H01J2237/10 - CPC Classification Index

ClassID:

206396 ⎘

H01J2237/10 - CPC Classification

Classification description:

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging Lenses

Sub-classes:

H01J2237/103 » characterised by lens type 49
H01J2237/12 » electrostatic 48
H01J2237/14 » magnetic 61

Recent Application in this class:

20250336636

2025-10-30

METHOD AND SYSTEM FOR FINE FOCUSING SECONDARY BEAM SPOTS ON DETECTOR FOR MULTI-BEAM INSPECTION APPARATUS

20230260748

2023-08-17

MULTI-ELECTRON BEAM WRITING APPARATUS AND MULTI-ELECTRON BEAM WRITING METHOD

20220082733

2022-03-17

SEMICONDUCTOR LENS OPTIMIZATION OF FABRICATION

20210207945

2021-07-08

Height measuring device, charged particle beam apparatus, and height measuring method

20190096629

2019-03-28

A CORRECTOR STRUCTURE AND A METHOD FOR CORRECTING ABERRATION OF AN ANNULAR FOCUSED CHARGED-PARTICLE BEAM

20180172885

2018-06-21

Semiconductor lens optimization of fabrication

20180166253

2018-06-14

Image capture assembly and method for electron back scatter diffraction

20170316915

2017-11-02

Charged particle beam apparatus

20170299781

2017-10-19

Semiconductor lens optimization of fabrication

#10

20170047192

2017-02-16

Charged particle beam device and method for inspecting and/or imaging a sample

#11

20170011898

2017-01-12

Beam transmission system and method thereof

#12

20160322192

2016-11-03

Inspection apparatus

#13

20160268929

2016-09-15

Micro stage for particle beam column using piezo elements as actuator

#14

20160260577

2016-09-08

Method and apparatus for inspection of scattered hot spot areas on a manufactured substrate

#15

20160225579

2016-08-04

Particle beam microscope and method for operating a particle beam microscope

#16

20160126058

2016-05-05

Charged particle-beam device and specimen observation method

#17

20160118216

2016-04-28

Method for measuring a distance of a component from an object and for setting a position of a component in a particle beam device

#18

20160020067

2016-01-21

Radiation analyzer including a support for tilting an energy-dispersive radiation detector

#19

20160005570

2016-01-07

Ion beam line

#20

20150348742

2015-12-03

Charged particle optical apparatus having a selectively positionable differential pressure module

#21

20150340201

2015-11-26

Apparatus and method of applying small-angle electron scattering to characterize nanostructures on opaque substrate

#22

20150332888

2015-11-19

High-speed multi-frame dynamic transmission electron microscope image acquisition system with arbitrary timing

#23

20150287570

2015-10-08

Inspection apparatus

#24

20150279615

2015-10-01

Imaging a Sample with Multiple Beams and Multiple Detectors

#25

20150262785

2015-09-17

Transmission electron microscope and method of displaying TEM images

#26

20150179398

2015-06-25

Charged particle lithography system with sensor assembly

#27

20150144788

2015-05-28

Charged particle beam apparatus

#28

20150144785

2015-05-28

Asymmetric electrostatic quadrupole deflector for improved field uniformity

#29

20150136980

2015-05-21

Image acquisition method and transmission electron microscope

#30

20150136979

2015-05-21

Charged particle beam device

#31

20150136978

2015-05-21

Focused ion beam system and method of making focal adjustment of ion beam

#32

20150129763

2015-05-14

Charged particle beam device

#33

20150108351

2015-04-23

Scanning electron microscope

#34

20150064888

2015-03-05

Ion implantation apparatus, beam parallelizing apparatus, and ion implantation method

#35

20150014530

2015-01-15

Charged particle beam apparatus

#36

20140261171

2014-09-18

Ion beam line

#37

20140150723

2014-06-05

Ion implantation apparatus

#38

20120145894

2012-06-14

Method and apparatus for inspection of scattered hot spot areas on a manufactured substrate

#39

20110095182

2011-04-28

Electron microscope with electron spectrometer

#40

20100102225

2010-04-29

Charged particle beam inspection apparatus and inspection method using charged particle beam

#41

20090045340

2009-02-19

Electron microscope with electron spectrometer

#42

20070125956

2007-06-07

Particle-optical projection system

#43

20070023673

2007-02-01

Electric-magnetic field-generating element and assembling method for same

#44

20050201246

2005-09-15

Particle-optical projection system

#45

14828352

2016-05-24

Charged particle beam device, beam deflector device and methods of operating thereof

#46

14495580

2016-02-02

Electron microscope plasma cleaner