200539 ⎘
Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
Sub-classes:MEDICAL SYSTEMS, ANTI-SCATTER GRIDS AND METHODS OF MANUFACTURING ANTI-SCATTER GRIDS
#2EUV RADIATION SOURCE APPARATUS FOR LITHOGRAPHY
#3ULTRA-HIGH-VACUUM CELL WITH INTEGRATED META-OPTICS
#4ELECTRON BEAM DEFLECTOR
#5REFLECTOR FOR GENERATING NEUTRAL BEAMS AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME
#6NEW DESIGN OF EUV VESSEL PERIMETER FLOW AUTO ADJUSTMENT
#7SIGNAL MANIPULATION ELEMENTS INTEGRATED WITH WINDOW PLATE FOR OPTICAL FEEDTHROUGH TO VACUUM
#8ACCELERATOR-DRIVENNEUTRON ACTIVATOR FOR BACHYTHERAPY
#9EUV LITHOGRAPHY APPARATUS
#10SYSTEMS AND METHODS FOR ASSEMBLING ELECTRON SPIN AND CHARGE TO POSSESS PROPERTIES OF A MAGNETIC MONOPOLE
#11X-ray detector system with at least two stacked flat Bragg diffractors
#12STRUCTURES FOR PATTERNING SUBSTRATES AND METHODS AND SYSTEMS FOR THEIR MANUFACTURE
#13STRUCTURED WAVE GENERATOR AND DEVICE FOR DIFFRACTING A NEUTRON BEAM INTO A STRUCTURED WAVE
#14Device and Method for Generating Optical Tweezers
#15EXTREME ULTRAVIOLET LIGHT GENERATION CHAMBER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD
#16EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE
#17System and method for bending crystal wafers for use in high resolution analyzers
#18METHOD AND SWAPPING TOOL
#19Device for EUV light source
#20EUV vessel perimeter flow auto adjustment
#21Neutral atom quantum information processor
#22Target supply system, extreme ultraviolet light generation apparatus, and electronic device manufacturing method
#23Radiation source apparatus and method for using the same
#24Extreme ultraviolet light generation apparatus and electronic device manufacturing method
#25METHOD FOR PRODUCING AN OPTICAL ELEMENT, OPTICAL ELEMENT, DEVICE FOR PRODUCING AN OPTICAL ELEMENT, SECONDARY GAS AND PROJECTION EXPOSURE SYSTEM
#26STEPPING STRATEGY FOR DEFECT COMPENSATION IN DAX IMAGING
#27Focusing grating devices with large aspect ratio
#28EUV lithography apparatus
#29Target debris collection device and extreme ultraviolet light source apparatus including the same
#30Optical system for generating arbitrary-order optical vortex arrays and finite optical lattices with defects
#31ULTRA-HIGH-VACUUM CELL WITH INTEGRATED META-OPTICS
#32EUV lithography apparatus
#33EUV vessel perimeter flow auto adjustment
#34Integrated X-ray optics design
#35METHOD AND MECHANICAL DESIGN OF A FLEXURE INTERFACE FOR ULTRA-HIGH-VACUUM NANOPOSITIONING INVAR BASE NEAR-ZERO-LENGTH FEEDTHROUGH
#36X-RAY APPARATUS
#37EUV RADIATION SOURCE APPARATUS FOR LITHOGRAPHY
#38Counterflow gas nozzle for contamination mitigation in extreme ultraviolet inspection systems
#39X-ray device having multiple beam paths
#40Radiation source apparatus and method for using the same
#41X-ray optical arrangement
#42EUV LIGHT SOURCE AND APPARATUS FOR LITHOGRAPHY
#43Ion trap loading assembly
#44Neutral atom quantum information processor
#45METHOD OF MAKING COMPOSITE ARTICLES FROM SILICON CARBIDE
#46Dispersive element
#47STABILIZED GRATING STRUCTURES
#48Droplet accelerating assembly and extreme ultra-violet lithography apparatus including the same
#49Extreme ultraviolet light generation system and electronic device manufacturing method
#50Enrichment and separation of isotopes, isotopologues, or other chemical species, via differential embedding in a capture matrix
#51Target debris collection device and extreme ultraviolet light source apparatus including the same
#52Extreme ultraviolet light generation system and electronic device manufacturing method
#53Extreme ultraviolet light generation apparatus and electronic device manufacturing method
#54Instrument for moving and positioning of optical elements with nanometric mechanical stabiling and resolution in synchrotron light source beamlines
#55X-RAY GENERATING APPARATUS FOR PHASE IMAGING
#56Reflector and method of manufacturing a reflector
#57Light generator including debris shielding assembly, photolithographic apparatus including the light generator
#58Off-axis capillary x-ray optics
#59Method for in situ protection of an aluminum layer and optical arrangement for the VUV wavelength range
#60Chamber device, extreme ultraviolet light generation apparatus, and electronic device manufacturing method
#61X-ray fluorescence analyzer, and a method for performing X-ray fluorescence analysis
#62X-ray fluorescence analyzer with a plurality of measurement channels, and a method for performing x-ray fluorescence analysis
#63X-ray fluorescence analyzer and a method for performing an x-ray fluorescence analysis
#64X-ray mirror optics with multiple hyperboloidal/hyperbolic surface profiles
#65Extreme ultraviolet light generation apparatus and electronic device manufacturing method
#66System and method for vacuum ultraviolet lamp assisted ignition of oxygen-containing laser sustained plasma sources
#67Phase contrast X-ray interferometry
#68Diffraction grating for X-ray phase contrast and/or dark-field imaging
#69Target debris collection device and extreme ultraviolet light source apparatus including the same
#70Hard X-ray photoelectron spectroscopy system
#71Method for exposing wafer
#72Device and method for phase stepping in phase contrast image acquisition
#73DEVICE AND METHOD FOR ANODIZED OXIDATION OF AN ANODE ELEMENT FOR A CURVED X-RAY GRATING, SYSTEM FOR PRODUCING A CURVED X-RAY GRATING AND CURVED X-RAY GRATING
#74ANALYSIS METHOD, LIQUID CHEMICAL, AND METHOD FOR PRODUCING LIQUID CHEMICAL
#75X-ray phase imaging apparatus
#76Extreme ultraviolet chamber apparatus, extreme ultraviolet light generation system, and method for manufacturing electronic device
#77Testing of curved X-ray gratings
#78X-ray analysis apparatus
#79Neutral atom quantum information processor
#80Separation of isotopes in space and time by gas-surface atomic diffraction
#81Accelerator-driven neutron activator for brachytherapy
#82Method and apparatus for determining a radiation beam intensity profile
#83Flexible aperture x-ray inspection
#84Apparatus and method for generating extreme ultraviolet radiation
#85Extreme ultraviolet light generation apparatus
#86Lithography system and method for exposing wafer
#87EUV radiation source for lithography exposure process
#88Apparatus and method for prevention of contamination on collector of extreme ultraviolet light source
#89Method of making composite articles from silicon carbide
#90Robust and precise synchronization of microwave oscillators to a laser oscillator in pulsed electron beam devices
#91EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE
#92Radial lithographic source homogenizer
#93EUV light source and apparatus for lithography
#94Reflector and method of manufacturing a reflector
#95Light generator including debris shielding assembly, photolithographic apparatus including the light generator, and method of manufacturing integrated circuit device using the photolithographic apparatus
#96Interferometer grating support for grating-based x-ray imaging and/or a support bracket therefor
#97Method for producing a microstructure component, microstructure component and x-ray device
#98Method for producing a microstructure component, microstructure component and x-ray device
#99Metrology methods, radiation source, metrology apparatus and device manufacturing method
#100X-ray inspecting device, X-ray thin film inspecting method, and method for measuring rocking curve
#101Source grating for X-ray imaging
#102X-ray detection apparatus and x-ray detection method
#103Optical module with an anticollision device for module components
#104X-ray source using electron impact excitation of high velocity liquid metal beam
#105X-ray imaging system
#106REFLECTOR
#107X-ray spectrometer system
#108Soller slit, X-ray diffraction apparatus, and method
#109Extreme UV light generation device
#110Irradiator apparatus and system and method for irradiating a sample using x-rays
#111Electroplated Au for conformal coating of high aspect ratio silicon structures
#112Radiation phase contrast imaging device
#113Laser driven lamp
#114High power broadband illumination source
#115Phase contrast X-ray interferometry
#116Extreme ultraviolet light sensor unit and extreme ultraviolet light generation device
#117LASER-DRIVEN LIGHT SOURCE DEVICE
#118Methods for aligning a spectrometer
#119Method of performing X-ray spectroscopy and X-ray absorption spectrometer system
#120Radiation-phase-contrast imaging device
#121X-ray Talbot capturing apparatus
#122SCINTILLATOR-BASED NEUTRON AND GAMMA-RAY DOSIMETER
#123X-ray phase imaging apparatus
#124X-ray phase contrast imaging with fourier transform determination of grating displacement
#125FOCUSSING OF GRATINGS FOR DIFFERENTIAL PHASE CONTRAST IMAGING BY MEANS OF ELECTRO-MECHANIC TRANSDUCER FOILS
#126X-ray microscope
#127Omnidirectional scattering- and bidirectional phase-sensitivity with single shot grating interferometry
#128Method of producing diffraction grating
#129Extreme ultraviolet light generating device
#130Extreme ultraviolet light generating apparatus
#131Metrology methods, radiation source, metrology apparatus and device manufacturing method
#132Beam splitters
#133Process for producing molded material, molded material, wavefront control element and diffraction grating
#134Grating and radiation imaging device
#135Wavefront correction element for use in an optical system
#136Methods for manufacturing doubly bent X-ray focusing device, doubly bent X-ray focusing device assembly, doubly bent X-ray spectroscopic device and doubly bent X-ray spectroscopic device assembly
#137Device for suspending an x-ray grid, arrangement with an x-ray grid and method for operating an x-ray grid
#138Apparatus for movably suspending an x-ray grid, arrangement with an x-ray grid and method for operating an x-ray grid
#139X-ray transmission spectrometer system
#140Radiation source and lithographic apparatus
#141Beam dump apparatus, laser apparatus equipped with the beam dump apparatus, and extreme ultraviolet light generating apparatus
#142Apparatus, system and method for reducing radiation scatter in an imaging system
#143Grazing incidence x-ray fluorescence spectrometer and grazing incidence x-ray fluorescence analyzing method
#144Radiation capturing system
#145High-aspect ratio structure production method, ultrasonic probe production method using same, and high-aspect ratio structure
#146Batch-processing method for super-high aspect ratio diffractive optics
#147Extreme ultraviolet light generation apparatus
#148Grating device for an X-ray imaging device
#149Charged particle beam device, optical device, irradiation method, diffraction grating system, and diffraction grating
#150X-ray diffractometer with multilayer reflection-type monochromator
#151Ray calibration device and operating method thereof, and radiation imaging system and operating method thereof
#152X-ray optics assembly with switching system for three beam paths, and associated X-ray diffractometer
#153Method of adjusting the primary side of an X-ray diffractometer
#154X-ray diffractive grating and X-ray Talbot interferometer
#155Support structure and highly aligned monochromatic X-ray optics for X-ray analysis engines and analyzers
#156Mechanical design of thin-film diamond crystal mounting apparatus with optimized thermal contact and crystal strain for coherence preservation x-ray optics
#157Positive/negative phase shift bimetallic zone plate
#158X-ray talbot interferometer
#159Image processing apparatus, imaging system, and image processing method
#160Beam generation unit and X-ray small-angle scattering apparatus
#161Illumination and imaging device for high-resolution X-ray microscopy with high photon energy
#162X-ray interferometer
#163Diverging X-ray sources using linear accumulation
#164X-ray talbot capturing apparatus
#165Coherent electron and radiation production using transverse spatial modulation and axial transfer
#166Metal grating structure for X-ray
#167Methods and systems for imaging bulk motional velocities in plasmas
#168X-ray sources using linear accumulation
#169Photon count-based radiation imaging system, method and device thereof
#170Curved grating structure manufacturing method, curved grating structure, grating unit, and x-ray imaging device
#171Talbot effect based nearfield diffraction for spectral filtering
#172XRF SYSTEM HAVING MULTIPLE EXCITATION ENERGY BANDS IN HIGHLY ALIGNED PACKAGE
#173Phase contrast X-ray imaging device and phase grating therefor
#174Non-destructive inspection device
#175Metal grating for X-rays, production method for metal grating for X-rays, metal grating unit for X-rays, and X-ray imaging device
#176X-Ray Metal Grating Structure Manufacturing Method And X-Ray Imaging Device
#177Beam guiding apparatus
#178Collector
#179Microstructure manufacturing method
#180Pillar Based Amorphous and Polycrystalline Photoconductors for X-ray Image Sensors
#181Correction in slit-scanning phase contrast imaging
#182Optical hollow waveguide assembly
#183X-ray source
#184Zone Plate and Method for Fabricating Same Using Conformal Coating
#185Radiological image capturing apparatus and radiological image capturing system
#186X-ray apparatus with deflectable electron beam
#187High aspect ratio dense pattern-programmable nanostructures utilizing metal assisted chemical etching
#188X-ray source
#189Device for spatially orienting an X-ray optical unit and apparatus having such a device
#190High brightness X-ray absorption spectroscopy system
#191Mechanical design of multiple zone plates precision alignment apparatus for hard X-ray focusing in twenty-nanometer scale
#192Systems and methods for x-ray phase contrast imaging using arrays of x-ray focusing elements
#193Radiation source and lithographic apparatus
#194Optical device and method of in situ treating an EUV optical component to enhance a reduced reflectivity
#195LIGHT EMITTING DIODE DIGITAL MICROMIRROR DEVICE ILLUMINATOR
#196X-ray shield grating and X-ray talbot interferometer including X-ray shield grating
#197Object information obtaining apparatus, program, and imaging system
#198X-ray computed tomography apparatus, medical image processing apparatus and medical image processing method
#199Interferometric dynamic-grating imaging method, diffraction grating and imaging apparatus
#200Differential phase contrast imaging device with movable grating(s)
#201XRF system having multiple excitation energy bands in highly aligned package
#202Device for electromagnetic wave cloaking
#203X-ray surface analysis and measurement apparatus
#204X-ray source assembly
#205X-ray analyzing apparatus and method
#206X-ray illuminators with high flux and high flux density
#207Imaging apparatus using talbot interference and adjusting method for imaging apparatus
#208EUV light source for generating a usable output beam for a projection exposure apparatus
#209X-ray sources using linear accumulation
#210X-ray optical component device and X-ray analyzer
#211Illumination optical unit
#212Methods and systems for fabricating platelets of a monochromator for X-ray photoelectron spectroscopy
#213Radiological image capturing apparatus and radiological image capturing system
#214Apparatus for amplifying intensity during transmission small angle—X-ray scattering measurements
#215X-ray radiography system for differential phase contrast imaging of an object under investigation using phase-stepping
#216SOURCE GRATING, INTERFEROMETER, AND OBJECT INFORMATION ACQUISITION SYSTEM
#217Method of producing a Fresnel Zone Plate for applications in high energy radiation
#218SWITCHING MICRO-RESONANT STRUCTURES BY MODULATING A BEAM OF CHARGED PARTICLES
#219X RAY WAVEGUIDE SYSTEM
#220Diffraction leveraged modulation of X-ray pulses using MEMS-based X-ray optics
#221SUPPORT STRUCTURE AND HIGHLY ALIGNED MONOCHROMATING X-RAY OPTICS FOR X-RAY ANALYSIS ENGINES AND ANALYZERS
#222X-ray diffraction apparatus and method
#223Device and method for creating Gaussian aberration-corrected electron beams
#224X-ray imaging
#225Zone plate having annular or spiral shape and Y-shaped branching edge dislocation
#226Multilayer X-ray source target with high thermal conductivity
#227Spectral grating-based differential phase contrast system for medical radiographic imaging
#228Laboratory diffraction-based phase contrast imaging technique
#229Structure, method for manufacturing the same, and image pickup apparatus including the structure
#230Stacked zone plates for pitch frequency multiplication
#231Method for X-ray phase contrast and dark-field imaging using an arrangement of gratings in planar geometry
#232XRF system having multiple excitation energy bands in highly aligned package
#233Arrangement and method for inverse X-ray phase contrast imaging
#234Method for producing structure
#235Radiation source, lithographic apparatus and device manufacturing method
#236Differential phase-contrast imaging with focussing deflection structure plates
#237Differential phase-contrast imaging with increased dynamic range
#238X-ray imaging apparatus and X-ray imaging method
#239X-ray beam conditioning
#240Method for manufacturing metal grating structure, metal grating structure manufactured by the method, and X-ray imaging device using the metal grating structure
#241Spectroscopic apparatus
#242X-ray optical apparatus and adjusting method thereof
#243X-ray apparatus and its adjusting method
#244Radiation imaging apparatus
#245X-ray optical apparatus
#246Collector mirror exchanging apparatus and method for extreme ultraviolet light source apparatus
#247Differential phase-contrast imaging
#248Differential phase-contrast imaging
#249X-RAY CONTROL UNIT USING MONOCRYSTALLINE MATERIAL
#250Imaging apparatus using talbot interference and adjusting method for imaging apparatus
#251Radiological image capturing apparatus and radiological image capturing system
#252System for X-ray irradiation of target volume
#253Substrate for mirrors for EUV lithography
#254METHOD OF MANUFACTURING PATTERNED X-RAY OPTICAL ELEMENTS
#255X-ray waveguide
#256Gratings for X-ray imaging, consisting of at least two materials
#257Silicon focusing mirror system
#258Development of a double crystal monochromator
#259Method for characterization of a spherically bent crystal for Kα X-ray imaging of laser plasmas using a focusing monochromator geometry
#260X-ray apparatus and X-ray measuring method
#261X-RAY INTERFEROMETER
#262Method for spatially modulating X-ray pulses using MEMS-based X-ray optics
#263System and method for characterizing a film by X-ray photoelectron and low-energy X-ray fluorescence spectroscopy
#264Optical device for analyzing a specimen by the scattering of an X-ray beam and associated collimation device and collimator
#265X-ray waveguide
#266High Aspect Ratio Grid for Phase Contrast X-ray Imaging and Method of Making the Same
#267X-RAY WAVEGUIDE AND X-RAY WAVEGUIDE SYSTEM
#268High Aspect Ratio Grid for Phase Contrast X-ray Imaging and Method of Making the Same
#269X-ray imaging apparatus
#270MIRROR, MIRROR DEVICE, LASER APPARATUS, AND EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
#271X-ray irradiation device and analysis device
#272Reflective surface shape controllable mirror device, and method for manufacturing reflective surface shape controllable mirror
#273Optical collector for collecting extreme ultraviolet radiation, method for operating such an optical collector, and EUV source with such a collector
#274X-RAY MIRROR, METHOD OF PRODUCING THE MIRROR, AND X-RAY APPARATUS
#275Grid for radiation imaging and method for producing the same
#276Radiation imaging system
#277Phase controller
#278Confocal double crystal monochromator
#279X-ray imaging apparatus and wavefront measuring apparatus
#280X-ray imaging apparatus
#281Method and apparatus for producing a Fresnel zone plate
#282Nanotube based device for guiding X-ray photons and neutrons
#283Non-parallel grating arrangement with on-the-fly phase stepping, X-ray system
#284Structure, method of manufacturing the same, and imaging apparatus
#285Imaging apparatus and imaging method
#286Method for assembling a mirror plate stack
#287RADIATION IMAGE CAPTURING APPARATUS AND RADIATION IMAGE DETECTOR
#288Illumination optical unit for microlithography
#289GRID FOR USE IN RADIATION IMAGING, METHOD FOR PRODUCING THE SAME, AND RADIATION IMAGING SYSTEM
#290SPECTRAL PURITY FILTER, LITHOGRAPHIC APPARATUS, AND METHOD FOR MANUFACTURING A SPECTRAL PURITY FILTER
#291Point-line converter
#292GRID FOR RADIOGRAPHY AND MANUFACTURING METHOD THEREOF, AND RADIATION IMAGING SYSTEM
#293Compact mammograph and associated mammography process
#294RADIATION TUBE AND RADIATION IMAGING SYSTEM
#295Diffractometer
#296Zone plate
#297Correction method for differential phase contrast imaging
#298High heat load optics with a liquid metal interface for use in an extreme ultraviolet lithography system
#299Imaging apparatus
#300Two-axis sagittal focusing monochromator