206347 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Means for controlling the discharge; Changing particle velocity accelerating with magnetic means
PARTICLE ACCELERATOR HAVING CONFIGURABLE QUADRUPOLE ASSEMBLY
#2APPARATUS AND METHOD FOR ATOMIC LAYER ETCHING BASED ON CONTROL OF CHARGED PARTICLES
#3LINEAR TCP SOURCE, A CHARGED PARTICLE BEAM SOURCE USING THE LINEAR TCP SOURCE AND A GRID FOR THE CHARGED PARTICLE BEAM SOURCE
#4BEAM TUBE AND LAYOUT FOR LINEAR ACCELERATOR
#5RF quadrupole particle accelerator
#6SPECIFIC TYPE ION SOURCE AND PLASMA FILM FORMING APPARATUS
#7Ion milling system
#8Circular accelerator and particle beam therapy apparatus
#9High performance inspection scanning electron microscope device and method of operating the same