Patents-Review.com
ClassID:

206332 ⎘

H01J2237/038 - CPC Classification

Classification description:

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Mounting, supporting, spacing or insulating electrodes Insulating

Recent Application in this class:
#1
20260128260
2026-05-07

PLASMA PROCESSING APPARATUS

 #2
20260051457
2026-02-19

ELECTRODE FOR CAPACITIVELY COUPLED PLASMA GENERATING DEVICE, CAPACITIVELY COUPLED PLASMA GENERATING DEVICE COMPRISING SAME, AND CAPACITIVELY COUPLED PLASMA UNIFORMITY ADJUSTING METHOD

 #3
20250364229
2025-11-27

CERAMIC JOINED BODY, ELECTROSTATIC CHUCK DEVICE, AND METHOD FOR MANUFACTURING CERAMIC JOINED BODY

 #4
20250349495
2025-11-13

ISOLATING SPACER FOR ELECTRON-OPTICAL ASSEMBLY

 #5
20250308842
2025-10-02

SEMICONDUCTOR ELECTRICAL INSULATOR WITH REDUCED ARCING

 #6
20250157783
2025-05-15

APPARATUS USING MULTIPLE BEAMS OF CHARGED PARTICLES

 #7
20250006452
2025-01-02

Systems, devices, and methods for contaminant resistant insulative structures

 #8
20240297024
2024-09-05

ACTIVE GAS GENERATION APPARATUS

 #9
20240274405
2024-08-15

INSULATOR FOR AN ION IMPLANTATION SOURCE

 #10
20240274394
2024-08-15

INSULATING STRUCTURE, ELECTROSTATIC LENS, AND CHARGED PARTICLE BEAM DEVICE

 #11
20240242918
2024-07-18

Structure for Particle Acceleration And Charged Particle Beam Apparatus

 #12
20240186099
2024-06-06

ELECTRON BEAM IRRADIATION DEVICE

 #13
20240177973
2024-05-30

PLASMA PROCESSING APPARATUS

 #14
20240177960
2024-05-30

Lattice Based Voltage Standoff

 #15
20240071711
2024-02-29

Apparatus using multiple beams of charged particles

 #16
20230411126
2023-12-21

CHAMBER INSULATION PLATE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME

 #17
20230335380
2023-10-19

PLASMA PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD

 #18
20230282445
2023-09-07

METHOD OF NUCLEAR REPROGRAMMING

 #19
20230238221
2023-07-27

PLASMA SOURCE FOR SEMICONDUCTOR PROCESSING

 #20
20230223239
2023-07-13

Plasma processing apparatus, and plasma processing method

 #21
20230215692
2023-07-06

Arcing Reduction in Wafer Bevel Edge Plasma Processing

 #22
20230053861
2023-02-23

Systems, devices, and methods for contaminant resistant insulative structures

 #23
20230034041
2023-02-02

Active gas generation apparatus

 #24
20230013017
2023-01-19

ACTIVE GAS GENERATION APPARATUS

 #25
20220310358
2022-09-29

Corona/plasma treatment machine

 #26
20220223366
2022-07-14

Apparatus using multiple beams of charged particles

 #27
20220154328
2022-05-19

Insulating structure, method for manufacturing insulating structure, ion generation device, and ion implanter

 #28
20220037115
2022-02-03

Insulator for an ion implantation source

 #29
20220028663
2022-01-27

PLASMA SOURCE FOR SEMICONDUCTOR PROCESSING

 #30
20210151308
2021-05-20

Systems, devices, and methods for contaminant resistant insulative structures

 #31
20200411292
2020-12-31

Apparatus and method for treating substrate

 #32
20200395189
2020-12-17

Aberration corrector and multiple electron beam irradiation apparatus

 #33
20200312634
2020-10-01

Plasma processing apparatus

 #34
20200203114
2020-06-25

Apparatus using multiple beams of charged particles

 #35
20180350553
2018-12-06

Low conductance self-shielding insulator for ion implantation systems

 #36
20180269040
2018-09-20

Liquid processing apparatus including container, first and second electrodes, insulator surrounding at least part of side face of the first electrode, gas supply device, metallic member surrounding part of side face of the first electrode, and power source

 #37
20180261435
2018-09-13

Liquid treatment apparatus including flow channel, first and second electrodes, insulator surrounding lateral surface of first electrode, gas supply device, and power supply source

 #38
20180261434
2018-09-13

Insulating structure

 #39
20180138006
2018-05-17

Low conductance self-shielding insulator for ion implantation systems

 #40
20180033618
2018-02-01

Substrate processing apparatus and substrate processing method

 #41
20160307726
2016-10-20

Inspection device

 #42
20160064174
2016-03-03

Electron gun supporting member and electron gun apparatus

 #43
20150238972
2015-08-27

Method and device for fragmenting and/or weakening material by means of high-voltage pulses

 #44
20150124931
2015-05-07

Cathode filament assembly

 #45
20140353518
2014-12-04

Insulation structure and insulation method

 #46
20140352617
2014-12-04

Coating insulating materials for improved life

 #47
20140291554
2014-10-02

Source bushing shielding

 #48
20140291543
2014-10-02

Insulation structure of high voltage electrodes for ion implantation apparatus

 #49
20140197327
2014-07-17

High-voltage insulation device for charged-particle optical apparatus

 #50
20130134324
2013-05-30

Compact high-voltage electron gun

 #51
20120280136
2012-11-08

Plasma source for charged particle beam system

 #52
20120235036
2012-09-20

Inspection device

 #53
20120145896
2012-06-14

Gas delivery system with voltage gradient for an ion microscope

 #54
20110240602
2011-10-06

HIGH-VOLTAGE GAS CLUSTER ION BEAM (GCIB) PROCESSING SYSTEM

 #55
20110094798
2011-04-28

Interfacing two insulation parts in high voltage environment

 #56
20110084592
2011-04-14

High voltage shielding arrangement of a charged particle lithography system

 #57
20110056746
2011-03-10

ELECTRIC FIELD MODIFICATION ABOUT A CONDUCTIVE STRUCTURE

 #58
20100282709
2010-11-11

SUBSTRATE PLASMA-PROCESSING APPARATUS

 #59
20100243912
2010-09-30

Isolation circuit for transmitting AC power to a high-voltage region

 #60
20100108915
2010-05-06

Conductive contamination resistant insulator

 #61
20100044579
2010-02-25

APPARATUS

 #62
20090295269
2009-12-03

ELECTRON BEAM GENERATOR

 #63
20090147435
2009-06-11

Particle trap

 #64
20090145228
2009-06-11

Techniques for reducing an electrical stress in an acceleration/deceleraion system

 #65
20090057573
2009-03-05

TECHNIQUES FOR TERMINAL INSULATION IN AN ION IMPLANTER

 #66
20090057572
2009-03-05

Terminal structures of an ion implanter having insulated conductors with dielectric fins

 #67
20090047801
2009-02-19

Interfacing two insulation parts in high voltage environment

 #68
20090039295
2009-02-12

DETACHABLE INNER SHIELD

 #69
20090026384
2009-01-29

Electrostatic lens assembly

 #70
20090008570
2009-01-08

Arc chamber for an ion implantation system

 #71
20080231192
2008-09-25

ELECTRON BEAM DRAWING APPARATUS

 #72
20080135783
2008-06-12

Bushing unit with integrated conductor in ion accelerating device and related method

 #73
20080135756
2008-06-12

Charged beam gun

 #74
20080073578
2008-03-27

Terminal structure of an ion implanter

 #75
20080067411
2008-03-20

Ion source

 #76
20080067410
2008-03-20

Charged particle generator and accelerator

 #77
20070262270
2007-11-15

Insulator for high current ion implanters

 #78
20070235663
2007-10-11

Insulator system for a terminal structure of an ion implantation system

 #79
20070210331
2007-09-13

Guard ring applied to ion implantation equipment

 #80
20060060795
2006-03-23

Iron beam irradiation device and insulating spacer for the device