G03F7/70775 - page 3 - CPC Classification Index

#601

20140016111

2014-01-16

Exposure apparatus, calibration method, and method of manufacturing article

#602

20130335750

2013-12-19

Position-measuring device

#603

20130335723

2013-12-19

Movable body apparatus, exposure apparatus, exposure method, and device manufacturing method

#604

20130335722

2013-12-19

Lithographic apparatus and device manufacturing method

#605

20130329208

2013-12-12

Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method

#606

20130329207

2013-12-12

Exposure apparatus and device manufacturing method

#607

20130329206

2013-12-12

Exposure apparatus, exposure method, and device manufacturing method

#608

20130329201

2013-12-12

Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method

#609

20130329200

2013-12-12

Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method

#610

20130308109

2013-11-21

Measuring method, stage apparatus, and exposure apparatus

#611

20130308108

2013-11-21

Measuring method, stage apparatus, and exposure apparatus

#612

20130301027

2013-11-14

Exposure method, exposure apparatus, and device manufacturing method

#613

20130293962

2013-11-07

Irradiation module for a measuring apparatus

#614

20130278915

2013-10-24

Lithographic apparatuses and methods for compensating for eigenmode coupling

#615

20130278914

2013-10-24

Non-harmonic cyclic error compensation in interferometric encoder systems

#616

20130258308

2013-10-03

Exposure apparatus, method of controlling the same and method of manufacturing device

#617

20130250270

2013-09-26

Lithographic apparatus and device manufacturing method

#618

20130235362

2013-09-12

Exposure apparatus

#619

20130218304

2013-08-22

Ultra-precision position control device and method for determining position and attitude information associated with a 6-degree-of-freedom stage thereof

#620

20130208287

2013-08-15

System having a plurality of scanning units of a position measuring device

#621

20130194586

2013-08-01

System for detecting motion, lithographic apparatus and device manufacturing method

#622

20130188197

2013-07-25

Interferometric apparatus for detecting 3D position of a diffracting object

#623

20130183623

2013-07-18

Exposure apparatus and exposure method, and device manufacturing method with encoder of higher reliability for position measurement

#624

20130182236

2013-07-18

Imprint lithography

#625

20130182231

2013-07-18

Substrate placement in immersion lithography

#626

20130162968

2013-06-27

Stage system and a lithographic apparatus

#627

20130162966

2013-06-27

Lithographic apparatus and method

#628

20130128255

2013-05-23

Encoder device, method for measuring moving amount, optical apparatus, exposure apparatus, exposure method and method for producing device

#629

20130128254

2013-05-23

Thermally stable optical sensor mount

#630

20130114062

2013-05-09

Compact encoder head for interferometric encoder system

#631

20130114061

2013-05-09

Double pass interferometric encoder system

#632

20130070229

2013-03-21

MOVABLE BODY DRIVE METHOD, MOVABLE BODY DRIVE SYSTEM, PATTERN FORMATION METHOD, PATTERN FORMING APPARATUS, EXPOSURE METHOD, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

#633

20130070228

2013-03-21

Exposure apparatus

#634

20130069294

2013-03-21

Two-dimension precision transfer equipment, three-dimension precision transfer equipment, and coordinate measuring machine

#635

20130050675

2013-02-28

Lithographic apparatus, device manufacturing method, and method of calibrating a displacement measuring system

#636

20130050670

2013-02-28

Position measurement system, lithographic apparatus and device manufacturing method

#637

20130044307

2013-02-21

Movable body apparatus, movable body drive method, exposure apparatus, exposure method, and device manufacturing method

#638

20130033693

2013-02-07

Exposure method and device manufacturing method measuring position of substrate stage using at least three of four encoder heads

#639

20130021593

2013-01-24

Substrate handling apparatus and lithographic apparatus

#640

20130016327

2013-01-17

Lithography system and method for storing positional data of a target

#641

20130001898

2013-01-03

Apparatus and method of controlling chuck, and exposure apparatus and control method thereof

#642

20120307227

2012-12-06

Movable body drive method, pattern formation method, exposure method, and device manufacturing method for maintaining position coordinate before and after switching encoder head

#643

20120293788

2012-11-22

MOVABLE BODY DRIVE METHOD AND MOVABLE BODY DRIVE SYSTEM, PATTERN FORMATION METHOD AND APPARATUS, EXPOSURE METHOD AND APPARATUS, AND DEVICE MANUFACTURING METHOD FOR CONTINUOUS POSITION MEASUREMENT OF MOVEABLE BODY BEFORE AND AFTER SWITCHING BETWEEN SENSOR HEADS

#644

20120268725

2012-10-25

Lithography system for processing a target, such as a wafer, and a method for operating a lithography system for processing a target, such as a wafer

#645

20120268724

2012-10-25

Lithography system for processing a target, such as a wafer, a method for operating a lithography system for processing a target, such as a wafer and a substrate for use in such a lithography system

#646

20120262691

2012-10-18

MOVABLE BODY DRIVE SYSTEM, PATTERN FORMATION APPARATUS, EXPOSURE APPARATUS AND EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD

#647

20120262684

2012-10-18

Environmental system including vacuum scavenge for an immersion lithography apparatus

#648

20120250030

2012-10-04

Alignment of an interferometer module for use in an exposure tool

#649

20120250026

2012-10-04

Interferometer module

#650

20120249984

2012-10-04

Lithography system with differential interferometer module

#651

20120242969

2012-09-27

Lithographic apparatus

#652

20120229817

2012-09-13

Light source assembly that generates heterodyne output beams

#653

20120224158

2012-09-06

Exposure method and apparatus measuring position of movable body based on information on flatness of encoder grating section

#654

20120224157

2012-09-06

Exposure method and apparatus compensating measuring error of encoder due to grating section and displacement of movable body in Z direction

#655

20120212726

2012-08-23

Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, position control method and position control system, and device manufacturing method

#656

20120194824

2012-08-02

Interferometric heterodyne optical encoder system

#657

20120170011

2012-07-05

Alignment method, alignment apparatus, and exposure apparatus

#658

20120156807

2012-06-21

Method of updating calibration data and a device manufacturing method

#659

20120154780

2012-06-21

Cyclic error compensation in interferometric encoder systems

#660

20120147372

2012-06-14

Optical-component fabricating method and optical-component fabricating apparatus

#661

20120147352

2012-06-14

Stage apparatus, exposure apparatus and device fabrication method

#662

20120127478

2012-05-24

REFLECTOR, OPTICAL ELEMENT, INTERFEROMETER SYSTEM, STAGE DEVICE, EXPOSURE APPARATUS, AND DEVICE FABRICATING METHOD

#663

20120127453

2012-05-24

Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration method

#664

20120127451

2012-05-24

Positioning system, a lithographic apparatus and a method for positional control

#665

20120127450

2012-05-24

Movable body drive method and movable body drive system, and pattern formation method and pattern formation apparatus

#666

20120127447

2012-05-24

Method for determing a commutation offset and for determining a compensation map for a stage

#667

20120118325

2012-05-17

Stage device and stage cleaning method

#668

20120113405

2012-05-10

Method for determining a commutation offset and for determining a compensation map for a stage

#669

20120092638

2012-04-19

Method of aligning a wafer stage and apparatus for performing the same

#670

20120086927

2012-04-12

DETECTION DEVICE, MOVABLE BODY APPARATUS, PATTERN FORMATION APPARATUS AND PATTERN FORMATION METHOD, EXPOSURE APPARATUS AND EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD

#671

20120078561

2012-03-29

Method for Calibrating a Target Surface of a Position Measurement System, Position Measurement System, and Lithographic Apparatus

#672

20120075613

2012-03-29

Lithographic apparatus having an encoder type position sensor system

#673

20120062903

2012-03-15

Method and apparatus for measuring displacement of a sample using a wire grid polarizer to generate interference light

#674

20120059623

2012-03-08

Positioning apparatus judging moving method to control positioning timing

#675

20120057140

2012-03-08

Exposure apparatus, movable body apparatus, flat-panel display manufacturing method, and device manufacturing method

#676

20120053889

2012-03-01

Positioning apparatus, positioning method, and storage medium

#677

20120052447

2012-03-01

Lithographic apparatus and device manufacturing method

#678

20120050740

2012-03-01

Substrate placement in immersion lithography

#679

20120050709

2012-03-01

Stage apparatus, lithographic apparatus and method of positioning an object table

#680

20120032067

2012-02-09

Two dimensional encoder system and method

#681

20120019801

2012-01-26

Position control system, lithographic apparatus, and method to control a position of a movable object

#682

20120019794

2012-01-26

Variable reluctance device, stage apparatus, lithographic apparatus and device manufacturing method

#683

20120013865

2012-01-19

Lithographic apparatus and method

#684

20120003381

2012-01-05

Method of adjusting speed and/or routing of a table movement plan and a lithographic apparatus

#685

20110317143

2011-12-29

Lithographic apparatus and device manufacturing method

#686

20110317142

2011-12-29

Measurement system, method and lithographic apparatus

#687

20110317141

2011-12-29

Lithographic apparatus

#688

20110304839

2011-12-15

Position sensor and lithographic apparatus

#689

20110299058

2011-12-08

Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method

#690

20110299052

2011-12-08

Measuring apparatus and method, processing apparatus and method, pattern forming apparatus and method, exposure apparatus and method, and device manufacturing method

#691

20110279807

2011-11-17

Movable body drive method and system, pattern formation method and apparatus, exposure method and apparatus for driving movable body based on measurement value of encoder and information on flatness of scale, and device manufacturing method

#692

20110273686

2011-11-10

Exposure apparatus, exposure method, and method of manufacturing device

#693

20110248578

2011-10-13

Positioning apparatus

#694

20110222074

2011-09-15

Pattern generators, calibration systems and methods for patterning workpieces

#695

20110222036

2011-09-15

Lithographic apparatus and device manufacturing method

#696

20110222035

2011-09-15

Lithographic apparatus and device manufacturing method

#697

20110216300

2011-09-08

Lithographic apparatus and method for measuring a position

#698

20110208459

2011-08-25

Lithographic apparatus and method for correcting a position of a stage of a lithographic apparatus

#699

20110199601

2011-08-18

Substrate table, a lithographic apparatus and a method involving an encoder plate

#700

20110199594

2011-08-18

Exposure apparatus and method for producing device

#701

20110188049

2011-08-04

Assembly comprising a conditioning system and at least one object, a conditioning system, a lithographic apparatus and methods

#702

20110177461

2011-07-21

Movable body drive method, movable body apparatus, exposure method, exposure apparatus, and device manufacturing method

#703

20110141451

2011-06-16

Displacement measurement device, exposure apparatus, and working device

#704

20110141447

2011-06-16

Measurement system and lithographic apparatus for measuring a position dependent signal of a movable object

#705

20110134407

2011-06-09

Maskless exposure apparatus and pattern compensation method using the same

#706

20110128523

2011-06-02

STAGE APPARATUS, EXPOSURE APPARATUS, DRIVING METHOD, EXPOSING METHOD, AND DEVICE FABRICATING METHOD

#707

20110123913

2011-05-26

EXPOSURE APPARATUS, EXPOSING METHOD, AND DEVICE FABRICATING METHOD

#708

20110116070

2011-05-19

Exposure aparatus and method of manufacturing device to avoid collision between an elevating member of a substrate stage and a conveyance arm

#709

20110116066

2011-05-19

Lithographic apparatus and device manufacturing method

#710

20110102761

2011-05-05

STAGE APPARATUS, EXPOSURE APPARATUS, AND DEVICE FABRICATING METHOD

#711

20110102756

2011-05-05

Exposure apparatus and device manufacturing method measuring position of substrate stage using at least three of four encoder heads

#712

20110096315

2011-04-28

CALIBRATION METHOD AND LITHOGRAPHIC APPARATUS USING SUCH A CALIBRATION METHOD

#713

20110096306

2011-04-28

STAGE APPARATUS, EXPOSURE APPARATUS, DRIVING METHOD, EXPOSING METHOD, AND DEVICE FABRICATING METHOD

#714

20110090476

2011-04-21

Lithographic apparatus and device manufacturing method of applying a pattern to a substrate using sensor and alignment mark

#715

20110086315

2011-04-14

EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD

#716

20110085180

2011-04-14

Lithographic apparatus and device manufacturing method

#717

20110075154

2011-03-31

Lithographic apparatus and method for calibrating the same

#718

20110075120

2011-03-31

EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD

#719

20110053062

2011-03-03

Exposure method, exposure apparatus, and device manufacturing method

#720

20110053061

2011-03-03

Exposure apparatus, exposure method, and device manufacturing method

#721

20110051109

2011-03-03

MEASUREMENT APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

#722

20110051108

2011-03-03

Exposure method, exposure apparatus, and device manufacturing method

#723

20110037959

2011-02-17

Environmental system including vacuum scavenge for an immersion lithography apparatus

#724

20110032496

2011-02-10

Movable body apparatus, exposure apparatus, exposure method, and device manufacturing method

#725

20110026006

2011-02-03

Exposure apparatus, exposure method, and device manufacturing method measuring position of substrate stage by switching between encoder and interferometer

#726

20110026005

2011-02-03

Exposure apparatus, exposure method, and method for producing device

#727

20110016437

2011-01-20

Method and apparatus for measuring of masks for the photo-lithography

#728

20110013171

2011-01-20

Projection exposure system for microlithography with a measurement device

#729

20110008734

2011-01-13

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

#730

20110008717

2011-01-13

Exposure apparatus, exposure method and device manufacturing method

#731

20110007325

2011-01-13

Exposure apparatus and device manufacturing method

#732

20110007294

2011-01-13

Lithographic apparatus and device manufacturing method

#733

20110007291

2011-01-13

Exposure apparatus and device manufacturing method

#734

20110007290

2011-01-13

Exposure apparatus and device manufacturing method

#735

20110001949

2011-01-06

Optical imaging arrangement

#736

20110001254

2011-01-06

Imprint Lithography Apparatus and Method

#737

20100321666

2010-12-23

Movable body system, pattern formation apparatus, exposure apparatus and exposure method, and device manufacturing method

#738

20100321665

2010-12-23

Lithographic apparatus and device manufacturing method

#739

20100297562

2010-11-25

Object exchange method, exposure method, carrier system, exposure apparatus, and device manufacturing method

#740

20100297561

2010-11-25

Lithographic apparatus and device manufacturing method

#741

20100296071

2010-11-25

Movable body apparatus, exposure apparatus, exposure method, and device manufacturing method

#742

20100296068

2010-11-25

EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD

#743

20100290017

2010-11-18

Folded Optical Encoder and Applications for Same

#744

20100285400

2010-11-11

Interferometric apparatus for detecting 3D position of a diffracting object

#745

20100259768

2010-10-14

DISPLACEMENT DEVICE WITH PRECISION MEASUREMENT

#746

20100245797

2010-09-30

Substrate Handling Structure

#747

20100236576

2010-09-23

Stage device and stage cleaning method

#748

20100235127

2010-09-16

Calibration of a position measuring device of an optical device

#749

20100220335

2010-09-02

Lithographic apparatus and method for calibrating the same

#750

20100165309

2010-07-01

Deformation measuring apparatus, exposure apparatus, jig for the deformation measuring apparatus, position measuring method and device fabricating method

#751

20100159403

2010-06-24

Movable body apparatus, exposure apparatus, exposure method, and device manufacturing method

#752

20100159399

2010-06-24

Lithographic apparatus with gas pressure means for controlling a planar position of a patterning device contactless

#753

20100157276

2010-06-24

Exposure apparatus, exposure method, device manufacturing method, and carrier method

#754

20100157275

2010-06-24

Exposure apparatus, exposure method, and device manufacturing method

#755

20100157274

2010-06-24

Exposure apparatus including positional measurement system of movable body, exposure method of exposing object including measuring positional information of movable body, and device manufacturing method that includes exposure method of exposing object, including measuring positional information of movable body

#756

20100157263

2010-06-24

Lithographic apparatus, and patterning device for use in a lithographic process

#757

20100134779

2010-06-03

Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method

#758

20100134769

2010-06-03

Lithographic apparatus and device manufacturing method having a barrier and/or a contamination removal device for a sensor and/or grating

#759

20100103403

2010-04-29

Wavelength shift measuring apparatus, optical source apparatus, interference measuring apparatus, exposure apparatus, and device manufacturing method

#760

20100097608

2010-04-22

Method for determination of residual errors

#761

20100091296

2010-04-15

Interferometer system for monitoring an object

#762

20100085551

2010-04-08

Lithographic apparatus and device manufacturing method

#763

20100085546

2010-04-08

LITHOGRAPHIC APPARATUS AND HUMIDITY MEASUREMENT SYSTEM

#764

20100081095

2010-04-01

Movable body apparatus, movable body drive method, exposure apparatus, exposure method, and device manufacturing method

#765

20100073653

2010-03-25

Movable body apparatus, exposure apparatus, exposure method, and device manufacturing method

#766

20100073652

2010-03-25

Movable body apparatus, movable body drive method, exposure apparatus, exposure method, and device manufacturing method

#767

20100073650

2010-03-25

Lithographic apparatus and device manufacturing method

#768

20100068655

2010-03-18

POSITION MEASURING MODULE, POSITION MEASURING APPARATUS, STAGE APPARATUS, EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

#769

20100066992

2010-03-18

Stage apparatus, exposure apparatus, and device fabricating method

#770

20100060898

2010-03-11

Methods and systems for interferometric analysis of surfaces and related applications

#771

20100060878

2010-03-11

EXPOSURE APPARTUS, EXPOSURE METHOD AND METHOD OF MANUFACTURING DISPLAY PANEL SUBSTRATE

#772

20100053586

2010-03-04

Displacement measurement system having a prism, for displacement measurement between two or more gratings

#773

20100039652

2010-02-18

Method and apparatus for measuring displacement of a sample to be inspected using an interference light

#774

20100033705

2010-02-11

Multi nozzle proximity sensor employing common sensing and nozzle shaping

#775

20100033697

2010-02-11

Optical position sensor, a position sensitive detector, a lithographic apparatus and a method for determining an absolute position of a movable object to be used in a relative position measurement system

#776

20100020331

2010-01-28

Laser interferometer systems and methods with suppressed error and pattern generators having the same

#777

20100020330

2010-01-28

Interferometer calibration system and method

#778

20100020296

2010-01-28

Lithographic apparatus and device manufacturing method

#779

20100014097

2010-01-21

ALGORITHM CORRECTING FOR CORRECTION OF INTERFEROMETER FLUCTUATION

#780

20100007867

2010-01-14

Lithographic apparatus and calibration method

#781

20100001168

2010-01-07

Damping apparatus and exposure apparatus

#782

20090316124

2009-12-24

Lithographic apparatus, device manufacturing method and device manufactured thereby

#783

20090310105

2009-12-17

Optical member, interferometer system, stage apparatus, exposure apparatus, and device manufacturing method

#784

20090305176

2009-12-10

Exposure apparatus and method of manufacturing device

#785

20090303483

2009-12-10

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

#786

20090284724

2009-11-19

Movable body system, movable body drive method, pattern formation apparatus, pattern formation method, exposure apparatus, exposure method, and device manufacturing method

#787

20090284723

2009-11-19

Stage device, pattern formation apparatus, exposure apparatus, stage drive method, exposure method, and device manufacturing method

#788

20090284717

2009-11-19

Exposure apparatus, exposure method, and device manufacturing method

#789

20090284716

2009-11-19

Exposure apparatus, exposure method, and device manufacturing method

#790

20090279067

2009-11-12

Stage system and lithographic apparatus comprising such stage system

#791

20090273767

2009-11-05

Movable body apparatus, exposure apparatus and pattern formation apparatus, and device manufacturing method

#792

20090268210

2009-10-29

Compact Littrow encoder

#793

20090268185

2009-10-29

Position control system, a lithographic apparatus and a method for controlling a position of a movable object

#794

20090262326

2009-10-22

Stage system calibration method, stage system and lithographic apparatus comprising an encoder measurement system to measure position of stage system

#795

20090262321

2009-10-22

Position measuring system and position measuring method, Movable body apparatus, movable body drive method, exposure apparatus and exposure method, pattern forming apparatus, and device manufacturing method

#796

20090237634

2009-09-24

Encoder-type measurement system, lithographic apparatus and method to detect an error on or in a grid or grating of an encoder-type measurement system

#797

20090231566

2009-09-17

Lithographic apparatus, stage system and stage control method

#798

20090231561

2009-09-17

Measuring method, stage apparatus, and exposure apparatus

#799

20090225288

2009-09-10

Exposure apparatus, exposure method, and device manufacturing method

#800

20090213357

2009-08-27

Exposure apparatus and device manufacturing method

#801

20090207422

2009-08-20

Lithographic apparatus and method for calibrating the same

#802

20090201513

2009-08-13

Exposure apparatus, exposure method, and device manufacturing method having encoders to measure displacement between optical member and measurement mount and between measurement mount and movable body

#803

20090201477

2009-08-13

Movable support, position control system, lithographic apparatus and method of controlling a position of an exchangeable object

#804

20090191651

2009-07-30

POSITIONING APPARATUS, EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING DEVICE

#805

20090190110

2009-07-30

Movable body drive system, pattern formation apparatus, exposure apparatus and exposure method, and device manufacturing method

#806

20090190104

2009-07-30

Movable body drive method and apparatus, exposure method and apparatus, pattern formation method and apparatus, and device manufacturing method

#807

20090180096

2009-07-16

Environmental system including vacuum scavenge for an immersion lithography apparatus

#808

20090180084

2009-07-16

Lithographic apparatus with an encoder arranged for defining a zero level

#809

20090161086

2009-06-25

Movable body system, pattern formation apparatus, exposure apparatus and measurement device, and device manufacturing method

#810

20090161082

2009-06-25

Exposure apparatus and exposure method

#811

20090155026

2009-06-18

Method of transferring a substrate, transfer system and lithographic projection apparatus

#812

20090153880

2009-06-18

OPTICAL SYSTEM FOR DETECTING MOTION OF A BODY

#813

20090153822

2009-06-18

Exposure apparatus, exposure method, and device manufacturing method

#814

20090153816

2009-06-18

Method of transferring a substrate, transfer system and lithographic projection apparatus

#815

20090148172

2009-06-11

DRAWING DEVICE, EXPOSURE DEVICE, AND DRAWING METHOD

#816

20090135388

2009-05-28

Movable-body apparatus, exposure apparatus, exposure method, and device manufacturing method

#817

20090128791

2009-05-21

Stage system, lithographic apparatus including such stage system, and correction method

#818

20090122287

2009-05-14

Movable body apparatus, pattern formation apparatus and exposure apparatus, and device manufacturing method

#819

20090122286

2009-05-14

Movable body apparatus, pattern formation apparatus and exposure apparatus, and device manufacturing method

#820

20090122285

2009-05-14

Movable body apparatus, pattern formation apparatus and exposure apparatus, and device manufacturing method

#821

20090115982

2009-05-07

Movable body apparatus, pattern formation apparatus and exposure apparatus, and device manufacturing method with measurement device to measure movable body in Z direction

#822

20090103067

2009-04-23

Exposure apparatus and device manufacturing method

#823

20090103066

2009-04-23

Lithographic apparatus and device manufacturing method

#824

20090096980

2009-04-16

Methods and systems for interferometric analysis of surfaces and related applications

#825

20090075012

2009-03-19

Lithographic apparatus and device manufacturing method

#826

20090073405

2009-03-19

Movable body drive method and movable body drive system, and pattern formation method and pattern formation apparatus

#827

20090073402

2009-03-19

Lithographic apparatus and exposure method

#828

20090073397

2009-03-19

Laminar Flow Gas Curtains for Lithographic Applications

#829

20090066928

2009-03-12

ALIGNMENT APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD USING EXPOSURE APPARATUS

#830

20090061361

2009-03-05

Integrated circuit manufacturing methods with patterning device position determination

#831

20090059198

2009-03-05

Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method for continuous position measurement of movable body before and after switching between sensor heads

#832

20090059194

2009-03-05

Position measurement system, exposure apparatus, position measuring method, exposure method and device manufacturing method, and tool and measuring method

#833

20090053629

2009-02-26

Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method

#834

20090051895

2009-02-26

MOVABLE BODY DRIVE METHOD AND MOVABLE BODY DRIVE SYSTEM, PATTERN FORMATION METHOD AND APPARATUS, DEVICE MANUFACTURING METHOD, AND PROCESSING SYSTEM

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20090051894

2009-02-26

Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and measuring method

#836

20090051893

2009-02-26

Movable body drive method and movable body drive system, pattern formation method and apparatus, and device manufacturing method

#837

20090051892

2009-02-26

Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, measuring method, and position measurement system

#838

20090046297

2009-02-19

Atmosphere-density-fluctuation monitors for interferometer beams, and atmosphere-supplying systems comprising same

#839

20090040528

2009-02-12

Positioning apparatus, exposure apparatus, and device manufacturing method

#840

20090040488

2009-02-12

Movable body drive method, pattern formation method, exposure method, and device manufacturing method for maintaining position coordinate before and after switching encoder head

#841

20090035669

2009-02-05

WORK POSITION INFORMATION OBTAINING METHOD AND APPARATUS

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20090033900

2009-02-05

Movable body drive method and movable body drive system, pattern formation method and pattern formation apparatus, and device manufacturing method

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20090033899

2009-02-05

EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR MANUFACTURING DISPLAY PANEL SUBSTRATE

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20090027640

2009-01-29

Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, position control method and position control system, and device manufacturing method

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20090015246

2009-01-15

Lithographic apparatus and position sensor

#846

20090009745

2009-01-08

Exposure method, exposure apparatus, and method for producing device

#847

20090009738

2009-01-08

Surface level detection method, exposure apparatus, and device manufacturing method

#848

20090004580

2009-01-01

Detection device, movable body apparatus, pattern formation apparatus and pattern formation method, exposure apparatus and exposure method, and device manufacturing method

#849

20090002653

2009-01-01

Lithographic apparatus having encoder type position sensor system

#850

20090001260

2009-01-01

System for detecting motion of a body

#851

20090000354

2009-01-01

Method and system for operating an air gauge at programmable or constant standoff

#852

20080319569

2008-12-25

Lithographic projection apparatus and method for controlling a support structure

#853

20080317084

2008-12-25

Laser Interferometer Mirror Assembly

#854

20080316460

2008-12-25

Control system, lithographic projection apparatus, method of controlling a support structure, and a computer program product

#855

20080309950

2008-12-18

Calibrating a lithographic apparatus

#856

20080304079

2008-12-11

Displacement measurement sensor head and system having measurement sub-beams comprising zeroth order and first order diffraction components

#857

20080304064

2008-12-11

Stage controller and exposure method in which position of the stage is controlled based on position measurements of first and second laser interferometers

#858

20080304050

2008-12-11

STAGE APPARATUS, EXPOSURE APPARATUS, AND DEVICE FABRICATION METHOD

#859

20080304045

2008-12-11

Motion measurement and synchronization using a scanning interferometer with gratings

#860

20080297751

2008-12-04

Exposure method, exposure apparatus, and method for producing device

#861

20080297746

2008-12-04

Exposure method, exposure apparatus, and method for producing device

#862

20080291464

2008-11-27

Interferometric position-measuring devices and methods

#863

20080291413

2008-11-27

Lithographic apparatus having an encoder position sensor system

#864

20080285051

2008-11-20

Multiple-degree of freedom interferometer with compensation for gas effects

#865

20080278705

2008-11-13

Stage assembly with measurement system initialization, vibration compensation, low transmissibility, and lightweight fine stage

#866

20080278702

2008-11-13

Lithographic apparatus and sensor calibration method

#867

20080259347

2008-10-23

Exposure apparatus, method of controlling the same, and manufacturing method

#868

20080240501

2008-10-02

Measurement system, lithographic apparatus and method for measuring a position dependent signal of a movable object

#869

20080239264

2008-10-02

Lithographic apparatus having feedthrough control system

#870

20080239257

2008-10-02

Stage Apparatus and Exposure Apparatus

#871

20080231825

2008-09-25

Exposure Apparatus and method for producing device

#872

20080225262

2008-09-18

Displacement measurement system

#873

20080225250

2008-09-18

Exposure apparatus and method for producing device

#874

20080225249

2008-09-18

Exposure apparatus and method for producing device

#875

20080218713

2008-09-11

Movable body drive method and system, pattern formation method and apparatus, exposure method and apparatus for driving movable body based on measurement value of encoder and information on flatness of scale, and device manufacturing method

#876

20080212083

2008-09-04

Optical imaging arrangement

#877

20080212056

2008-09-04

Exposure method, exposure apparatus, method for producing device, and method for evaluating exposure apparatus

#878

20080198369

2008-08-21

Interferometer air-fluctuation monitors and systems comprising same

#879

20080180053

2008-07-31

Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning device

#880

20080174750

2008-07-24

Apparatus configured to position a workpiece

#881

20080165347

2008-07-10

Interferometer system for monitoring an object

#882

20080165345

2008-07-10

Distance measuring interferometer and encoder metrology systems for use in lithography tools

#883

20080158531

2008-07-03

Exposure apparatus, exposure method, and method for producing device

#884

20080151267

2008-06-26

Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method

#885

20080151257

2008-06-26

Position measurement method

#886

20080151229

2008-06-26

Multiple-degree of freedom interferometer with compensation for gas effects

#887

20080151214

2008-06-26

Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method

#888

20080144042

2008-06-19

Stage apparatus, control system, exposure apparatus, and device manufacturing method

#889

20080137097

2008-06-12

Position measuring method, position measuring system, and exposure apparatus

#890

20080137096

2008-06-12

Exposure apparatus configured to minimize effects of mechanism for measuring stage position on peripheral mechanism and device-manufacturing method

#891

20080136078

2008-06-12

Positioning apparatus, exposure apparatus, and device manufacturing method

#892

20080109178

2008-05-08

Method and system for predicting and correcting signal fluctuations of an interferometric measuring apparatus

#893

20080106723

2008-05-08

Substrate placement in immersion lithography

#894

20080106722

2008-05-08

Movable body drive system and movable body drive method, pattern formation apparatus and method, exposure apparatus and method, device manufacturing method, and decision-making method

#895

20080105026

2008-05-08

Lithographic apparatus and device manufacturing method

#896

20080100819

2008-05-01

Lithographic apparatus and method

#897

20080100818

2008-05-01

Lithographic apparatus and method

#898

20080094604

2008-04-24

Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method

#899

20080094594

2008-04-24

Movable body system, pattern formation apparatus, exposure apparatus and exposure method, and device manufacturing method

#900

20080094593

2008-04-24

Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration method