H01J2237/0209 - CPC Classification Index

ClassID:

206316 ⎘

H01J2237/0209 - CPC Classification

Classification description:

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Details; Protection arrangements Avoiding or diminishing effects of eddy currents

Recent Application in this class:

20250037961

2025-01-30

BEAM POSITION DISPLACEMENT CORRECTION IN CHARGED PARTICLE INSPECTION

20130327938

2013-12-12

Electron microscope and method of adjusting the same

20110005926

2011-01-13

MAGNETRON ASSEMBLY

20090199967

2009-08-13

MOUNTING STAGE AND PLASMA PROCESSING APPARATUS

20080265174

2008-10-30

CHARGED PARTICLE BEAM WRITING APPARATUS AND METHOD

20060049043

2006-03-09

Magnetron assembly