H01J2237/04756 - CPC Classification Index

#1

20260100324

2026-04-09

CHARGED PARTICLE ASSESSMENT TOOL, INSPECTION METHOD

#2

20250273427

2025-08-28

Isolation Valve for Implant Productivity Enhancement

#3

20240242921

2024-07-18

CHARGED PARTICLE APPARATUS AND METHOD

#4

20240087835

2024-03-14

CHARGED PARTICLE DEVICE AND METHOD

#5

20230230795

2023-07-20

CHARGED PARTICLE ASSESSMENT TOOL, INSPECTION METHOD

#6

20220246391

2022-08-04

Multi-cell detector for charged particles

#7

20220028648

2022-01-27

Stage apparatus suitable for a particle beam apparatus

#8

20210384007

2021-12-09

Scanning electron microscope

#9

20210296081

2021-09-23

Charged particle beam device and method for adjusting position of detector of charged particle beam device

#10

20210296079

2021-09-23

Particle beam apparatus and composite beam apparatus

#11

20210066031

2021-03-04

Scanning electron microscope with composite detection system and specimen detection method

#12

20210020400

2021-01-21

Method of manufacturing a charged particle detector

#13

20210020399

2021-01-21

High-current ion implanter and method for controlling ion beam using high-current ion implanter

#14

20210013001

2021-01-14

In-situ plasma cleaning of process chamber components

#15

20210005421

2021-01-07

Conductive beam optic containing internal heating element

#16

20200286708

2020-09-10

Multi-cell detector for charged particles

#17

20200126757

2020-04-23

In-situ plasma cleaning of process chamber components

#18

20190362929

2019-11-28

Scanning electron microscope

#19

20190051493

2019-02-14

Apparatus and techniques for decelerated ion beam with no energy contamination

#20

20180277333

2018-09-27

Charged particle beam apparatus

#21

20170287674

2017-10-05

Particle-optical systems and arrangements and particle-optical components for such systems and arrangements

#22

20170040139

2017-02-09

Electron beam device

#23

20160111251

2016-04-21

Particle-optical systems and arrangements and particle-optical components for such systems and arrangements

#24

20160035634

2016-02-04

Ion implantation method and ion implantation apparatus performing the same

#25

20160005570

2016-01-07

Ion beam line

#26

20150136979

2015-05-21

Charged particle beam device

#27

20150136967

2015-05-21

Deceleration apparatus for ribbon and spot beams

#28

20140158902

2014-06-12

Particle-optical systems and arrangements and particle-optical components for such systems and arrangements

#29

20130270438

2013-10-17

Switchable multi perspective detector, optics therefor and method of operating thereof

#30

20130214156

2013-08-22

Charged particle detector

#31

20120132801

2012-05-31

Method and an apparatus of an inspection system using an electron beam

#32

20120104252

2012-05-03

Particle-optical systems and arrangements and particle-optical components for such systems and arrangements

#33

20120097861

2012-04-26

Deceleration apparatus for ribbon and spot beams

#34

20120068058

2012-03-22

Apparatus and method for processing substrate using neutralized beams including applying a voltage to a substrate support

#35

20120061566

2012-03-15

Scanning electron microscope

#36

20120037802

2012-02-16

Distributed potential charged particle detector

#37

20110240889

2011-10-06

In-vacuum beam defining aperture cleaning for particle reduction

#38

20110220795

2011-09-15

Twin beam charged particle column and method of operating thereof

#39

20100224592

2010-09-09

Charged particle beam processing

#40

20100187436

2010-07-29

High resolution gas field ion column

#41

20100181479

2010-07-22

Particle-optical systems and arrangements and particle-optical components for such systems and arrangements

#42

20100084583

2010-04-08

REDUCED IMPLANT VOLTAGE DURING ION IMPLANTATION

#43

20100065761

2010-03-18

ADJUSTABLE DEFLECTION OPTICS FOR ION IMPLANTATION

#44

20090224170

2009-09-10

Scanning electron microscope

#45

20090189096

2009-07-30

Apparatus and methods for ion beam implantation using ribbon and spot beams

#46

20090173894

2009-07-09

Ion implanters

#47

20090145228

2009-06-11

Techniques for reducing an electrical stress in an acceleration/deceleraion system

#48

20090140132

2009-06-04

Apparatus and method for processing substrate using neutralized beams including applying a voltage to a substrate support

#49

20090072163

2009-03-19

Techniques for controlling a charged particle beam

#50

20090057556

2009-03-05

Method and apparatus of an inspection system using an electron beam

#51

20090039259

2009-02-12

Scanning electron microscope

#52

20090001291

2009-01-01

Apparatus and method for partial ion implantation

#53

20080078949

2008-04-03

Technique for improved ion beam transport

#54

20080054184

2008-03-06

Particle-optical systems and arrangements and particle-optical components for such systems and arrangements

#55

20080029716

2008-02-07

Apparatus and method for ion beam implantation using ribbon and spot beams

#56

20070221846

2007-09-27

Scanning electron microscope

#57

20070215803

2007-09-20

Method and an apparatus of an inspection system using an electron beam

#58

20060289804

2006-12-28

Particle-optical systems and arrangements and particle-optical components for such systems and arrangements

#59

20060151699

2006-07-13

Method and an apparatus of an inspection system using an electron beam

#60

20060113474

2006-06-01

Scanning electron microscope

#61

20060076489

2006-04-13

Charged particle beam apparatus

#62

20060071167

2006-04-06

Scanning electron microscope

#63

20060049348

2006-03-09

Charged particle beam column and method of its operation

#64

20060043317

2006-03-02

Gas cluster-ion irradiation apparatus

#65

20060011834

2006-01-19

Low vacuum scanning electron microscope

#66

20050205782

2005-09-22

Method and an apparatus of an inspection system using an electron beam

#67

20050133719

2005-06-23

Scanning electron microscope

#68

20050082497

2005-04-21

Ion implanter electrodes