206329 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging Mounting, supporting, spacing or insulating electrodes
Sub-classes:Monochromator and charged particle beam apparatus comprising the same
#2Ion source repeller shield comprising a labyrinth seal
#3Electrostatic lens and charged particle beam apparatus using the same
#4Charged particle beam lens having a particular support electrically insulating first and second electrodes from each other
#5Inductively coupled plasma flood gun using an immersed low inductance RF coil and multicusp magnetic arrangement
#6Charged particle optical system and scribing apparatus
#7Electrostatic lens
#8In situ cleaning device for lithographic apparatus
#9Electro-optical element for multiple beam alignment
#10Inductively coupled plasma flood gun using an immersed low inductance FR coil and multicusp magnetic arrangement
#11Electrostatic lens structure
#12Hybrid RF capacitively and inductively coupled plasma source using multifrequency RF powers and methods of use thereof
#13Plasma etching apparatus
#14Plasma processing apparatus and electrode for same
#15Guiding charged droplets and ions in an electrospray ion source
#16IMPROVED PARTICLE BEAM GENERATOR
#17Unbalanced ion source
#18Modular gas ion source
#19ELECTRON BEAM DRAWING APPARATUS
#20STATIC ELECTRICITY DEFLECTING DEVICE, ELECTRON BEAM IRRADIATING APPARATUS, SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND METHOD OF MANUFACTURING SUBSTRATE
#21Static electricity deflecting device, electron beam irradiating apparatus, substrate processing apparatus, substrate processing method, and method of manufacturing substrate
#22APPARATUS AND METHOD OF DETECTING SECONDARY ELECTRONS
#23Hybrid RF capacitively and inductively coupled plasma source using multifrequency RF powers and methods of use thereof
#24Thermal control plate for ion source
#25Charged beam drawing apparatus
#26Static electricity deflecting device, electron beam irradiating apparatus, substrate processing apparatus, substrate processing method and method of manufacturing substrate
#27Static electricity deflecting device, electron beam irradiating apparatus, substrate processing apparatus, substrate processing method and method of manufacturing substrate
#28Micro column electron beam apparatus formed in low temperature co-fired ceramic substrate
#29MEMS based charged particle deflector design
#30Compact microcolumn for automated assembly