201964 ⎘
Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes
Sub-classes:NOISE FILTER AND WIRE HARNESS
#2VACUUM CAPACITOR
#3REVERSE FORCE MECHANISM
#4VARIABLE CAPACITOR
#5Method for repeatable stepper motor homing
#6Coaxial variable capacitor
#7SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS USING THE SAME
#8MEMS structure-based adjustable capacitor
#93D-printable artificial muscles based on microfluidic microcapacitors
#10ELECTROSTATIC ENERGY GENERATOR USING A PARALLEL PLATE CAPACITOR
#11LINEAR ACTUATOR
#12MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) VARIABLE CAPACITOR APPARATUSES AND RELATED METHODS
#13Waterproof MEMS button device, input device comprising the MEMS button device and electronic apparatus
#14Sensor
#15Inertial sensor, electronic apparatus, and vehicle
#16Variable capacitor
#17Plate capacitor having a plate made of an elastic material
#18MICROELECTRONIC DEVICES DESIGNED WITH PACKAGE INTEGRATED VARIABLE CAPACITORS HAVING PIEZOELECTRIC ACTUATION
#19Production method of capacitor structure, capacitor structure, and sensor
#20Slew rate limiter systems, devices, and methods
#21Micro-electro-mechanical system (MEMS) variable capacitor apparatuses and related methods
#22Pressure detection sensor having a plurality of dielectric layers and a plurality of electrode layers with conductive paths and wiring portions
#23Laterally actuated amplified capacitive vapor sensor
#24Impedance matching device
#25BACTERIAL SPORE BASED ENERGY SYSTEM
#26Stress sensor
#27Tunable power amplifier with wide frequency range
#28Galvanic isolation coupling device
#29Capacitive logic cell
#30Flat adjustable capacitor for magnetic resonance scanner
#31Electromechanical variable-capacitance capacitor with four electrodes
#32Touch capacitance transduced energy harvesting system
#33Current handling in legs and anchors of RF-switch
#34MEMS RF-switch with controlled contact landing
#35Flexible control systems and methods for device arrays
#36Capacitive pressure sensor
#37Tunable shape memory capacitor and a method of preparation thereof
#38Sensor device and information processing device
#39NEMS devices with series ferroelectric negative capacitor
#40Capacitive RF MEMS intended for high-power applications
#41Strain capacitor energy storage devices and assemblies
#42Antenna having MEMS-tuned RF resonators
#43RF RESONATORS WITH TUNABLE CAPACITOR AND METHODS FOR FABRICATING THE SAME
#44Method of manufacturing a MEMS DVC device
#45Micro-electro-mechanical system (MEMS) variable capacitor apparatuses and related methods
#46Variable capacitor and method for manufacturing the same
#47Method of operating an integrated switchable capacitive device
#48MEMS electrostatic actuator device for RF varactor applications
#49Multilayer electronic component
#50Multilayer electronic component
#51Bacterial spore based energy system
#52Capacitor with negative capacitance
#53Internally generated DFT stepped hysteresis sweep for electrostatic MEMS
#54Electronic device and method of manufacturing the same
#55Trimmer Capacitor
#56ELECTRONIC DEVICE AND METHOD OF MANUFACTURING THE SAME
#57VARIABLE CAPACITANCE BANK DEVICE
#58Curved RF electrode for improved Cmax
#59Method for assembling force sensitive capacitor
#60Method of forming planar sacrificial material in a MEMS device
#61NEMS devices with series ferroelectric negative capacitor
#62Method of operating an integrated switchable capacitive device
#63DVC utilizing MEMS resistive switches and MIM capacitors
#64Stress control during processing of a MEMS digital variable capacitor (DVC)
#65Non-symmetric arrays of MEMS digital variable capacitor with uniform operating characteristics
#66SYSTEMS, DEVICES, AND METHODS TO REDUCE DIELECTRIC CHARGING IN MICRO-ELECTRO-MECHANICAL SYSTEMS DEVICES
#67METHOD OF CONTROLLING MEMS VARIABLE CAPACITOR AND INTEGRATED CIRCUIT DEVICE
#68Multi-phased MEMS plate lowering and lifting system and method
#69MEMS digital variable capacitor design with high linearity
#70Control-electrode shielding for improved linearity of a MEMS DVC device
#71Sensor device and information processing device
#72Integrated capacitively-coupled bias circuit for RF MEMS switches
#73Capacitive microelectronic and/or nanoelectronic device with increased compactness
#74Radio circuits and components thereof including temperature responsive liquid MEMS
#75Electronic device
#76Operating device for a vehicle component
#77MEMS structures and methods for forming the same
#78MEMS DEVICE
#79MEMS DEVICE
#80Capacitor circuit for a quasi-broadband doherty amplifier
#81Variable capacitor compromising MEMS devices for radio frequency applications
#82Pressure transducer with capacitively coupled source electrode
#83Membrane-based nano-electromechanical systems device and methods to make and use same
#84Method of manufacturing a motion sensor device
#85Variable capacitance circuit and impedance matching circuit
#86Transmission line filter with tunable capacitor
#87Tunable interdigitated capacitor
#88Method and system for adjusting electric field intensity
#89Electrostatic actuator, variable capacitance capacitor, electric switch, and method for driving electrostatic actuator
#90Membrane-based NANO-electromechanical systems device and methods to make and use same
#91Membrane-based nano-electromechanical systems device and methods to make and use same
#92Tunable MEMS capacitor
#93ELECTRONIC DEVICE
#94Microelectromechanical system with a micro-scale spring suspension system and methods for making the same
#95Capacitor and method of fabricating the same
#96Capacitor, MEMS device, and method of manufacturing the MEMS device
#97MEMS variable capacitor with enhanced RF performance
#98Integrated switchable capacitive device
#99Varactor and varactor system
#100MEMS device anchoring
#101MEMS device and manufacturing method thereof
#102Tunable capacitor
#103Actuator plate partitioning and control devices and methods
#104Stacked semiconductor device and method of forming the same
#105Fractal structures for MEMS variable capacitors
#106Fractal structures for fixed MEMS capacitors
#107Routing of MEMS variable capacitors for RF applications
#108Variable capacitance device
#109Micro-electro-mechanical system (MEMS) variable capacitor apparatuses and related methods
#110Electric equipment having movable portion, and its manufacture
#111Phase shifters and tuning elements
#112Apparatus and method of assembling an apparatus for sensing pressure
#113Thin film device and method for manufacturing thin film device
#114Radio circuits and components thereof including temperature responsive liquid MEMS
#115Liquid MEMS component and RF applications thereof
#116Quasi-broadband doherty amplifier with associated capacitor circuit
#117Variable capacitor
#118Method for fabricating a transducer apparatus
#119Electronic device
#120Electronic device having variable capacitance element and manufacture method thereof
#121MEMS lifetime enhancement
#122Micromechanical device
#123Bacterial spore based energy system
#124Electronic element, variable capacitor, micro switch, method for driving micro switch, and MEMS type electronic element
#125Electrically activatable integrated mechanical anti-rollback device with one or more positions
#126Capacitive transducer and a method for manufacturing a transducer
#127Variable capacitance device
#128Rotary capacitor
#129MEMS device and method of manufacturing the same
#130Variable capacitance device
#131MEMS variable capacitor
#132STORAGE CAPACITOR FOR ELECTROMECHANICAL SYSTEMS AND METHODS OF FORMING THE SAME
#133Method for manufacturing a high-capacitance RF MEMS switch
#134VARIABLE CAPACITANCE MEMS VARACTOR ARRAY METHOD & APPARATUS
#135VACUUM VARIABLE CAPACITOR
#136ELECTROMECHANICAL SYSTEMS VARIABLE CAPACITANCE DEVICE
#137MEMS structures and methods for forming the same
#138Motion sensor device and methods for forming the same
#139MEMS variable capacitor and method for driving the same
#140Method for manufacturing an electromechanical transducer
#141IMPLANTABLE DEVICE FOR DETECTING A VESSEL WALL EXPANSION
#142METAL THIN SHIELD ON ELECTRICAL DEVICE
#143Suspended beam for use in MEMS device
#144Systems and methods for current density optimization in CMOS-integrated MEMS capacitive devices
#145Method for reducing substrate charging
#146Method of manufacturing a capacitive transducer
#147SENSOR, KEYBOARD AND METHOD FOR MANUFACTURING SENSOR
#148MEMS devices exhibiting linear characteristics
#149Method and apparatus for mechanical energy harvesting using planar microfluidic device
#150Electroactive polymer manufacturing
#151Adjustable capacitor, plasma impedance matching device, plasma impedance matching method, and substrate treating apparatus
#152OXIDE MEMS BEAM
#153Charge-driven electrostatic inductance
#154Electrode device, pressure sensor and pressure meter
#155MEMS switch and communication device using the same
#156MEMS electrostatic actuator
#157MEMS devices
#158Methods of forming capacitive sensors
#159Systems and methods for providing high-capacitance RF MEMS switches
#160Variable capacitor and position indicator
#161Flexible dielectric variable capacitance system
#162HF-MEMS switch
#163Method for forming an electroactive polymer
#164Capacitive humidity detector with nanoporous hydrophilic dielectric
#165ELECTROACTIVE POLYMER MANUFACTURING
#166Electroactive polymer manufacturing
#167Two-terminal variable capacitance MEMS device
#168MEMS varactors
#169Variable capacitive element, variable capacitive device, and method for driving the variable capacitive element
#170Piezoelectric MEMS element, voltage control oscillator, communication apparatus, and method of manufacturing piezoelectric drive type MEMS element
#171MEMS device having a movable structure
#172MEMS device
#173Sensor device and information processing device
#174PROGRAMMABLE ACTUATOR AND PROGRAMMING METHOD THEREOF
#175Variable capacity element
#176Fabrication method of a flexible capacitive pressure sensor
#177MICRO-ELECTROMECHANICAL DEVICE AND METHOD FOR FABRICATING THE SAME
#178MEMS device and method of manufacturing the same
#179ELECTRICAL COMPONENT
#180Manufacturing a MEMS element having cantilever and cavity on a substrate
#181Tunable MEMS capacitor
#182SELF-SENSING DIELECTRIC ACTUATOR SYSTEM
#183Thin film based split resonator tunable metamaterial
#184Semiconductor integrated circuit
#185Micromechanical sensor having a variable capacitor and method for detecting electromagnetic radiation using same
#186Solar and thermal energy to electricity conversion
#187Polymer electrolyte, electrochemical device, and actuator element
#188Method for forming an electroactive polymer transducer
#189Reduction of air damping in MEMS device
#190Electromechanical actuators
#191Variable capacitor array, variable capacitor array device and circuit module
#192MEMS variable capacitor having a piezoelectric actuation mechanism based on a piezoelectric thin film
#193MEMS based RF components with vertical motion and parallel-plate structure and manufacture thereof using standard CMOS technologies
#194Variable capacitor, resonator and modulator
#195Capacitor Compensation Structure and Method for a Micro-Electro-Mechanical System
#196Electronic device
#197Electronic apparatus with a micro-electromechanical switch made of a piezoeletric material
#198Variable capacitor, matching circuit element, and mobile terminal apparatus
#199Actuator
#200Capacitive RF-MEMS device with integrated decoupling capacitor
#201Electronic element, variable capacitor, micro switch, method for driving micro switch, and MEMS type electronic element
#202Variable electric circuit component
#203MICROELECTROMECHANICAL CAPACITOR BASED DEVICE
#204Coulomb island and Faraday shield used to create adjustable Coulomb forces
#205Air variable capacitor comprising an interdigital mobile comb and fixed comb, accelerometer and gyrometer comprising such a capacitor
#206Electronic part and method of producing the same
#207ACTUATOR AND ELECTRONIC CIRCUIT BASED THEREON
#208Variable capacitance capacitor, method for producing the capacitor, and use of same
#209Semiconductor device and method of controlling electrostatic actuator
#210MEMS capacitor with conductively tethered moveable capacitor plate
#211Piezoelectric driven MEMS apparatus and portable terminal
#212Wireless pressure sensor and method for fabricating wireless pressure sensor for integration with an implantable device
#213Micro-electro-mechanical system varactor
#214Electroactive polymer pre-strain
#215Hermetic packaging and method of manufacture and use therefore
#216Method of manufacturing capacitive elements for a capacitive device
#217Electrostatic actuator with electrodes having varying distances at different portions
#218MEMS tunable device
#219Variable device circuit and method for manufacturing the same
#220Apparatus and method for drive controlling micro machine device
#221Movable micro-device
#222Device with optimised capacitive volume
#223Electroactive polymer electrodes
#224Variable-Capacity Capacitor Having A Specific Shape, Gyrometer Comprising One Such Capacitor And Accelerometer Comprising One Such Capacitor
#225Variable capacitor
#226Position indicator
#227Piezoelectric-driven MEMS device and method for manufacturing the same
#228Substrates with slotted metals and related methods
#229Electroactive polymer manufacturing
#230Spring structure for MEMS device
#231High isolation tunable MEMS capacitive switch
#232Method of fabricating a radio frequency (RF) microelectromechanical system (MEMS) asymmetrical switch
#233Monolithic capacitive transducer
#234Flexible electrostatic actuator
#235Minimal capacitance adjustable capacitor
#236Electret device and electrostatic operating apparatus
#237Electromechanical switch
#238Micro-electromechanical device
#239Capacitive pressure sensor and method therefor
#240Piezoelectric driven MEMS device
#241Method for fabricating a micro-electromechanical system switch
#242Apparatus and methods relating to electrically conductive path interfaces disposed within capacitor plate openings
#243Capacitance Type Mems Device, Manufacturing Method Thereof, And High Frequency Device
#244MEMS device using an actuator
#245Variable electrical circuit component
#246Microelectrical Device With Space Charge Effect
#247Electroactive polymer pre-strain
#248RF MEMS switch and fabrication method thereof
#249Fabrication method of an RF MEMS switch
#250Method for forming a variable capacitor
#251Variable capacitance membrane actuator for wide band tuning of microstrip resonators and filters
#252MEMS element having a dummy pattern
#253Variable capacitor and method of manufacturing variable capacitor
#254Electret covered with an insulated film and an electret condenser having the electret
#255Variable capacitor and manufacturing method thereof
#256Micro-electro-mechanical system (MEMS) variable capacitor apparatuses, systems and related methods
#257Micro-electro-mechanical system (MEMS) variable capacitor apparatuses, systems and related methods
#258Electronic components comprising adjustable-capacitance micro-electro-mechanical capacitors
#259Electrode layer for capacitors, method of manufacturing the electrode layer, unit sensor using the electrode layer, and tactile sensor using the unit sensor
#260Electroactive polymers
#261Semiconductor device formed by using MEMS technique
#262Collapsing zipper varactor with inter-digit actuation electrodes for tunable filters
#263Actuator and micro-electromechanical system device
#264Method of making a variable capacitor component
#265Variable-capacitance element, variable-capacitance device, and portable phone including variable-capacitance device
#266Micro-electro-mechanical system (MEMS) capacitors, inductors, and related systems and methods
#267Pole-zero elements and related systems and methods
#268MEMS type resonator, process for fabricating the same and communication unit
#269Variable capacitor and method of manufacturing variable capacitor
#270Method for designing a micro electromechanical device with reduced self-actuation
#271Microelectrical device
#272Component comprising a variable capacitor
#273Electroactive polymers
#274Electroactive polymers
#275Micro-electromechanical systems switch and method of fabricating the same
#276Electrostatically actuated low response time power commutation micro-switches
#277Piezoelectric MEMS element and tunable filter equipped with the piezoelectric MEMS element
#278Variable capacitance element
#279Microelectromechanical electrostatic actuator assembly
#280Circuit and method for transmitting an output signal using a microelectromechanical systems varactor and a series inductive device
#281Capacitor apparatus of the capacity variable type
#282High isolation tunable MEMS capacitive switch
#283Piezoelectric-driven MEMS device and method for manufacturing the same
#284Process for manufacturing mems
#285Micro-electro-mechanical system (MEMS) variable capacitor apparatuses, systems and related methods
#286Microelectromechanical system able to switch between two stable positions
#287Providing a charge dissipation structure for an electrostatically driven device
#288Capacitor apparatus of the capacity variable type
#289Capacitor apparatus of the capacity variable type
#290Method of fabricating radio frequency microelectromechanical systems (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates
#291Thermal plastic deformation of RF MEMS devices
#292Method of fabricating radio frequency microelectromechanical systems (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates
#293RF MEMS switch and fabrication method thereof
#294Variable capacitance membrane actuator for wide band tuning of microstrip resonators and filters
#295Stepping actuator and method of manufacture therefore
#296Decreasing load on devices for mass spectrometers
#297Variable capacitance element
#298Process for manufacturing a microsystem
#299Charge control of micro-electromechanical device
#300System and method of fabricating micro cavities