201965 ⎘
Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes due to change in inclination, e.g. by flexing, by spiral wrapping
VARIABLE CAPACITOR
#2Variable capacitor with linear impedance and high voltage breakdown
#3METHOD FOR MANUFACTURING SEMICONDUCTOR STRUCTURE AND SEMICONDUCTOR STRUCTURE THEREOF
#4MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) VARIABLE CAPACITOR APPARATUSES AND RELATED METHODS
#5Vibration device
#6Plate capacitor having a plate made of an elastic material
#7Micro-electro-mechanical system (MEMS) variable capacitor apparatuses and related methods
#8Sensor recording temperature and pressure
#9MEMS devices with an element having varying widths
#10Laterally actuated amplified capacitive vapor sensor
#11Actuator plate partitioning and control devices and methods
#12ELECTROMECHANICAL DEVICE WITH IMPROVED CONNECTION
#13Piezoelectric micro-electro-mechanical actuator device, movable in the plane
#14Method for forming micro-electro-mechanical system (MEMS) device structure
#15Capacitive RF MEMS intended for high-power applications
#16Controllable integrated capacitive device
#17Method of manufacturing a MEMS DVC device
#18Acceleration sensor
#19Micro-electro-mechanical system (MEMS) variable capacitor apparatuses and related methods
#20Stretchable electrically-conductive circuit and manufacturing method therefor
#21Tunable reactance devices, and methods of making and using the same
#22Electronic device and method of manufacturing the same
#23RF MEMS electrodes with limited grain growth
#24ELECTROSTATIC DAMPING OF MEMS DEVICES
#25DVC utilizing MEMS resistive switches and MIM capacitors
#26Stress control during processing of a MEMS digital variable capacitor (DVC)
#27Non-symmetric arrays of MEMS digital variable capacitor with uniform operating characteristics
#28Method and technique to control MEMS DVC control waveform for lifetime enhancement
#29MEMS digital variable capacitor design with high linearity
#30Control-electrode shielding for improved linearity of a MEMS DVC device
#31Methods of forming micro-electro-mechanical devices including a conductive feature extending through an escort ring
#32Micro-electro-mechanical system (MEMS) structures and design structures
#33Controllable integrated capacitive device
#34Capacitive sensors and methods for forming the same
#35Transmission line filter with tunable capacitor
#36Tunable interdigitated capacitor
#37Micro-electro-mechanical system (MEMS) structures and design structures
#38MEMS devices and methods of forming the same
#39MEMS variable capacitor with enhanced RF performance
#40Method for fabricating MEMS switch with reduced dielectric charging effect
#41Compounds having a redox group, use thereof as an electrolyte additive, electrolyte composition, and electrochemical systems containing same
#42RF MEMS isolation, series and shunt DVC, and small MEMS
#43MEMS element
#44MEMS device and method of manufacturing the same
#45Actuator plate partitioning and control devices and methods
#46Fractal structures for MEMS variable capacitors
#47Fractal structures for fixed MEMS capacitors
#48Capacitive sensors and methods for forming the same
#49Micro-electro-mechanical system (MEMS) variable capacitor apparatuses and related methods
#50IN-PLANE MEMS VARACTOR
#51Tunable and switchable resonator and filter structures in single crystal piezoelectric MEMS devices using bimorphs
#52Variable capacitor and switch structures in single crystal piezoelectric MEMS devices using bimorphs
#53THIN FILM SENSOR, CAPACITIVE TOUCH PANEL HAVING THE SAME AND PREPARATION METHOD THEREOF AND TERMINAL PRODUCT
#54Variable capacitor
#55Switchable capacitor
#56Electronic device having variable capacitance element and manufacture method thereof
#57MEMS lifetime enhancement
#58MEMS element and method of manufacturing the same
#59Capacitive sensors and methods for forming the same
#60MEMS devices and methods of forming the same
#61Electronic element, variable capacitor, micro switch, method for driving micro switch, and MEMS type electronic element
#62Rotational type of MEMS electrostatic actuator
#63Piezoelectric element and piezoelectric device
#64Micro-electro-mechanical system (MEMS) structures and design structures
#65Micro-electro-mechanical structure (MEMS) capacitor devices, capacitor trimming thereof and design structures
#66ELECTROMECHANICAL SYSTEMS DEVICE
#67ELECTROMECHANICAL SYSTEMS VARIABLE CAPACITANCE DEVICE
#68MEMS structures and methods for forming the same
#69Micro-electro-mechanical systems (MEMS) device and method for fabricating the same
#70ACCELEROMETER
#71Manufacturing method of piezoelectric film element, piezoelectric film element and piezoelectric device
#72RF transistor packages with high frequency stabilization features and methods of forming RF transistor packages with high frequency stabilization features
#73Systems and methods for current density optimization in CMOS-integrated MEMS capacitive devices
#74VARIABLE CAPACITANCE DEVICE
#75MEMS sensor device with multi-stimulus sensing
#76Piezoelectric actuator, variable capacitor, and optical deflection device
#77MEMS and method of manufacturing the same
#78Micro-electro-mechanical device with a piezoelectric actuator
#79Variable capacitance device
#80Method for forming MEMS variable capacitors
#81OXIDE MEMS BEAM
#82MEMS switch with reduced dielectric charging effect
#83Magnetically actuated micro-electro-mechanical capacitor switches in laminate
#84Actuator
#85MEMS switch and communication device using the same
#86Method of producing a microelectromechanical (MEMS) sensor device
#87MEMS device and method of manufacturing MEMS device
#88MEMS APPARATUS
#89Proportional remote control
#90ELEMENT STRUCTURE, INERTIA SENSOR, AND ELECTRONIC DEVICE
#91MEMS device
#92Electrostatic actuator and driving method thereof
#93High accuracy MEMS-based varactors
#94MEMS sprung cantilever tunable capacitors and methods
#95Selectable capacitance circuit
#96Micromechanical digital capacitor with improved RF hot switching performance and reliability
#97TURNABLE CAPACITOR AND SWITCH USING MEMS WITH PHASE CHANGE MATERIAL
#98Three-dimensional structure and its manufacturing method
#99Vanadium oxide thermal microprobes
#100Electrical converter with variable capacitor
#101Variable capacitance element
#102Variable capacitor and method of making the same
#103Piezoelectric-driven MEMS element
#104MEMS capacitive device and method of forming same
#105Selectable Capacitance Circuit
#106VARIABLE CAPACITIVE ELEMENT
#107Device containing plurality of smaller MEMS devices in place of a larger MEMS device
#108Micro-electro-mechanical device with a piezoelectric actuator
#109Process of manufacturing a piezoelectric actuator for tunable electronic components on a carrier substrate
#110SWITCH AND ESD PROTECTION DEVICE
#111Variable capacitor employing MEMS technology
#112Variable capacitor, variable capacitor apparatus, high frequency circuit filter, and high frequency circuit
#113Micro-electro-mechanical system (MEMS) variable capacitors and actuation components and related methods
#114MEMS variable capacitor having a piezoelectric actuation mechanism based on a piezoelectric thin film
#115Sensor element assembly and method
#116Actuator
#117Electronic element, variable capacitor, micro switch, method for driving micro switch, and MEMS type electronic element
#118Actuator and electronic hardware using the same
#119Array variable capacitor apparatus
#120Micromechanical actuators comprising semiconductors on a group III nitride basis
#121High-frequency circuit components
#122Micro electromechanical capacitive switch
#123Micromechanical device with piezoelectric and electrostatic actuation and method therefor
#124Electric component
#125Tuneable electronic devices and electronic arrangements comprising such tuneable devices
#126Capacitor structure with variable capacitance, and use of said capacitor structure
#127MEMS device with low operation voltage, large contact pressure force, and large separation force, and portable communication terminal with the MEMS device
#128Variable capacitor
#129Drive control method and unit for micro machine device
#130Piezoelectric-driven MEMS device and method for manufacturing the same
#131Tunable high impedance surface device
#132Spring structure for MEMS device
#133CAPACITOR MICROPHONE MANUFACTURING METHOD AND CAPACITOR MICROPHONE
#134Forming a sacrificial layer in order to realise a suspended element
#135Sensor system
#136Micro-electromechanical device
#137MEMS variable capacitor and method for producing the same
#138Tunable impedance matching networks and tunable diplexer matching systems
#139Electrostatic actuator device having multiple gap heights
#140Control and testing of a micro electromechanical switch
#141Method for fabricating a micro-electromechanical system switch
#142Micro-electro-mechanical system (MEMS) variable capacitors and actuation components and related methods
#143Variable capacitance device and portable phone
#144Capacitance Type Mems Device, Manufacturing Method Thereof, And High Frequency Device
#145Methods for making fixed parallel plate MEMS capacitor microsensors and microsensor arrays
#146Film Actuator Based Mems Device and Method
#147MEMS device using an actuator
#148Piezoelectric driven MEMS device
#149MICROELECTROMECHANICAL STEP ACTUATOR CAPABLE OF BOTH ANALOG AND DIGITAL MOVEMENTS
#150Method of manufacturing a MEMS device and MEMS device
#151Variable capacitor and method of making the same
#152Fixed parallel plate MEMS capacitor microsensor array
#153Humidity sensing structure having a cantilever resistor and method for fabricating the same
#154Three-dimensional structure and its manufacturing method
#155Micro-electro-mechanical variable capacitor for radio frequency applications with reduced influence of a surface roughness
#156Integrateable capacitors and microcoils and methods of making thereof
#157Integrateable capacitors and microcoils and methods of making thereof
#158Device with beam structure, and semiconductor device
#159Electronic device
#160Variable capacitance membrane actuator for wide band tuning of microstrip resonators and filters
#161Curved spring structure with elongated section located under cantilevered section
#162Low cost digital variable capacitor
#163Method of forming a low cost digital variable capacitor
#164Variable capacitor and method of manufacturing variable capacitor
#165Semiconductor device and manufacturing method thereof
#166Micro-electro-mechanical system (MEMS) variable capacitor apparatuses, systems and related methods
#167Micro-electro-mechanical system (MEMS) variable capacitor apparatuses, systems and related methods
#168Semiconductor device using piezoelectric actuator formed by use of MEMS technique
#169Micro-mechanical device, micro-switch, variable capacitor high frequency circuit and optical switch
#170Electronic components comprising adjustable-capacitance micro-electro-mechanical capacitors
#171Variable-capacitance electromechanical micro-capacitor and method for producing such a micro-capacitor
#172Micro electromechanical system switch
#173Semiconductor device formed by using MEMS technique
#174Collapsing zipper varactor with inter-digit actuation electrodes for tunable filters
#175Micro-electro mechanical switch designs
#176Actuator and micro-electromechanical system device
#177MEMS tunable capacitor with a wide tuning range
#178Method of making a variable capacitor component
#179Variable-capacitance element, variable-capacitance device, and portable phone including variable-capacitance device
#180Tunable dielectric radio frequency microelectromechanical system capacitive switch
#181Micro-electro-mechanical system (MEMS) capacitors, inductors, and related systems and methods
#182Pole-zero elements and related systems and methods
#183Method of fabricating MEMS tunable capacitor with wide tuning range
#184Stress bimorph MEMS switches and methods of making same
#185Sensor system
#186Variable capacitor and method of manufacturing variable capacitor
#187Thermal actuator for a MEMS device
#188Micro-electrical-mechanical device and method of making same
#189Microelectrical device
#190Piezoelectric driving type MEMS apparatus
#191Component comprising a variable capacitor
#192Semiconductor device having actuator
#193Curved spring structure with elongated section located under cantilevered section
#194Micro-electromechanical systems switch and method of fabricating the same
#195Selectable capacitance circuit
#196Variable capacitance element
#197Piezoelectric actuator and micro-electromechanical device
#198Driving of an array of micro-electro-mechanical-system (mems) elements
#199MEMS switch electrode configuration to increase signal isolation
#200Micro-electromechanical variable capacitor
#201Elastomeric CMOS based micro electromechanical varactor
#202Mechanism to prevent self-actuation in a microelectromechanical switch
#203Dynamically balanced capacitive pick-off accelerometer
#204Capacitor apparatus of the capacity variable type
#205Piezoelectric-driven MEMS device and method for manufacturing the same
#206Micro-electro-mechanical system (MEMS) variable capacitor apparatuses, systems and related methods
#207Capacitor apparatus of the capacity variable type
#208Capacitor apparatus of the capacity variable type
#209MEMS tunable capacitor with a wide tuning range and method of fabricating the same
#210Method of fabricating radio frequency microelectromechanical systems (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates
#211Method of fabricating radio frequency microelectromechanical systems (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates
#212Variable capacitance membrane actuator for wide band tuning of microstrip resonators and filters
#213Piezoelectric switch for tunable electronic components
#214Manufacturing methods of micro electromechanical switch
#215Method of eliminating brownian noise in micromachined varactors
#216Piezo controlled variable capacitor