206349 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Means for controlling the discharge; Changing particle velocity accelerating with electrostatic means radio-frequency quadrupole [RFQ]
Resonator, linear accelerator, and ion implanter having adjustable pickup loop
#2CHARGE STRIPPING FOR ION IMPLANTATION SYSTEMS
#3Particle beam irradiation system
#4High-energy ion implanter
#5APPARATUS AND METHOD FOR INTRODUCING PARTICLES USING A RADIO FREQUENCY QUADRUPOLE LINEAR ACCELERATOR FOR SEMICONDUCTOR MATERIALS
#6Unipolar electrostatic quadrupole lens and switching methods for charged beam transport