Interferometer for x-ray phase contrast imaging

Microscopic system for testing structures and defects on EUV lithography photomasks

Method for producing a multilayer Laue lens

Nanopatterned electron beams for temporal coherence and deterministic phase control of x-ray free-electron lasers

Electron diffraction intensity from single crystal silicon in a photoinjector

Metal X-ray grid, X-ray imaging device, and production method for metal X-ray grid

Semiconductor apparatus and method of operating the same

System and method for x-ray fluorescence with filtering

X-ray apparatus including x-ray reflector and method for operating the x-ray apparatus

EUV exposure apparatus with reflective elements having reduced influence of temperature variation

X-ray generator and x-ray analysis device

Multilayer mirror for reflecting EUV radiation and method for producing the same

Reticles for lithography

EUV exposure apparatus with reflective elements having reduced influence of temperature variation

Graphene spectral purity filter

Reflective mirror, projection optical system, exposure apparatus, and device manufacturing method

Methods for manufacturing doubly bent X-ray focusing device, doubly bent X-ray focusing device assembly, doubly bent X-ray spectroscopic device and doubly bent X-ray spectroscopic device assembly

EUV exposure apparatus with reflective elements having reduced influence of temperature variation

Reflective mirror, projection optical system, exposure apparatus, and device manufacturing method

X-ray optics assembly with switching system for three beam paths, and associated X-ray diffractometer

Pellicle for reticle and multilayer mirror

Multilayer mirror

EUV exposure apparatus with reflective elements having reduced influence of temperature variation

Structure, method for manufacturing the same, and talbot interferometer

High brightness X-ray absorption spectroscopy system

X-ray surface analysis and measurement apparatus

Reflective mirror, projection optical system, exposure apparatus, and device manufacturing method

Color x-ray histology for multi-stained biologic sample

Multilayer mirror, method of producing a multilayer mirror and lithographic apparatus

Collector

Pellicle for reticle and multilayer mirror

Lithographic apparatus, spectral purity filter and device manufacturing method

Grazing incidence reflectors, lithographic apparatus, methods for manufacturing a grazing incidence reflector and methods for manufacturing a device

Deflection mirror and projection exposure apparatus for microlithography comprising such a deflection mirror

Mirror, projection objective with such mirror, and projection exposure apparatus for microlithography with such projection objective

Method for manufacturing X-ray/γ-ray focusing optical system using atomic layer deposition

X-RAY WAVEGUIDE AND X-RAY WAVEGUIDE SYSTEM

X-RAY WAVEGUIDE

X-ray waveguide

EUV exposure apparatus with reflective elements having reduced influence of temperature variation

Lithographic apparatus and method

APPARATUS FOR ALIGNMENT OF MULTILAYER FILM MIRRORS FOR MONOCHROMATIC X-RAY GENERATOR AND X-RAY IMAGE DETECTING METHOD USING THE SAME

LITHOGRAPHIC APPARATUS AND SPECTRAL PURITY FILTER

Optical collector for collecting extreme ultraviolet radiation, method for operating such an optical collector, and EUV source with such a collector

X-RAY MIRROR, METHOD OF PRODUCING THE MIRROR, AND X-RAY APPARATUS

Multilayer mirror and lithographic apparatus

MULTILAYER METALLIC ELECTRODES FOR OPTOELECTRONICS

Semiconductor exposure device using extreme ultra violet radiation

REFLECTIVE OPTICAL ELEMENT AND METHOD FOR OPERATING AN EUV LITHOGRAPHY APPARATUS

Nanotube based device for guiding X-ray photons and neutrons

Optical member for EUV lithography, and process for production of reflective layer-equipped substrate

Compact mammograph and associated mammography process

Projection objective and projection exposure apparatus with negative back focus of the entry pupil

Source-collector module with GIC mirror and xenon ice EUV LPP target system

Method of measuring aerial image of EUV mask

X-ray waveguide

X-ray radiator to generate quasi-monochromatic x-ray radiation, and radiography x-ray acquisition system employing same

X-ray dark-field imaging system and method

X-RAY GENERATOR WITH POLYCAPILLARY OPTIC

LOW-EMISSIVITY STRUCTURES

Device for providing a high energy X-ray beam

Method and lithography device with a mask reflecting light

High flux photon beams using optic devices

EUV light source components and methods for producing, using and refurbishing same

Multi-beam X-ray system

Source-collector module with GIC mirror and LPP EUV light source

Spectral purity filter, lithographic apparatus, and method for manufacturing a spectral purity filter

Extreme UV radiation reflecting element comprising a sputter-resistant material

Multiconfiguration X-ray optical system

Radiation Collector

Projection objective and projection exposure apparatus with negative back focus of the entry pupil

Short working distance spectrometer and associated devices, systems, and methods

Apparatus for measuring aerial image of EUV mask

RADIATION SYSTEM AND METHOD, AND A SPECTRAL PURITY FILTER

Grazing incidence collector for laser produced plasma sources

LITHOGRAPHIC RADIATION SOURCE, COLLECTOR, APPARATUS AND METHOD

X-ray diffraction method and X-ray diffraction apparatus

APERIODIC MULTILAYER STRUCTURES

METHOD FOR PRODUCING AN OPTICAL ELEMENT THROUGH A MOLDING PROCESS, OPTICAL ELEMENT PRODUCED ACCORDING TO THE METHOD, COLLECTOR, AND LIGHTING SYSTEM

Procedure of Manufacturing a Neutron-Guiding Flat Surface

Ultra-high density diffraction grating

High intensity x-ray beam system

X-ray generator with polycapillary optic

Masks, lithography device and semiconductor component

Semiconductor exposure device using extreme ultra violet radiation

Optical arrangement, in particular projection exposure apparatus for EUV lithography, as well as reflective optical element with reduced contamination

Highly aligned x-ray optic and source assembly for precision x-ray analysis applications

X-ray imaging systems employing point-focusing, curved monochromating optics

Illumination system for a microlithography projection exposure apparatus

Method of manufacturing photomask

Monochromatic x-ray micro beam for trace element mapping

EUV light source components and methods for producing, using and refurbishing same

Multi-energy imaging system and method using optic devices

X-ray imaging system and methods of using and forming an array of optic devices therein

Thermally stable multilayer mirror for the EUV spectral range

Method and apparatus for X-ray fluorescence analysis and detection

EUV illumination system having a folding geometry

Optical arrangement and EUV lithography device with at least one heated optical element, operating methods, and methods for cleaning as well as for providing an optical element

Method of making and structure of multilayer laue lens for focusing hard x-rays

Illumination system particularly for microlithography

Laser scanning apparatus and method using diffractive optical elements

METHOD AND APPARATUS FOR INCREASING X-RAY FLUX AND BRIGHTNESS OF A ROTATING ANODE X-RAY SOURCE

Apparatus and method for exposing a substrate to UV radiation using asymmetric reflectors

EUV light source

Ultra-small angle x-ray scattering measuring apparatus

NARROW BAND X-RAY SYSTEM AND FABRICATION METHOD THEREOF

Reflective photomask, method of fabricating the same, and reflective blank photomask

X-ray generating method and x-ray generating apparatus

Projection objective and projection exposure apparatus with negative back focus of the entry pupil

EUV light source

EUV light source

EUV light source

X-ray optical element

Illumination system particularly for microlithography

Masks, lithography device and semiconductor component

Polarized neutron guide

Electrostatic chuck with temperature sensing unit, exposure equipment having the same, and method of detecting temperature from photomask

Photomask providing uniform critical dimension on semiconductor device and method of manufacturing the same

Device for producing extreme UV radiation

Radiation image detection method and system

Systems and methods for EUV light source metrology

Apparatus for evaluating EUV light source, and evaluation method using the same

Alternative fuels for EUV light source

Beam conditioning system with sequential optic

Radiation image information detecting panel

Systems and methods for cleaning a chamber window of an EUV light source

Optical device for X-ray applications

Two-dimensional diffraction grating with alternate multilayered stacks and its process of manufacture, and spectroscopic devices including these gratings

Devices and methods for targeting interior cancers with ionizing radiation

EUV light source

Broadband telescope

Optical unit and associated method

Illumination system particularly for microlithography

Beam conditioning system

EUV illumination system having a folding geometry

Speckle-based imaging diffuser and method for controllably fabricating same