Patents-Review.com
ClassID:

206397 ⎘

H01J2237/103 - CPC Classification

Classification description:

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Lenses characterised by lens type

Sub-classes:
Recent Application in this class:
#1
20250232945
2025-07-17

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

 #2
20250132119
2025-04-24

MULTI-ELECTRON BEAM IMAGE ACQUISITION APPARATUS, MULTI-ELECTRON BEAM IMAGE ACQUISITION METHOD, ELECTRON BEAM IMAGE ACQUISITION APPARATUS, AND ELECTRON BEAM IMAGE ACQUISITION METHOD

 #3
20240128044
2024-04-18

Apparatus of plural charged-particle beams

 #4
20240096586
2024-03-21

Method and system of image-forming multi-electron beams

 #5
20230411108
2023-12-21

CHARGED PARTICLE BEAM DEVICE

 #6
20230395349
2023-12-07

Creating multiple electron beams with a photocathode film

 #7
20230282441
2023-09-07

Apparatus of plural charged-particle beams

 #8
20230170181
2023-06-01

MULTIPLE PARTICLE BEAM SYSTEM WITH A MIRROR MODE OF OPERATION, METHOD FOR OPERATING A MULTIPLE PARTICLE BEAM SYSTEM WITH A MIRROR MODE OF OPERATION AND ASSOCIATED COMPUTER PROGRAM PRODUCT

 #9
20230154723
2023-05-18

Systems and methods for real time stereo imaging using multiple electron beams

 #10
20220367142
2022-11-17

Particle beam device having a deflection unit

 #11
20220044912
2022-02-10

Method of forming plasma processing apparatus, related apparatus, and method of forming semiconductor device using the same

 #12
20210233736
2021-07-29

Apparatus of plural charged-particle beams

 #13
20210151286
2021-05-20

Transmission electron microscope and method of controlling same

 #14
20200258714
2020-08-13

Device and method for operating a charged particle device with multiple beamlets

 #15
20200152412
2020-05-14

Apparatus of plural charged-particle beams

 #16
20190304739
2019-10-03

Aberration corrector and charged particle beam device

 #17
20190122859
2019-04-25

Charged particle beam writing apparatus and charged particle beam writing method

 #18
20190122858
2019-04-25

Charged particle beam writing apparatus and charged particle beam writing method

 #19
20180158642
2018-06-07

Method for inspecting a specimen and charged particle multi-beam device

 #20
20180114672
2018-04-26

Monochromator and charged particle beam apparatus comprising the same

 #21
20170287675
2017-10-05

Method and system for charge control for imaging floating metal structures on non-conducting substrates

 #22
20170271124
2017-09-21

Secondary particle detection system of scanning electron microscope

 #23
20170254755
2017-09-07

In-situ spatially resolved plasma monitoring by using optical emission spectroscopy

 #24
20170236683
2017-08-17

Particle beam apparatus and method for operating a particle beam apparatus

 #25
20170069456
2017-03-09

Focused ion beam apparatus

 #26
20170053777
2017-02-23

Charged particle beam device and detection method using said device

 #27
20170025251
2017-01-26

Charged particle beam apparatus

 #28
20170025243
2017-01-26

Apparatus of plural charged-particle beams

 #29
20160343535
2016-11-24

Charged particle beam drawing apparatus and charged particle beam drawing method

 #30
20160284505
2016-09-29

Apparatus of plural charged-particle beams

 #31
20160233049
2016-08-11

Charged particle beam device

 #32
20160225581
2016-08-04

Electron microscope

 #33
20160148782
2016-05-26

Scanning electron microscope

 #34
20150380213
2015-12-31

Apparatus and method for calculating drawing speeds of a charged particle beam

 #35
20150357160
2015-12-10

Ion implantation apparatus and ion implantation method

 #36
20150357157
2015-12-10

Particle beam system and method for operating a particle optical unit

 #37
20150228455
2015-08-13

Charged particle beam writing apparatus, and charged particle beam writing method

 #38
20150228454
2015-08-13

High-energy ion implanter, beam collimator, and beam collimation method

 #39
20150179394
2015-06-25

Charged Particle Device

 #40
20150123005
2015-05-07

Particle beam transport apparatus

 #41
20150069232
2015-03-12

Hot spot identification, inspection, and review

 #42
20140367585
2014-12-18

Method for axial alignment of charged particle beam and charged particle beam system

 #43
20140145089
2014-05-29

Apparatus having a magnetic lens configured to diverge an electron beam

 #44
20120119107
2012-05-17

Method for axial alignment of charged particle beam and charged particle beam system

 #45
20110210263
2011-09-01

Particle beam transport apparatus and method of transporting a particle beam with small beam spot size

 #46
20100258738
2010-10-14

Device for deflecting or guiding in a particle beam

 #47
20100003423
2010-01-07

PLASMA GENERATING APPARATUS AND FILM FORMING APPARATUS USING PLASMA GENERATING APPARATUS

 #48
20090321630
2009-12-31

Post-decel magnetic energy filter for ion implantation systems

 #49
20090255803
2009-10-15

PLASMA GENERATING APPARATUS, DEPOSITION APPARATUS, AND DEPOSITION METHOD

 #50
20090108200
2009-04-30

Method and system of performing three-dimensional imaging using an electron microscope

 #51
20050040137
2005-02-24

Low-aberration deflectors for use in charged-particle-beam optical systems, and methods for fabricating such deflectors