H01J2237/053 - CPC Classification Index

ClassID:

206360 ⎘

H01J2237/053 - CPC Classification

Classification description:

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Arrangements for energy or mass analysis electrostatic

Sub-classes:

H01J2237/0535 » Mirror analyser 11

Recent Application in this class:

20260120990

2026-04-30

ELECTRON GUN AND ELECTRON MICROSCOPE

20240339288

2024-10-10

HYBRID APPARATUS, SYSTEM AND TECHNIQUES FOR MASS ANALYZED ION BEAM

20240339287

2024-10-10

APPARATUS, SYSTEM AND TECHNIQUES FOR MASS ANALYZED ION BEAM

20220406558

2022-12-22

Electron gun and electron microscope

20210159043

2021-05-27

APPARATUS AND METHOD FOR CONTROLLING ION BEAM USING ELECTOSTATIC FILTER

20200161089

2020-05-21

Electostatic filter and method for controlling ion beam using electostatic filter

20200161078

2020-05-21

Apparatus and method for controlling ion beam using electrostatic filter

20200161077

2020-05-21

Electrostatic filter and ion implanter having asymmetric electrostatic configuration

20180254169

2018-09-06

Post column filter with enhanced energy range

#10

20180114672

2018-04-26

Monochromator and charged particle beam apparatus comprising the same

#11

20180082829

2018-03-22

Retarding potential type energy analyzer

#12

20170301512

2017-10-19

Energy discriminating electron detector and scanning electron microscope using the same

#13

20170207058

2017-07-20

Electron energy loss spectrometer

#14

20170153172

2017-06-01

PARTICLE CONCENTRATION MECHANISM, PARTICLE MEASURING DEVICE, AND SUBSTRATE PROCESSING APPARATUS INCLUDING PARTICLE MEASURING DEVICE

#15

20150136967

2015-05-21

Deceleration apparatus for ribbon and spot beams

#16

20140366801

2014-12-18

High-energy ion implanter

#17

20140345522

2014-11-27

High-energy ion implanter

#18

20130015348

2013-01-17

Curved heated ion transfer optics

#19

20120261571

2012-10-18

Imaging energy filter for electrically charged particles and spectroscope having same

#20

20120261566

2012-10-18

Aberration-corrected wien ExB mass filter with removal of neutrals from the Beam

#21

20120112090

2012-05-10

Charged particle source with integrated electrostatic energy filter

#22

20120097861

2012-04-26

Deceleration apparatus for ribbon and spot beams

#23

20120074315

2012-03-29

High resolution energy-selecting electron beam apparatus

#24

20110300599

2011-12-08

Methods for improving the bioactivity characteristics of a surface and objects with surfaces improved thereby

#25

20110155921

2011-06-30

System and method for controlling deflection of a charged particle beam within a graded electrostatic lens

#26

20100327180

2010-12-30

Beam quality in FIB systems

#27

20100187436

2010-07-29

High resolution gas field ion column

#28

20100163725

2010-07-01

Charged particle analyser and method using electrostatic filter grids to filter charged particles

#29

20100038553

2010-02-18

System and method of beam energy identification for single wafer ion implantation

#30

20090242791

2009-10-01

Two-grid ion energy analyzer and methods of manufacturing and operating

#31

20090242790

2009-10-01

Ion energy analyzer and methods of manufacturing and operating

#32

20070221846

2007-09-27

Scanning electron microscope

#33

20070210249

2007-09-13

Electron Spectroscope With Emission Induced By A Monochromatic Electron Beam

#34

20070114455

2007-05-24

Ion beam device

#35

20060163473

2006-07-27

Ion optics systems

#36

20060113474

2006-06-01

Scanning electron microscope

#37

20060113470

2006-06-01

High resolution atom probe

#38

20060060780

2006-03-23

Apparatus and method for E-beam dark field imaging

#39

20060022147

2006-02-02

Method and device of monitoring and controlling ion beam energy distribution

#40

20050133719

2005-06-23

Scanning electron microscope