206359 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging Arrangements for energy or mass analysis
Sub-classes:HIGH ENERGY IMPLANTER WITH SMALL FOOTPRINT
#2HIGH-PERFORMANCE ADAPTABLE SAMPLING SYSTEM
#3HIGH ENERGY IMPLANTER WITH SMALL FOOTPRINT
#4Fluorine based molecular co-gas when running dimethylaluminum chloride as a source material to generate an aluminum ion beam
#5SURFACE ANALYSIS SYSTEM COMPRISING A PULSED ELECTRON SOURCE
#6Ion source gas injection beam shaping
#7Fluorine based molecular co-gas when running dimethylaluminum chloride as a source material to generate an aluminum ion beam
#8Input lens and electron spectrometer
#9METHOD OF ENHANCING THE ENERGY AND BEAM CURRENT ON RF BASED IMPLANTER
#10CHARGE STRIPPING FOR ION IMPLANTATION SYSTEMS
#11Scan and corrector magnet designs for high throughput scanned beam ion implanter
#12Scanning magnet design with enhanced efficiency
#13Systems and methods for using multimodal imaging to determine structure and atomic composition of specimens
#14Ion beam quality control using a movable mass resolving device
#15Systems and method for using multimodal imaging to determine structure and atomic composition of specimens
#16Electron energy loss spectrometer using direct detection sensor
#17Energy discriminating electron detector and scanning electron microscope using the same
#18Method of mass spectrometry and a mass spectrometer
#19Electron energy loss spectrometer using direct detection sensor
#20Analyzing energy of charged particles
#21Ion implantation system and method with variable energy control
#22High energy ion implanter, beam current adjuster, and beam current adjustment method
#23Hybrid generators and methods of using them
#24Charged particle beam apparatus
#25SMS probe and SEM imaging system and methods of use
#26Electron beam conditioning
#27Sequential radial mirror analyser
#28Laser Atom Probe and Laser Atom Probe Analysis Methods
#29Detector system for use with transmission electron microscope spectroscopy
#30Method of using a direct electron detector for a TEM
#31Transmission electron microscope
#32Apparatus for transmission of energy and/or for transportation of an ion as well as a particle beam device having an apparatus such as this
#33COMPONENT FOR MANIPULATING A STREAM OF CHARGED PARTICLES
#34Method for discrimination of backscattered from incoming electrons in imaging electron detectors with a thin electron-sensitive layer
#35Ion source cleaning end point detection
#36PLASMA GENERATING APPARATUS RENDERED ELECTRICALLY NEUTRAL ON THE PERIPHERY OF PLASMA GUN
#37SPHERICAL ABERRATION CORRECTION DECELERATING LENS, SPHERICAL ABERRATION CORRECTION LENS SYSTEM, ELECTRON SPECTROMETER, AND PHOTOELECTRON MICROSCOPE
#38Electron spectroscopy
#39Low contamination, low energy beamline architecture for high current ion implantation
#40Techniques for commensurate cusp-field for effective ion beam neutralization
#41Ion implanting apparatus
#42Apparatus and method for partial ion implantation
#43Shielding assembly for semiconductor manufacturing apparatus and method of using the same
#44Manufacturing equipment using ION beam or electron beam
#45Method and device for distance measurement
#46Ion implantation monitor system and method thereof
#47Electron microscope
#48Scan and corrector magnet designs for high throughput scanned beam ion implanter