Patents-Review.com
ClassID:

206362 ⎘

H01J2237/055 - CPC Classification

Classification description:

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Arrangements for energy or mass analysis magnetic

Recent Application in this class:
#1
20260120990
2026-04-30

ELECTRON GUN AND ELECTRON MICROSCOPE

 #2
20220406558
2022-12-22

Electron gun and electron microscope

 #3
20220068587
2022-03-03

Apparatus for multiple charged-particle beams

 #4
20210249222
2021-08-12

Apparatus and method for metal contamination control in an ion implantation system using charge stripping mechanism

 #5
20200152409
2020-05-14

Ion implanter and beam park device

 #6
20190371563
2019-12-05

Ion beam irradiation apparatus

 #7
20190157035
2019-05-23

Ion implanter and method of controlling ion implanter

 #8
20180330920
2018-11-15

Ion implantation apparatus

 #9
20180254169
2018-09-06

Post column filter with enhanced energy range

 #10
20170140898
2017-05-18

Ion generator and method of controlling ion generator

 #11
20160126082
2016-05-05

Mass analyzing electromagnet and ion beam irradiation apparatus

 #12
20150069261
2015-03-12

Method for transmitting a broadband ion beam and ion implanter

 #13
20140312223
2014-10-23

Broadband ion beam analyzer

 #14
20130264491
2013-10-10

Method for dual energy implantation for ultra-shallow junction formation of MOS devices

 #15
20130256552
2013-10-03

Ion beam bending magnet for a ribbon-shaped ion beam

 #16
20130001414
2013-01-03

SYSTEM AND METHOD FOR PRODUCING A MASS ANALYZED ION BEAM FOR HIGH THROUGHPUT OPERATION

 #17
20120298854
2012-11-29

Mass analysis variable exit aperture

 #18
20120261566
2012-10-18

Aberration-corrected wien ExB mass filter with removal of neutrals from the Beam

 #19
20120235053
2012-09-20

Mass analyzer apparatus and systems operative for focusing ribbon ion beams and for separating desired ion species from unwanted ion species in ribbon ion beams

 #20
20120168622
2012-07-05

SYSTEM AND METHOD FOR PRODUCING A MASS ANALYZED ION BEAM

 #21
20120074315
2012-03-29

High resolution energy-selecting electron beam apparatus

 #22
20110180724
2011-07-28

Sample transfer device and sample transferring method

 #23
20110143512
2011-06-16

Method for dual energy implantation for ultra-shallow junction formation of MOS devices

 #24
20100327180
2010-12-30

Beam quality in FIB systems

 #25
20100181499
2010-07-22

Enhanced low energy ion beam transport in ion implantation

 #26
20100140494
2010-06-10

Collimator magnet for ion implantation system

 #27
20100116983
2010-05-13

Mass analysis magnet for a ribbon beam

 #28
20090302214
2009-12-10

Ion implanting apparatus and method of correcting beam orbit

 #29
20090189096
2009-07-30

Apparatus and methods for ion beam implantation using ribbon and spot beams

 #30
20090026390
2009-01-29

Techniques for plasma injection

 #31
20080315113
2008-12-25

BEAM GUIDANCE MAGNET

 #32
20080302972
2008-12-11

Broad energy-range ribbon ion beam collimation using a variable-gradient dipole

 #33
20080135777
2008-06-12

Ion implanter

 #34
20080135775
2008-06-12

Techniques for confining electrons in an ion implanter

 #35
20080121822
2008-05-29

Ion implantation apparatus

 #36
20080078956
2008-04-03

Broad beam ion implantation architecture

 #37
20080078954
2008-04-03

Beam line architecture for ion implanter

 #38
20080067436
2008-03-20

System for magnetic scanning and correction of an ion beam

 #39
20080067435
2008-03-20

Beam tuning with automatic magnet pole rotation for ion implanters

 #40
20080067398
2008-03-20

Analyzing electromagnet

 #41
20080067397
2008-03-20

Beam processing system and beam processing method

 #42
20070200070
2007-08-30

Aberration-correcting cathode lens microscopy instrument

 #43
20070176123
2007-08-02

Ion implanter having a superconducting magnet

 #44
20060197037
2006-09-07

Beam neutralization in low-energy high-current ribbon-beam implanters

 #45
20060197029
2006-09-07

Broad energy-range ribbon ion beam collimation using a variable-gradient dipole

 #46
20060169912
2006-08-03

Electron injection in ion implanter magnets

 #47
20060169911
2006-08-03

Electron confinement inside magnet of ion implanter

 #48
20060113495
2006-06-01

Apparatus and methods for ion beam implantation