206416 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Means for deflecting or directing discharge Tilting or rocking beam around an axis substantially at an angle to optical axis
Sub-classes:COLLATION SYSTEM
#2GRID STRUCTURES OF ION BEAM ETCHING (IBE) SYSTEMS
#3METHOD FOR OPERATING A PARTICLE BEAM APPARATUS, COMPUTER PROGRAM PRODUCT AND PARTICLE BEAM APPARATUS FOR CARRYING OUT THE METHOD
#4METHOD OF DETERMINING AN ENERGY SPECTRUM OR ENERGY WIDTH OF A CHARGED PARTICLE BEAM, AND CHARGED PARTICLE BEAM IMAGING DEVICE
#5TEM Orientation Mapping via Dark-Field Vector Images
#6Grid Structures Of Ion Beam Etching (IBE) Systems
#7PROCESSING APPARATUS AND METHOD OF MANUFACTURE
#8TECHNIQUES AND APPARATUS FOR UNIDIRECTIONAL HOLE ELONGATION USING ANGLED ION BEAMS
#9Method Of Imaging And Milling A Sample
#10Grid structures of ion beam etching (IBE) systems
#11Geometry based three dimensional reconstruction of a semiconductor specimen by solving an optimization problem, using at least two SEM images acquired at different illumination angles
#12Apparatus and method for repairing a photolithographic mask
#13Tilting parameters calculating device, sample stage, charged particle beam device, and program
#14Enabling high throughput electron channeling contrast imaging (ECCI) by varying electron beam energy
#15Scanning transmission electron microscope
#16Automatic alignment for high throughput electron channeling contrast imaging
#17Beam alignment method and electron microscope
#18Charged particle beam apparatus and trajectory correction method in charged particle beam apparatus
#19Angular scanning using angular energy filter
#20Charged particle beam apparatus
#21Method and system for improving characteristic peak signals in analytical electron microscopy
#22Scanning electron microscope and inspection method using same
#23SACP method and particle optical system for performing the method
#24Method and device for measuring electron diffraction of a sample
#25Particle-beam exposure apparatus with overall-modulation of a patterned beam
#26Charged particle beam apparatus and method for operating a charged particle beam apparatus
#27Charged particle beam device and method for inspecting specimen
#28Charged particle beam apparatus and charged particle beam irradiation method
#29Charged particle beam apparatus and charged particle beam irradiation method