H01J2237/0216 - CPC Classification Index

#1

20260081095

2026-03-19

SYSTEMS AND METHODS FOR FOCUSING CHARGED-PARTICLE BEAMS

#2

20250144669

2025-05-08

VIBRATION REDUCTION IN ION IMPLANTERS USING EMBEDDED ACTUATOR FORCED ATTENUATION

#3

20250014857

2025-01-09

METHOD AND SYSTEM OF REDUCING CHAMBER VIBRATION

#4

20240373591

2024-11-07

TRANSMISSION ELECTRON MICROSCOPE

#5

20230386696

2023-11-30

Vacuum chamber arrangement for charged particle beam generator

#6

20230139507

2023-05-04

CHARGED PARTICLE BEAM DEVICE

#7

20230035686

2023-02-02

Charged Particle Beam Device and Vibration-Suppressing Mechanism

#8

20220301812

2022-09-22

Ion beam device

#9

20220208505

2022-06-30

Vibration damping system for charged particle beam apparatus

#10

20220108869

2022-04-07

Stage driving system and apparatus or device such as apparatus of charged-particle beam comprising the same

#11

20220084806

2022-03-17

Coupling for connecting analytical systems with vibrational isolation

#12

20220068590

2022-03-03

SYSTEMS AND METHODS FOR FOCUSING CHARGED -PARTICLE BEAMS

#13

20210383941

2021-12-09

Vacuum chamber arrangement for charged particle beam generator

#14

20210225611

2021-07-22

Charged particle beam optical apparatus, exposure apparatus, exposure method, control apparatus, control method, information generation apparatus, information generation method and device manufacturing method

#15

20210110991

2021-04-15

Cryotransfer holder and workstation

#16

20200194141

2020-06-18

Vacuum chamber arrangement for charged particle beam generator

#17

20200051780

2020-02-13

Charged particle beam optical apparatus, exposure apparatus, exposure method, control apparatus, control method, information generation apparatus, information generation method and device manufacturing method

#18

20190369509

2019-12-05

Substrate processing apparatus

#19

20190214224

2019-07-11

Vibration control system and optical equipment equipped therewith

#20

20190131106

2019-05-02

Cryotransfer holder and workstation

#21

20180269027

2018-09-20

Charged particle beam device

#22

20170323764

2017-11-09

Ion beam device

#23

20170307987

2017-10-26

Substrate processing apparatus

#24

20170221674

2017-08-03

Vacuum chamber arrangement for charged particle beam generator

#25

20170125209

2017-05-04

Charged particle microscope with vibration detection / correction

#26

20170084423

2017-03-23

Method and system for noise mitigation in a multi-beam scanning electron microscopy system

#27

20170061947

2017-03-02

Charged particle radiation apparatus

#28

20160284506

2016-09-29

Stage apparatus with braking system for lens, beam, or vibration compensation

#29

20160186844

2016-06-30

Actuator, sample positioning device, and charged particle beam system

#30

20150364294

2015-12-17

Transmission electron microscope micro-grid

#31

20150136995

2015-05-21

Multi-electrode electron optics

#32

20150048254

2015-02-19

HYBRID ELECTROSTATIC LENS WITH INCREASED NATURAL FREQUENCY

#33

20140367570

2014-12-18

SUBSTRATE INSPECTION METHOD AND A SUBSTRATE PROCESSING METHOD

#34

20140347640

2014-11-27

Substrate processing apparatus

#35

20140299768

2014-10-09

Ion source and ion beam device using same

#36

20140197331

2014-07-17

Charged particle device

#37

20140197330

2014-07-17

Vibration isolation module and substrate processing system

#38

20140034843

2014-02-06

Hybrid electrostatic lens with increased natural frequency

#39

20130301954

2013-11-14

Charged particle beam device, and image analysis device

#40

20130256532

2013-10-03

Ion sources, systems and methods

#41

20130228686

2013-09-05

Charged particle beam apparatus having noise absorbing arrangements

#42

20130153742

2013-06-20

ARRANGEMENT FOR HOLDING A PARTICLE BEAM APPARATUS

#43

20130140458

2013-06-06

Specimen holder for charged-particle beam apparatus

#44

20130082194

2013-04-04

Charged particle radiation device and soundproof cover

#45

20130070223

2013-03-21

Projection system with flexible coupling

#46

20130037713

2013-02-14

Method for processing samples held by a nanomanipulator

#47

20130037687

2013-02-14

Anti-vibration apparatus

#48

20130014528

2013-01-17

Cryogenic specimen holder

#49

20120319003

2012-12-20

Ion beam device

#50

20120241640

2012-09-27

Ion sources, systems and methods

#51

20120193550

2012-08-02

Charged particle radiation device

#52

20120153537

2012-06-21

Lithography system and lithography method

#53

20120127299

2012-05-24

Scanning electron microscope

#54

20120105820

2012-05-03

Vibration control apparatus, lithography apparatus, and method of manufacturing article

#55

20120098409

2012-04-26

Filament for electron source

#56

20120097863

2012-04-26

Ion microscope

#57

20120091362

2012-04-19

Charged particle radiation device

#58

20120015303

2012-01-19

Drawing apparatus and method of manufacturing article

#59

20120006264

2012-01-12

FILM FORMATION APPARATUS

#60

20110315890

2011-12-29

GAS ION SOURCE WITH HIGH MECHANICAL STABILITY

#61

20110266465

2011-11-03

Ion beam device

#62

20110254944

2011-10-20

SCANNING CHARGED PARTICLE MICROSCOPE

#63

20110240853

2011-10-06

Ion sources, systems and methods

#64

20110104830

2011-05-05

Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former

#65

20110101222

2011-05-05

Z-stage configuration and application thereof

#66

20100237762

2010-09-23

Electron source and electron beam apparatus

#67

20100224792

2010-09-09

Method for characterizing vibrational performance of charged particle beam microscope system and application thereof

#68

20100218720

2010-09-02

Moving module of a wafer ion-implanting machine

#69

20100096567

2010-04-22

REDUCTION IN STAGE MOVEMENT REACTION FORCE IN AN ELECTRON BEAM LITHOGRAPHY MACHINE

#70

20100090581

2010-04-15

Electron source

#71

20100084579

2010-04-08

Fluid delivery mechanism for vacuum wafer processing system

#72

20100019649

2010-01-28

Electron source

#73

20090250625

2009-10-08

Specimen stage apparatus and specimen stage positioning control method

#74

20090236540

2009-09-24

STAGE AND ELECTRON MICROSCOPE APPARATUS

#75

20090218509

2009-09-03

Charged particle beam apparatus

#76

20090152462

2009-06-18

Gas field ionization ion source, scanning charged particle microscope, optical axis adjustment method and specimen observation method

#77

20090057566

2009-03-05

Gas ion source with high mechanical stability

#78

20090001266

2009-01-01

Arrangement and method for compensating emitter tip vibrations

#79

20080308729

2008-12-18

Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former

#80

20070194235

2007-08-23

Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former

#81

20070085035

2007-04-19

Arrangement and method for compensating emitter tip vibrations

#82

20060255290

2006-11-16

Sample inspection apparatus

#83

20060219911

2006-10-05

Scanning electron microscope

#84

20060076492

2006-04-13

Transmission electron microscope and image observation method using it

#85

20060060791

2006-03-23

Bellows with spring anti-gravity device

#86

20050232749

2005-10-20

Method for reciprocating a workpiece through an ion beam

#87

20050232748

2005-10-20

Reciprocating drive for scanning a workpiece

#88

20050230643

2005-10-20

Reciprocating drive for scanning a workpiece through an ion beam

#89

20050205809

2005-09-22

Electron beam exposure apparatus

#90

20050121611

2005-06-09

Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former

#91

20050076725

2005-04-14

Method and apparatus of vibration isolation, in particular for electron beam metrology tools

#92

15195136

2017-10-17

Image generation apparatus