-11-01

Lithographic apparatus and device manufacturing method

 #333
20180299793
2018-10-18

Apparatus with a sensor and a method of performing target measurement

 #334
20180299786
2018-10-18

Condensing point position detecting method

 #335
20180299783
2018-10-18

Vibration isolation system and lithographic apparatus

 #336
20180299769
2018-10-18

Carrying platform for carrying mask plate, mask plate and mask plate securing assembly

 #337
20180286738
2018-10-04

Lithographic apparatus substrate table and method of loading a substrate

 #338
20180284619
2018-10-04

Exposure apparatus and exposure method, and flat panel display manufacturing method

 #339
20180275533
2018-09-27

Exposure apparatus and exposure method, and flat panel display manufacturing method

 #340
20180275532
2018-09-27

Movable body apparatus, exposure apparatus, manufacturing method of flat-panel display and device manufacturing method, and movement method of object

 #341
20180275531
2018-09-27

Carrying platform and exposure method

 #342
20180275525
2018-09-27

Lithographic thermal distortion compensation with the use of machine learning

 #343
20180267413
2018-09-20

Substrate processing apparatus, processing apparatus, and method for manufacturing device

 #344
20180259860
2018-09-13

ENVIRONMENTAL SYSTEM INCLUDING VACUUM SCAVENGE FOR AN IMMERSION LITHOGRAPHY APPARATUS

 #345
20180253011
2018-09-06

Exposure device substrate processing apparatus, exposure method of substrate and substrate processing method

 #346
20180246421
2018-08-30

Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method

 #347
20180239258
2018-08-23

Lithographic apparatus and method

 #348
20180224758
2018-08-09

Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration method

 #349
20180224757
2018-08-09

Position measurement system, interferometer and lithographic apparatus

 #350
20180224756
2018-08-09

Lorentz actuator, object positioning system, lithographic apparatus and Lorentz actuator operating method

 #351
20180224755
2018-08-09

Lithographic apparatus

 #352
20180217510
2018-08-02

High-resolution position encoder with image sensor and encoded target pattern

 #353
20180210353
2018-07-26

Position correction method of stage mechanism and charged particle beam lithography apparatus

 #354
20180205305
2018-07-19

Actuator assembly including magnetic sensor system for vibrationless position feedback

 #355
20180202842
2018-07-19

Encoder device, method for measuring moving amount, optical apparatus, exposure apparatus, exposure method and method for producing device

 #356
20180196352
2018-07-12

EXPOSURE APPARATUS AND METHOD FOR PRODUCING DEVICE

 #357
20180196347
2018-07-12

Laser unit management system

 #358
20180181006
2018-06-28

Encoder head with a birefringent lens element and exposure system utilizing the same

 #359
20180173984
2018-06-21

Substrate handling and identification mechanism

 #360
20180173115
2018-06-21

Measurement systems, lithographic apparatus, device manufacturing method and a method of measuring

 #361
20180173107
2018-06-21

EXPOSURE METHOD, EXPOSURE APPARATUS, AND METHOD FOR PRODUCING DEVICE

 #362
20180164705
2018-06-14

Lithographic apparatus and device manufacturing method

 #363
20180164696
2018-06-14

Optical processing apparatus and substrate processing apparatus

 #364
20180164692
2018-06-14

Exposure apparatus, exposure method, and device manufacturing method

 #365
20180157182
2018-06-07

Exposure apparatus, movable body apparatus, flat-panel display manufacturing method, and device manufacturing method

 #366
20180157181
2018-06-07

Apparatus including a gas gauge and method of operating the same

 #367
20180143542
2018-05-24

Exposure apparatus, exposure method, and method of manufacturing article

 #368
20180143540
2018-05-24

Exposure apparatus, exposure method and storage medium

 #369
20180143539
2018-05-24

EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD

 #370
20180136567
2018-05-17

Exposure apparatus, exposure apparatus adjustment method and storage medium

 #371
20180136566
2018-05-17

Exposure apparatus and exposure method, and device manufacturing method

 #372
20180129142
2018-05-10

Apparatus and methods for on-the-fly digital exposure image data modification

 #373
20180128653
2018-05-10

Transparent-block encoder head with isotropic wedged elements

 #374
20180113390
2018-04-26

Positioning substrates in imprint lithography processes

 #375
20180113388
2018-04-26

Lithographic apparatus and device manufacturing method

 #376
20180101104
2018-04-12

Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method

 #377
20180088473
2018-03-29

Exposure apparatus, exposure method, and device manufacturing method

 #378
20180088468
2018-03-29

Imprint lithography

 #379
20180081283
2018-03-22

Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method

 #380
20180074414
2018-03-15

Exposure apparatus and method of manufacturing article

 #381
20180074411
2018-03-15

Lithographic apparatus and method

 #382
20180067405
2018-03-08

Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration method

 #383
20180067401
2018-03-08

Substrate placement in immersion lithography

 #384
20180067397
2018-03-08

Exposure apparatus, manufacturing method of flat-panel display, device manufacturing method, and exposure method

 #385
20180061627
2018-03-01

Encoder head with birefringent elements for forming imperfect retroreflection and exposure system utilizing the same

 #386
20180059555
2018-03-01

Lithographic apparatus, and device manufacturing method

 #387
20180046096
2018-02-15

Measurement device, lithography system and exposure apparatus, and control method, overlay measurement method and device manufacturing method

 #388
20180046093
2018-02-15

Exposure apparatus, movable body apparatus, and device manufacturing method

 #389
20180039191
2018-02-08

Measurement device, lithography system and exposure apparatus, and device manufacturing method

 #390
20180024445
2018-01-25

Projection exposure system for microlithography with a measurement device

 #391
20180011410
2018-01-11

MEASURING METHOD, STAGE APPARATUS, AND EXPOSURE APPARATUS

 #392
20170371252
2017-12-28

Pattern forming apparatus and pattern forming method, movable body drive system and movable body drive method, exposure apparatus and exposure method, and device manufacturing method

 #393
20170371249
2017-12-28

EXPOSURE APPARATUS AND EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD

 #394
20170363971
2017-12-21

Pattern forming apparatus and pattern forming method, movable body drive system and movable body drive method, exposure apparatus and exposure method, and device manufacturing method

 #395
20170363948
2017-12-21

Fluid handling structure, a lithographic apparatus and a device manufacturing method

 #396
20170352563
2017-12-07

Systems and methods for wafer alignment

 #397
20170351188
2017-12-07

Control method of movable body, exposure method, device manufacturing method, movable body apparatus, and exposure apparatus

 #398
20170350736
2017-12-07

Measuring apparatus and method, processing apparatus and method, pattern forming apparatus and method, exposure apparatus and method, and device manufacturing method

 #399
20170343391
2017-11-30

Measuring apparatus and method, processing apparatus and method, pattern forming apparatus and method, exposure apparatus and method, and device manufacturing method

 #400
20170343390
2017-11-30

Encoder, position measurement system and lithographic apparatus involving an enclosing device

 #401
20170336723
2017-11-23

MOVABLE BODY DRIVE METHOD, MOVABLE BODY DRIVE SYSTEM, PATTERN FORMATION METHOD, PATTERN FORMING APPARATUS, EXPOSURE METHOD, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

 #402
20170329241
2017-11-16

Alignment method and alignment system thereof

 #403
20170329238
2017-11-16

Arrangement for manipulating the position of an element

 #404
20170329237
2017-11-16

Positioning apparatus, lithography apparatus, and method of manufacturing article

 #405
20170329236
2017-11-16

Positioning system using surface pattern recognition and interpolation

 #406
20170322498
2017-11-09

Movable body drive method, movable body drive system, pattern formation method, pattern forming apparatus, exposure method, exposure apparatus, and device manufacturing method

 #407
20170315457
2017-11-02

Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration method

 #408
20170299967
2017-10-19

Object table, lithographic apparatus and device manufacturing method

 #409
20170293234
2017-10-12

Driving system and driving method, and exposure apparatus and exposure method

 #410
20170285493
2017-10-05

Projection exposure method and projection exposure apparatus

 #411
20170285485
2017-10-05

Exposure apparatus, exposure method, and device manufacturing method

 #412
20170277043
2017-09-28

LITHOGRAPHY SYSTEM WITH DIFFERENTIAL INTERFEROMETER MODULE

 #413
20170277042
2017-09-28

Sensor, object positioning system, lithographic apparatus and device manufacturing method

 #414
20170261865
2017-09-14

Pattern forming apparatus and pattern forming method, movable body drive system and movable body drive method, exposure apparatus and exposure method, and device manufacturing method

 #415
20170261856
2017-09-14

Exposure method, exposure apparatus, and device manufacturing method

 #416
20170261351
2017-09-14

Position detection apparatus, machine tool apparatus, and exposure apparatus

 #417
20170255104
2017-09-07

Metrology apparatus, method of measuring a structure and lithographic apparatus

 #418
20170242349
2017-08-24

Lithographic apparatus and device manufacturing method

 #419
20170235237
2017-08-17

Environmental system including vacuum scavenge for an immersion lithography apparatus

 #420
20170227855
2017-08-10

Pattern formation method and article manufacturing method

 #421
20170219937
2017-08-03

Sensor system for lithography

 #422
20170219930
2017-08-03

Lithographic apparatus and method

 #423
20170212431
2017-07-27

Control system, positioning system, lithographic apparatus, control method, device manufacturing method and control program

 #424
20170199468
2017-07-13

Object positioning system, control system, lithographic apparatus, object positioning method and device manufacturing method

 #425
20170192363
2017-07-06

Lithography stepper alignment and control method

 #426
20170176873
2017-06-22

Method for exposure and development, system for controlling exposure and system for exposure and development

 #427
20170168403
2017-06-15

Environmental control of systems for photolithography process

 #428
20170168400
2017-06-15

Substrate processing apparatus, processing apparatus, and method for manufacturing device

 #429
20170160649
2017-06-08

Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration method

 #430
20170153556
2017-06-01

Lithographic apparatus and device manufacturing method

 #431
20170153555
2017-06-01

Apparatus and method for bearing a lithography mask

 #432
20170115580
2017-04-27

Coarse motion and fine motion integrated reticle stage driven by planar motor

 #433
20170108783
2017-04-20

Alignment modeling and a lithographic apparatus and exposure method using the same

 #434
20170108716
2017-04-20

Movable body apparatus, exposure apparatus, manufacturing method of flat panel display, device manufacturing method, and movable body drive method

 #435
20170102625
2017-04-13

Movable body drive system and movable body drive method, pattern formation apparatus and method, exposure apparatus and method, device manufacturing method, and decision-making method

 #436
20170097577
2017-04-06

Movable body drive system and movable body drive method, pattern formation apparatus and method, exposure apparatus and method, device manufacturing method, and decision-making method

 #437
20170084475
2017-03-23

Method including an adjustment of a plurality of wafer handling elements, system including a plurality of wafer handling elements and photolithography track

 #438
20170076439
2017-03-16

Three-dimensional positioning system using surface pattern recognition and interpolation

 #439
20170075229
2017-03-16

Lithography apparatus, pattern forming method, and method for manufacturing product

 #440
20170068171
2017-03-09

Estimating deformation of a patterning device and/or a change in its position

 #441
20170060004
2017-03-02

Apparatus and method for using scanning light beam for film or surface modification

 #442
20170060003
2017-03-02

Apparatus and method for detecting position, exposure apparatus, and method for the same

 #443
20170059997
2017-03-02

Particle irradiation apparatus, beam modifier device, and semiconductor device including a junction termination extension zone

 #444
20170052462
2017-02-23

Measurement apparatus, lithography apparatus, and method of manufacturing article

 #445
20170052461
2017-02-23

Magnetically suspended coarse motion and fine motion integrated reticle stage driven by planar motor

 #446
20170052459
2017-02-23

Substrate table, a lithographic apparatus and a method for manufacturing a device using a lithographic apparatus

 #447
20170045353
2017-02-16

Interferometric displacement sensor for integration into machine tools and semiconductor lithography systems

 #448
20170038693
2017-02-09

Lithographic apparatus and device manufacturing method

 #449
20170031249
2017-02-02

Lithographic apparatus, method for positioning an object in a lithographic apparatus and device manufacturing method

 #450
20170023864
2017-01-26

Method and apparatus for exposure pattern correction and exposure system

 #451
20170017169
2017-01-19

Spacer displacement device for a wafer illumination unit and wafer illumination unit

 #452
20170017168
2017-01-19

Lithography machine workpiece table and vertical position initialization method thereof

 #453
20170010545
2017-01-12

Lithographic apparatus and device manufacturing method

 #454
20170005017
2017-01-05

Detection apparatus, lithography apparatus, method of manufacturing article, and detection method

 #455
20170003604
2017-01-05

Exposure method, exposure apparatus, and device manufacturing method

 #456
20170003603
2017-01-05

Movable body drive method, movable body drive system, pattern formation method, pattern forming apparatus, exposure method, exposure apparatus, and device manufacturing method

 #457
20170003601
2017-01-05

Exposure method, exposure apparatus, and device manufacturing method

 #458
20170003600
2017-01-05

Exposure apparatus, exposure method, and device manufacturing method

 #459
20160377996
2016-12-29

System for positioning an object in lithography

 #460
20160370716
2016-12-22

Sensor system, substrate handling system and lithographic apparatus

 #461
20160363542
2016-12-15

Inspection of microelectronic devices using near-infrared light

 #462
20160357116
2016-12-08

Exposure apparatus, exposure method, and device manufacturing method

 #463
20160349629
2016-12-01

Lithographic apparatus and device manufacturing method

 #464
20160334717
2016-11-17

Method of determining a measurement subset of metrology points on a substrate, associated apparatus and computer program

 #465
20160327872
2016-11-10

Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration method

 #466
20160320714
2016-11-03

Method of adjusting speed and/or routing of a table movement plan and a lithographic apparatus

 #467
20160299442
2016-10-13

Lithographic apparatus and device manufacturing method

 #468
20160291484
2016-10-06

Exposure apparatus, exposure method, and device manufacturing method

 #469
20160282728
2016-09-29

Apparatus and methods for on-the-fly digital exposure image data modification

 #470
20160252827
2016-09-01

Object positioning in lithography

 #471
20160252753
2016-09-01

Alignment system

 #472
20160246189
2016-08-25

Method and apparatus for inspection and metrology

 #473
20160246181
2016-08-25

Exposure method, exposure apparatus, and method for producing device

 #474
20160238953
2016-08-18

Lithographic apparatus and device manufacturing method

 #475
20160238949
2016-08-18

Exposure method, exposure apparatus, and method for producing device

 #476
20160231656
2016-08-11

Scanning probe nanolithography system and method

 #477
20160223917
2016-08-04

Stage apparatus, lithographic apparatus and method of positioning an object table

 #478
20160216617
2016-07-28

Display manufacturing method and photo alignment process

 #479
20160216612
2016-07-28

Exposure apparatus and method for producing device

 #480
20160202620
2016-07-14

Measurement apparatus, lithography apparatus, and method of manufacturing article

 #481
20160202618
2016-07-14

Lithographic apparatus and method

 #482
20160202616
2016-07-14

Measuring apparatus and method, processing apparatus and method, pattern forming apparatus and method, exposure apparatus and method, and device manufacturing method

 #483
20160195823
2016-07-07

Imprint lithography apparatus and method

 #484
20160161866
2016-06-09

Exposure apparatus, exposure method, and device manufacturing method

 #485
20160161865
2016-06-09

Electrostatic chuck system and method of manufacturing organic light-emitting display apparatus by using the same

 #486
20160161861
2016-06-09

Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method

 #487
20160154322
2016-06-02

Lithographic apparatus and device manufacturing method

 #488
20160154320
2016-06-02

Apparatus and method of controlling chuck, and exposure apparatus and control method thereof

 #489
20160139515
2016-05-19

Lithography apparatus, lithography method, and article manufacturing method

 #490
20160109815
2016-04-21

Exposure apparatus, movable body apparatus, flat-panel display manufacturing method, and device manufacturing method

 #491
20160109814
2016-04-21

Lithographic apparatus, positioning system for use in a lithographic apparatus and method

 #492
20160109812
2016-04-21

Lithographic apparatus

 #493
20160097980
2016-04-07

Exposure apparatus, exposure method, and device manufacturing method

 #494
20160085159
2016-03-24

Environmental system including vacuum scavenge for an immersion lithography apparatus

 #495
20160077450
2016-03-17

Positioning system, a lithographic apparatus and a method for positional control

 #496
20160064266
2016-03-03

Processing apparatus, processing method, and device manufacturing method

 #497
20160054665
2016-02-25

Substrate placement in immersion lithography

 #498
20160048087
2016-02-18

SCANNER AND METHOD FOR PERFORMING EXPOSURE PROCESS ON WAFER

 #499
20160033883
2016-02-04

Exposure apparatus, movable body apparatus, and device manufacturing method

 #500
20160033882
2016-02-04

METHODS AND APPARATUS FOR SUBSTRATE SUPPORT ALIGNMENT

 #501
20160026097
2016-01-28

VIBRATION CONTROL DEVICE, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD

 #502
20160018745
2016-01-21

Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method

 #503
20160004169
2016-01-07

Movable body apparatus, exposure apparatus, exposure method, and device manufacturing method

 #504
20150378265
2015-12-31

Measurement apparatus, lithography apparatus, and method of manufacturing article

 #505
20150362846
2015-12-17

Stage apparatus, lithography apparatus, method of manufacturing an article, and determination method

 #506
20150346611
2015-12-03

Measurement apparatus, lithography apparatus, and article manufacturing method

 #507
20150338751
2015-11-26

Lithography apparatus, determination method, and method of manufacturing article

 #508
20150316856
2015-11-05

Position measurement system, grating for a position measurement system and method

 #509
20150309423
2015-10-29

Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration method

 #510
20150301459
2015-10-22

Positioning system using surface pattern recognition and interpolation

 #511
20150293464
2015-10-15

Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration method

 #512
20150293463
2015-10-15

Driving system and driving method, and exposure apparatus and exposure method

 #513
20150292913
2015-10-15

Double pass interferometric encoder system

 #514
20150286153
2015-10-08

Sensor system for lithography

 #515
20150286147
2015-10-08

Exposure apparatus and exposure method, and device manufacturing method

 #516
20150277242
2015-10-01

Substrate positioning system, lithographic apparatus and device manufacturing method

 #517
20150277241
2015-10-01

Patterning device manipulating system and lithographic apparatuses

 #518
20150277229
2015-10-01

Lithography apparatus, stage apparatus, and method of manufacturing articles

 #519
20150276385
2015-10-01

Minimization of Abbe error caused by tip or tilt between an encoder head and a wafer stage for arbitrary location of a center of rotation

 #520
20150268032
2015-09-24

Interferometer module

 #521
20150241795
2015-08-27

Method for calibration of an encoder scale and a lithographic apparatus

 #522
20150241791
2015-08-27

Lithographic apparatus and device manufacturing method

 #523
20150241200
2015-08-27

Multi-axis differential interferometer

 #524
20150227060
2015-08-13

Stage system and lithographic apparatus comprising such stage system

 #525
20150219438
2015-08-06

Position measuring apparatus, position measuring method, lithographic apparatus and device manufacturing method

 #526
20150212431
2015-07-30

Projection exposure system for microlithography with a measurement device

 #527
20150212428
2015-07-30

Lithographic apparatus, device manufacturing method and displacement measurement system

 #528
20150205216
2015-07-23

Method for aligning substrates in different spaces and having different sizes

 #529
20150198899
2015-07-16

Mark detecting method

 #530
20150198898
2015-07-16

Measuring apparatus and method, processing apparatus and method, pattern forming apparatus and method, exposure apparatus and method, and device manufacturing method

 #531
20150198437
2015-07-16

Projection exposure apparatus for microlithography comprising an optical distance measurement system

 #532
20150192863
2015-07-09

Exposure apparatus, exposure method, and device manufacturing method

 #533
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Stage apparatus for semiconductor inspection and lithography systems

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Positioning apparatus, lithography apparatus, and article manufacturing method

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Object exchange method, exposure method, carrier system, exposure apparatus, and device manufacturing method

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Measuring apparatus, measuring method, lithography apparatus, and article manufacturing method

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MICROPROCESSING SYSTEM, MICROPROCESSING APPARATUS, AND MICROPROCESSING METHOD

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Lithographic apparatus and device manufacturing method

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Stage apparatus, lithography apparatus, and article manufacturing method

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System for positioning a tool relative to a workpiece

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STAGE BRAKING SYSTEM FOR A MOTOR

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Lithography apparatus and device manufacturing method

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Movable body drive method and system, pattern formation method and apparatus, exposure method and apparatus for driving movable body based on measurement value of encoder and information on flatness of scale, and device manufacturing method

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LITHOGRAPHY APPARATUS, METHOD OF MEASURING SURFACE POSITION, AND METHOD OF PRODUCING DEVICE

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Lithographic apparatus

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SUBSTRATE PROCESSING SYSTEM AND METHOD OF CONTROLLING THE SAME

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Interferometric heterodyne optical encoder system

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Pattern forming apparatus and pattern forming method, movable body drive system and movable body drive method, exposure apparatus and exposure method, and device manufacturing method

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Movable body apparatus, exposure apparatus, exposure method, and device manufacturing method

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Calibration method, measurement apparatus, exposure apparatus, and method of manufacturing article

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Method for calibrating a position-measuring system and position-measuring system

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Movable body drive method, movable body drive system, pattern formation method, pattern forming apparatus, exposure method, exposure apparatus, and device manufacturing method

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Two-dimensional encoder system and method

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Lithographic apparatus with a metrology system for measuring a position of a substrate table

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Exposure apparatus and method of manufacturing article

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Environmental system including vacuum scavenge for an immersion lithography apparatus

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Lithographic apparatus, device manufacturing method, and method of applying a pattern to a substrate

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Determining position and curvature information directly from a surface of a patterning device

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Method and device for writing photomasks with reduced mura errors

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Mechanically produced alignment fiducial method and device

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Exposure apparatus and exposure method thereof

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Exposure apparatus and exposure method thereof

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Exposure apparatus, exposure method, and device manufacturing method

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Stage transferring device and position measuring method thereof

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Magnetic sensor calibration and servo for planar motor stage

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High resolution encoder head

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Interference exposure device and method

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Two-dimensional, position-sensitive sensor-based system for positioning object having six degrees of freedom in space

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Exposure apparatus and exposure method, and device manufacturing method

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Exposure apparatus and method of manufacturing device

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Exposure apparatus, exposure method, and method of manufacturing device

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3D PRINTER WITH SELF-LEVELING PLATFORM

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Pattern formation method, pattern formation apparatus, and recording medium recorded with alignment program

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Exposure apparatus, exposure method, device manufacturing method, and carrier method

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Two axis encoder head assembly

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Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method

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Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method

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Lithographic apparatus

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