206417 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Means for deflecting or directing discharge; Tilting or rocking beam around an axis substantially at an angle to optical axis dynamically, e.g. to obtain same impinging angle on whole area
CHARGED-PARTICLE BEAM APPARATUS WITH BEAM-TILT AND METHODS THEREOF
#2Modulation of rolling k vectors of angled gratings
#3Transmission electron microscope and inspection method using transmission electron microscope
#4In situ angle measurement using channeling
#5Modulation of rolling k vectors of angled gratings
#6Modulation of ion beam angle
#7Modulation of rolling K vectors of angled gratings
#8Scanning transmission electron microscope
#9Method of reducing coma and chromatic aberration in a charged particle beam device, and charged particle beam device
#10Charged particle beam apparatus and trajectory correction method in charged particle beam apparatus
#11Method and system for improving characteristic peak signals in analytical electron microscopy
#12Technique for ion beam angle spread control
#13Scanning systems and methods for providing ions from an ion beam to a workpiece