H01H2001/0052 - CPC Classification Index

ClassID:

202115 ⎘

H01H2001/0052 - CPC Classification

Classification description:

Contacts; Switches making use of microelectromechanical systems [MEMS] Special contact materials used for MEMS

Sub-classes:

H01H2001/0057 » {the contact materials containing refractory materials, e.g. tungsten} 16

Recent Application in this class:

20230064520

2023-03-02

MEMS device built on substrate with ruthenium based contact surface material

20210304973

2021-09-30

MEMS device built on substrate with ruthenium based contact surface material

20190341211

2019-11-07

CONTACT SURFACE FOR MEMS DEVICE

20190074152

2019-03-07

Electromechanical relay device

20190019644

2019-01-17

Electromagnetically actuated microelectromechanical switch

20180261415

2018-09-13

Microelectromechanical switch with metamaterial contacts

20180144879

2018-05-24

Contact material for MEMS devices

20180096812

2018-04-05

Electromechanical switching device with electrodes having 2D layered materials with distinct functional areas

20170271114

2017-09-21

PRINTED MEMS SWITCH

#10

20170217758

2017-08-03

Electromechanical switching device with electrodes having 2D layered materials with distinct functional areas

#11

20160293540

2016-10-06

Metallic device having mobile element in a cavity of the BEOL of an integrated circuit

#12

20160200565

2016-07-14

RF MEMS electrodes with limited grain growth

#13

20160148770

2016-05-26

Electromechanical switching device with electrodes having 2D layered materials with distinct functional areas

#14

20160056003

2016-02-25

Electromechanical switching device with electrodes having 2D layered materials with distinct functional areas

#15

20150035387

2015-02-05

MEMS switch device and method of fabrication

#16

20150021149

2015-01-22

Contact structure for electromechanical switch

#17

20140158506

2014-06-12

Mechanical switch

#18

20140090964

2014-04-03

Nanoelectromechanical switch with localized nanoscale conductive pathway

#19

20120305373

2012-12-06

Contact structure for electromechanical switch

#20

20120279838

2012-11-08

CMOS-MEMS switch structure

#21

20120255841

2012-10-11

RF MEMS switch device and manufacturing method thereof

#22

20120138436

2012-06-07

MEMS switches and fabrication methods

#23

20110287586

2011-11-24

MEMS switch capping and passivation method

#24

20110281389

2011-11-17

Method for manufacturing micromachine

#25

20110220471

2011-09-15

Micromechanical component and method for manufacturing a micromechanical component

#26

20110209970

2011-09-01

SWITCH AND METHOD FOR MANUFACTURING THE SAME, AND RELAY

#27

20110163397

2011-07-07

Method of forming a micro-electromechanical system device

#28

20110147177

2011-06-23

Structure, electronic device, and method for fabricating a structure

#29

20110128112

2011-06-02

Switch structures

#30

20110067983

2011-03-24

Switch structure and method

#31

20110062003

2011-03-17

Contact material, device including contact material, and method of making

#32

20100255322

2010-10-07

Radio-frequency microelectromechanical systems and method of manufacturing such systems

#33

20100068854

2010-03-18

MEMS switch capping and passivation method

#34

20100018843

2010-01-28

LOW WORK FUNCTION ELECTRICAL COMPONENT

#35

20100015744

2010-01-21

Micro-Electromechanical Device and Method of Making the Same

#36

20090260960

2009-10-22

Switch for use in microelectromechanical systems (MEMS) and MEMS devices incorporating same

#37

20090184728

2009-07-23

Contact device and method for producing the same

#38

20090145629

2009-06-11

Micromachine and method for manufacturing the same

#39

20080250785

2008-10-16

Micromechanical device with gold alloy contacts and method of manufacture

#40

20080087530

2008-04-17

Contact electrode for microdevices and etch method of manufacture

#41

20080047816

2008-02-28

MEMS SWITCH

#42

20080007814

2008-01-10

MEMS structure and method of fabricating the same

#43

20070115082

2007-05-24

MEMS Switch Contact System

#44

20060208823

2006-09-21

Tunable dielectric radio frequency microelectromechanical system capacitive switch

#45

20060164194

2006-07-27

Method of forming noble metal contacts

#46

20060138604

2006-06-29

Low charging dielectric for capacitive MEMS devices and method of making same

#47

20060050028

2006-03-09

Method and apparatus for an improved micro electro-mechanical display backplane

#48

20050103608

2005-05-19

Integrated microsprings for speed switches

#49

20050062565

2005-03-24

Method of using a metal platform for making a highly reliable and reproducible metal contact micro-relay MEMS switch

#50

20050007217

2005-01-13

Noble metal contacts for micro-electromechanical switches