202116 ⎘
Contacts; Switches making use of microelectromechanical systems [MEMS]; Special contact materials used for MEMS the contact materials containing refractory materials, e.g. tungsten
ELECTRICAL CONTACT SYSTEM WITH LIQUID METAL LAYER AND DIFFUSION BARRIER
#2Method for manufacturing a MEMS switch having an embedded metal contact
#3MEMS RF-switch with near-zero impact landing
#4Micro-electro-mechanical system (MEMS) and related actuator bumps, methods of manufacture and design structures
#5Electromechanical relay device
#6Contact material for MEMS devices
#7DVC utilizing MIMS in the anchor
#8Micro-electro-mechanical system (MEMS) and related actuator bumps, methods of manufacture and design structures
#9Metallic device having mobile element in a cavity of the BEOL of an integrated circuit
#10Micro-electro-mechanical system (MEMS) and related actuator bumps, methods of manufacture and design structures
#11Micro-electro-mechanical system (MEMS) and related actuator bumps, methods of manufacture and design structures
#12Micro-electro-mechanical system (MEMS) and related actuator bumps, methods of manufacture and design structures
#13CMOS-MEMS switch structure
#14Method for manufacturing micromachine
#15Micromachine and method for manufacturing the same
#16MEMS piezoelectric switch