OPTICAL DEVICE FOR MANIPULATING AN ATOM OR AN OBJECT

Transmission small-angle X-ray scattering metrology system

Method for producing a microstructure component, microstructure component and x-ray device

Radiation phase contrast imaging device

Methods for aligning a spectrometer

Transmission small-angle X-ray scattering metrology system

Methods for manufacturing doubly bent X-ray focusing device, doubly bent X-ray focusing device assembly, doubly bent X-ray spectroscopic device and doubly bent X-ray spectroscopic device assembly

Droplet detector and extreme ultraviolet light generating apparatus

Ray calibration device and operating method thereof, and radiation imaging system and operating method thereof

Arrangement for transporting radicals

Arrangement and method for transporting radicals

Stacked zone plates for pitch frequency multiplication

Device for adjusting curvature of mirror while avoiding movement of central point of mirror, and mirror adjustment system comprising same

X-ray apparatus and X-ray measuring method

Optical device for analyzing a specimen by the scattering of an X-ray beam and associated collimation device and collimator

X-ray imaging apparatus

RADIATION DETECTION DEVICE, RADIOGRAPHIC APPARATUS AND RADIOGRAPHIC SYSTEM

Extreme ultraviolet light source and positioning method of light focusing optical means

Grid for radiation imaging and method for producing the same

Radiation imaging system

Ultrafast transient grating radiation to optical image converter

Non-parallel grating arrangement with on-the-fly phase stepping, X-ray system

Illumination optical unit for microlithography

Tilted gratings and method for production of tilted gratings

Source-collector module with GIC mirror and xenon liquid EUV LPP target system

Method and apparatus of precisely measuring intensity profile of X-ray nanobeam

X-ray imaging apparatus, X-ray imaging method, and X-ray imaging program

Compac X-ray source

COLLECTOR ASSEMBLY, RADIATION SOURCE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

Analysis method, radiation imaging apparatus using analysis method, and analysis program for executing analysis method

Radiation source

X-ray imaging apparatus, X-ray imaging method, and X-ray imaging program

Radiation phase image radiographing apparatus

High-resolution X-ray optic and method for constructing an X-ray optic

Scintillator panel and radiation detector

High intensity x-ray beam system

Focus detector arrangement and method for generating contrast x-ray images

Use of a focusing vortex lens as the objective in spiral phase contrast microscopy

Automated x-ray optic alignment with four-sector sensor

Schlieren-type radiography using a line source and focusing optics

Efficient EUV collector designs

Optical film, production method of optical film, polarizing plate and liquid crystal display device

Method and device for aligning an optical element

Systems and methods for reducing the influence of plasma-generated debris on the internal components of an EUV light source

Focus/detector system of an X-ray apparatus for generating phase contrast recordings

Lithographic apparatus comprising an electrical discharge generator and method for cleaning an element of a lithographic apparatus

Soft X-ray microscope

Illumination system with field mirrors for producing uniform scanning energy

Systems for protecting internal components of a EUV light source from plasma-generated debris

Facet mirrors and a method for producing mirror facets

Systems for protecting internal components of an EUV light source from plasma-generated debris

Gravitational wave propulsion

System for electrically connecting a mask to earth, a mask

Vacuum compatible, high-speed, 2-D mirror tilt stage

X-ray source assembly having enhanced output stability using tube power adjustments and remote calibration

Systems for protecting internal components of an EUV light source from plasma-generated debris

Efficient EUV collector designs

Metal film and metal film-coated member, metal oxide film and metal oxide film-coated member, thin film forming apparatus and thin film forming method for producing metal film and metal oxide film

Metal film and metal film-coated member, metal oxide film and metal oxide film-coated member, thin film forming apparatus and thin film forming method for producing metal film and metal oxide film

Metal film and metal film-coated member, metal oxide film and metal oxide film-coated member, thin film forming apparatus and thin film forming method for producing metal film and metal oxide film

Systems and methods for reducing the influence of plasma-generated debris on the internal components of an EUV light source

Illumination optical system and exposure apparatus

Illumination optical system and exposure apparatus

Method and apparatus for producing an image of the internal structure of an object

Compound x-ray lens having multiple aligned zone plates