H01J2237/02 - CPC Classification Index

ClassID:

206313 ⎘

H01J2237/02 - CPC Classification

Classification description:

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging Details

Sub-classes:

Method for inspecting shower plate of plasma processing apparatus

Fe-Co-based alloy sputtering target material, and method of producing same

Fe-Co-BASED ALLOY SPUTTERING TARGET MATERIAL, AND METHOD OF PRODUCING SAME

Impurity-doped layer formation apparatus and electrostatic chuck protection method

Electron microscope device