H01J2237/0456 - CPC Classification Index

ClassID:

206343 ⎘

H01J2237/0456 - CPC Classification

Classification description:

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Means for controlling the discharge; Diaphragms Supports

Sub-classes:

MULTI-LEAF COLLIMATOR AND DRIVING SYSTEM

Multi-leaf collimator and driving system

Method and device for implanting ions in wafers

Imaging beam positioning apparatus and method of use thereof

Multi-leaf collimator and driving system

Variable shaped electron beam lithography system and method for manufacturing substrate

Particle optical apparatus

Apertured plate support mechanism and charged-particle beam instrument equipped therewith