Grating for phase-contrast imaging

X-ray scattering measurement device and X-ray scattering measurement method

Grid for radiography and manufacturing method thereof, and radiation imaging system

Grid for radiography and manufacturing method thereof, and radiation imaging system

Source-collector module with GIC mirror and tin rod EUV LPP target system

Source-collector module with GIC mirror and tin wire EUV LPP target system

EUV collector with cooling device

Compact, low noise power supply for advanced electronics applications, and X-ray analyzer applications thereof

Achromatic phase-contrast imaging

Method for producing a grating and phase contrast X-ray system

X-ray radiator to generate quasi-monochromatic x-ray radiation, and radiography x-ray acquisition system employing same

X-RAY GENERATOR WITH POLYCAPILLARY OPTIC

X-ray imaging apparatus, X-ray imaging method, and X-ray imaging program

X-ray apparatus, method of using the same and X-ray irradiation method

Diffraction grating and alignment method thereof, and radiation imaging system

Extreme ultraviolet light generation system

OPTICAL COMPONENT HAVING AN IMPROVED TRANSIENT THERMAL BEHAVIOR AND METHOD FOR IMPROVING THE TRANSIENT THERMAL BEHAVIOR OF AN OPTICAL COMPONENT

X-ray imaging apparatus and X-ray imaging method

Microstructure manufacturing method and microstructure

Multi-beam X-ray system

X-ray shield grating, manufacturing method therefor, and X-ray imaging apparatus

XRF system having multiple excitation energy bands in highly aligned package

Microstructure manufacturing method

Analysis method, radiation imaging apparatus using analysis method, and analysis program for executing analysis method

COMPUTED TOMOGRAPHY SYSTEM HAVING NANO-SPATIAL RESOLUTION

X-ray optical configuration with two focusing elements

X-ray monochromator, method of manufacturing the same and X-ray spectrometer

System and method for determining ionization susceptibility using x-rays

Cooling systems and methods for grazing incidence EUV lightography collectors

X-ray imaging apparatus and method of X-ray imaging

Multiconfiguration X-ray optical system

Phase grating used to take X-ray phase contrast image, imaging system using the phase grating, and X-ray computer tomography system

Plasma source of directed beams and application thereof to microlithography

X-ray imaging apparatus and method of X-ray imaging

X-ray phase grating and method for producing the same

Method and device for cleaning at least one optical component

SPECTRAL PURITY FILTERS FOR USE IN A LITHOGRAPHIC APPARATUS

Grazing incidence collector optical systems for EUV and X-ray applications

EUV projection lens and optic system having the same

X-ray beam processor

Phase grating used for X-ray phase imaging, imaging apparatus for X-ray phase contrast image using phase grating, and X-ray computed tomography system

ILLUMINATION SYSTEM FOR A MICROLITHOGRAPHY PROJECTION EXPOSURE APPARATUS

Nano-structured nuclear radiation shielding

X-ray detector for phase contrast imaging

Strain matching of crystals and horizontally-spaced monochromator and analyzer crystal arrays in diffraction enhanced imaging systems and related methods

GRADED LENSES

X-ray imaging apparatus, X-ray imaging method, and X-ray imaging program

Wavelength-dispersive X-ray spectrometer

Grating for EUV-radiation, method for manufacturing the grating and wavefront measurement system

Grating with a large aspect ratio, in particular to be used as an X-ray optical grating in a CT system, produced by a lithography method

High Aspect Ratio Microstructures and Method for Fabricating High Aspect Ratio Microstructures From Powder Composites

Source grating for Talbot-Lau-type interferometer

SPECTRAL FILTER, LITHOGRAPHIC APPARATUS INCLUDING SUCH A SPECTRAL FILTER, DEVICE MANUFACTURING METHOD, AND DEVICE MANUFACTURED THEREBY

X-ray optical grating and method for the production thereof, and X-ray detector embodying same

Optical device and method of in situ treating an EUV optical component to enhance a reduced reflectivity

X-ray convergence element and X-ray irradiation device

Electron-beam-assisted EEM method

Curvature distribution crystal lens and X-ray reflectometer

X-ray condensing method and its device using phase restoration method

METHOD FOR REGENERATING A SURFACE OF AN OPTICAL ELEMENT IN AN XUV RADIATION SOURCE, AND XUV RADIATION SOURCE

Device for the X-ray analysis of a specimen, comprising an energy/angle-filtering diffraction analyser system

EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE

Radiological image capturing apparatus and radiological image capturing system

Method for X-ray wavelength measurement and X-ray wavelength measurement apparatus

X-ray beam processor

High heat load optics with a liquid metal interface for use in an extreme ultraviolet lithography system

Collector optical system

MULTI-REFLECTION OPTICAL SYSTEMS AND THEIR FABRICATION

Radiation phase image radiographing apparatus

Ultra-high density diffraction grating

Radiation source, lithographic apparatus and device manufacturing method

Radiation sources and methods of generating radiation

Radiation source, lithographic apparatus and device manufacturing method

DEFORMABLE MIRROR, MIRROR APPARATUS, AND EXPOSURE APPARATUS

High-resolution, active-optic X-ray fluorescence analyzer

High-resolution X-ray optic and method for constructing an X-ray optic

Adaptive X-ray optics

High precision posture control method of X-ray mirror

Illumination system particularly for microlithography

High intensity x-ray beam system

Lithographic apparatus

X-ray generator with polycapillary optic

X-ray focusing device

Approach and device for focusing x-rays

Mammography X-ray homogenizing optic

Highly aligned x-ray optic and source assembly for precision x-ray analysis applications

X-ray imaging systems employing point-focusing, curved monochromating optics

Apparatus and method for positioning an x-ray lens and x-ray device incorporating said apparatus

Monochromatic x-ray micro beam for trace element mapping

High power EUV lamp system

EXPOSURE MIRROR AND EXPOSURE APPARATUS HAVING SAME

Switching micro-resonant structures by modulating a beam of charged particles

Use of a focusing vortex lens as the objective in spiral phase contrast microscopy

Illumination system particularly for microlithography

Fresnel zone plate and x-ray microscope using the fresnel zone plate

HIGHLY COLLIMATED AND TEMPORALLY VARIABLE X-RAY BEAMS

Optical component having an improved transient thermal behavior and method for improving the transient thermal behavior of an optical component

ILLUMINATION SYSTEM PARTICULARLY FOR MICROLITHOGRAPHY

MULTILAYER OPTIC DEVICE AND SYSTEM AND METHOD FOR MAKING SAME

X-ray lens assembly and X-ray device incorporating said assembly

X-Ray or neutron monochromator

Device for and method of fastening an emitter

Cleaning apparatus for exposure apparatus and exposure apparatus

Sagittal focusing Laue monochromator

Method for X-ray wavelength measurement and X-ray wavelength measurement apparatus

ILLUMINATION SYSTEM WITH VARIABLE ADJUSTMENT OF THE ILLUMINATION

High aspect-ratio X-ray diffractive structure stabilization methods and systems

MULTILAYER OPTIC DEVICE AND SYSTEM AND METHOD FOR MAKING SAME

Multilayer optic device and system and method for making same

Device for improving the resolution capability of an x-ray optical apparatus

Methods to manufacture contaminant-gettering materials in the surface of EUV optics

System, method and apparatus for RF directed energy

Illumination system particularly for microlithography

Extreme UV radiation focusing mirror and extreme UV radiation source device

X-ray focusing optic having multiple layers with respective crystal orientations

Laser scanning apparatus and method using diffractive optical elements

Collector mirror exchanging apparatus and method for extreme ultraviolet light source apparatus

High-Precision Optical Surface Prepared by Sagging from a Masterpiece

Two-stage x-ray concentrator

Particle optics and waveguide apparatus

X-ray optical system

ATOMIC REFLECTION OPTICAL ELEMENT

Reflective optical illumination collector

Micro beam collimator for high resolution XRD investigations with conventional diffractometers

Collector with fastening devices for fastening mirror shells

X-ray transmissive optical mirror apparatus

Collector for an illumination system

Collector configured of mirror shells

Apparatus system, and method for high flux, compact compton x-ray source

Hybrid transmission-reflection grating

Method of providing a shaped body made of glass or glass ceramics

Illumination system

X-ray generating method and x-ray generating apparatus

Systems and methods for reducing the influence of plasma-generated debris on the internal components of an EUV light source

Focus-detector arrangement with X-ray optical grating for phase contrast measurement

Focus-detector arrangement of an X-ray apparatus for generating projective or tomographic phase contrast recordings

Focus-detector arrangement for generating projective or tomographic phase contrast recordings with X-ray optical gratings

Focus/detector system of an x-ray apparatus for generating phase contrast recordings

X-ray optical transmission grating of a focus-detector arrangement of an X-ray apparatus for generating projective or tomographic phase contrast recordings of a subject

X-ray CT system for producing projective and tomographic phase contrast images

Method and CT system for detecting and differentiating plaque in vessel structures of a patient

Fast particle generating apparatus

Soft x-ray processing device and soft x-ray processing method

Multiple wavelength X-ray source

Switching micro-resonant structures using at least one director

X-ray optical element

Illumination system particularly for microlithography

Liquid cooled mirror for use in extreme ultraviolet lithography

Superconductor-based modulator for extreme ultraviolet (EUV)

Illumination system for microlithography

Method for preventing contamination and lithographic device

Optical systems that correct optical irregularities, and projection-exposure systems and methods comprising same

X-ray generator for an x-ray apparatus with x-ray lens module

Lobster eye X-ray imaging system and method of fabrication thereof

Curved X-ray reflector

Discharge produced plasma EUV light source

X-ray beam conditioning device and X-ray analysis apparatus

Collector with fastening devices for fastening mirror shells

Refractive x-ray element

Illumination system particularly for microlithography

X-ray tube

Illumination system particularly for microlithography

Apparatus for controlling neutron beam and method for manufacturing the same

Methods to manufacture contaminant-gettering materials in the surface of EUV optics

Illumination system particularly for microlithography

Mesostructured film, mesoporous material film, and production methods for the same

Method and device for cooling and electrically insulating a high voltage, heat-generating component such as an x-ray tube for analyzing fluid streams

ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

X-ray focusing device

X-ray fluorescence analyzer

Device for and method of fastening an emitter

Spectral purity filter, lithographic apparatus including such a spectral purity filter, device manufacturing method, and device manufactured thereby

Optical element, lithographic apparatus including such an optical element, device manufacturing method, and device manufactured thereby

Metal film and metal film-coated member, metal oxide film and metal oxide film-coated member, thin film forming apparatus and thin film forming method for producing metal film and metal oxide film

Metal film and metal film-coated member, metal oxide film and metal oxide film-coated member, thin film forming apparatus and thin film forming method for producing metal film and metal oxide film

Metal film and metal film-coated member, metal oxide film and metal oxide film-coated member, thin film forming apparatus and thin film forming method for producing metal film and metal oxide film

X-ray needle apparatus and method for radiation treatment

Method for manufacturing a reflector for X-ray radiation

X-ray lens

Systems and methods for cleaning a chamber window of an EUV light source

Collector having unused region for illumination systems using a wavelength ≦193 nm

Optical component having an improved transient thermal behavior and method for improving the transient thermal behavior of an optical component

Thermal casting of polymers in centrifuge for producing X-ray optics

Optical device

Deformable system comprising a parallelepiped-shaped part and an actuator

Optical imaging device designs for solar-powered flight and powergeneration

Optical device for X-ray applications

Mirror for exposure system, reflection mask for exposure system, exposure system and pattern formation method

Optics for extreme ultraviolet lithography

In-situ cleaning of light source collector optics

X-ray imaging system and imaging method

Grazing incidence mirror, lithographic apparatus including a grazing incidence mirror, method for providing a grazing incidence mirror, method for enhancing EUV reflection of a grazing incidence mirror, device manufacturing method and device manufactured thereby

Apparatus, system, and method for optical pulse gain enhancement for high-finesse external cavity

Systems and methods for reducing the influence of plasma-generated debris on the internal components of an EUV light source

Lithographic apparatus, device manufacturing method and radiation system

Apparatus, system, and method for generating phase-locked harmonic RF source from an optical pulse train

Apparatus, system, and method for frequency stabilized mode-locked laser

Lithographic apparatus, device manufacturing method and radiation system

Mask device for photolithography and application thereof

Technique to prevent tin contamination of mirrors and electrodes in an EUV lithography system

X-ray transmissive optical mirror apparatus

Design for realizing an online element analysis

Apparatus, system, and method for high flux, compact compton x-ray source

X-ray image magnifying device

Optical device for directing x-rays having a plurality of optical crystals

Optical component, comprising a material with a predetermined homogeneity of thermal expansion

Optical reflector element, its method of fabrication, and an optical instrument implementing such elements

EUV light spectrum measuring apparatus and calculating method of EUV light intensity

High Spatial Resolution X-ray and Gamma Ray Imaging System Using Crystal Diffraction Lenses

Neutron-optical component array for the specific spectral shaping of neutron beams or pulses

Elastomer spatial light modulators for extreme ultraviolet lithography

Tailorable CT-detector assembly

Device and method for producing a spatially uniformly intense source of x-rays

Optical unit and associated method

Mirror for use in a lithographic apparatus, lithographic apparatus, device manufacturing method, and device manufactured thereby

Lithographic apparatus and device manufacturing method

Collector unit with a reflective element for illumination systems with a wavelength of smaller than 193 nm

Hybrid optical component for x ray applications and method associated therewith

Illumination system particularly for microlithography

Reflection mirror apparatus, exposure apparatus and device manufacturing method

X-ray zoom lens

X-ray illumination optical system and X-ray reduction exposure apparatus

Beam conditioning system

Mirror, lithographic apparatus, device manufacturing method, and device manufactured thereby

Multi-mirror laser sustained plasma light source

Energy beam propulsion system

Multi-cone x-ray imaging Bragg crystal spectrometer

Compact spectrometer focusing apparatus

High energy beam diffraction material treatment system

Neutron beam diffraction material treatment system