MEASUREMENT DEVICE

MAGNETIC MAGNIFICATION CONTROL FOR ELECTRON MICROSCOPES

SYSTEMS AND METHODS FOR COMPENSATING DISPERSION OF A BEAM SEPARATOR IN A SINGLE-BEAM OR MULTI-BEAM APPARATUS

APPARATUS AND METHOD FOR ATOMIC LAYER ETCHING BASED ON CONTROL OF CHARGED PARTICLES

SUBSTRATE PROCESSING APPARATUS

GAS CLUSTER ION BEAM APPARATUS

ELECTRON BEAM DEVICE FOR SURFACE TREATMENT

PROTECTING A DETECTOR WHILE DISCHARGING A REGION OF A SAMPLE

Aberration Correction Device and Aberration Correction Method

ELECTRODE CONFIGURATIONS AND MAGNET CONFIGURATIONS FOR PROCESSING CHAMBERS, AND RELATED METHODS AND APPARATUS, FOR SEMICONDUCTOR MANUFACTURING

PERMEANCE MAGNETIC ASSEMBLY

RIBBON BEAM ANGLE ADJUSTMENT IN AN ION IMPLANTATION SYSTEM

CHARGED PARTICLE OPTICS, CHARGED PARTICLE BEAM APPARATUS, AND METHOD FOR SCANNING A CHARGED PARTICLE BEAM

Method and system of image-forming multi-electron beams

Permeance magnetic assembly

MULTIPLE PARTICLE BEAM SYSTEM WITH A CONTRAST CORRECTION LENS SYSTEM

Ion gun and vacuum processing apparatus

Ribbon beam angle adjustment in an ion implantation system

Permeance magnetic assembly

Particle beam device having a deflection unit

Charged particle beam device

Ion gun and vacuum processing apparatus

SYSTEMS AND METHODS FOR COMPENSATING DISPERSION OF A BEAM SEPARATOR IN A SINGLE-BEAM OR MULTI-BEAM APPARATUS

Supported X-ray horn for controlling e-beams

Apparatus of charged-particle beam such as electron microscope comprising co-condensers for continuous image resolution tuning

Particle beam system for azimuthal deflection of individual particle beams and method for azimuth correction in a particle beam system

Electron beam system for inspection and review of 3D devices

Multipactor plasma ignition devices and techniques

System combination of a particle beam system and a light-optical system with collinear beam guidance, and use of the system combination

Arc source with confined magnetic field

ARC source

Interchangeable magnet pack

Scan and corrector magnet designs for high throughput scanned beam ion implanter

Permeance magnetic assembly

Charged particle beam device and optical-axis adjusting method thereof

Method of ion implantation and an apparatus for the same

Scanning magnet design with enhanced efficiency

Coil-integrated-type yoke and manufacturing method of the same

Methods and systems for plasma deposition and treatment

Methods and apparatus for electron beam etching process

MULTIPLE ELECTRON BEAM IMAGE ACQUISITION APPARATUS AND MULTIPLE ELECTRON BEAM IMAGE ACQUISITION METHOD

Ion implantation apparatus and measurement device

Magnetic lens and exciting current control method

Charged particle beam axial alignment device, charged particle beam irradiation device and charged particle beam axial alignment method

Apparatus and method for inspecting a surface of a sample, using a multi-beam charged particle column

Signal separator for a multi-beam charged particle inspection apparatus

Aberration correcting device for an electron microscope and an electron microscope comprising such a device

Plasma processing apparatus

Systems and methods for compensating dispersion of a beam separator in a single-beam or multi-beam apparatus

Methods and systems for plasma deposition and treatment

Particle source for producing a particle beam and particle-optical apparatus

Energy filter and charged particle beam system

Object preparation device and particle beam device having an object preparation device and method for operating the particle beam device

Patterned substrate imaging using multiple electron beams

Time-resolved charged particle microscopy

Ion implantation method and ion implantation apparatus

Multicolumn charged particle beam exposure apparatus

Charged particle beam device

Multi-beam lens device, charged particle beam device, and method of operating a multi-beam lens device

Particle beam apparatus and method for operating a particle beam apparatus

Particle beam treatment system with solenoid magnets

Charged particle beam device

Beam Guidance System, Particle Beam Therapy System and Method

Dipole ring magnet assisted microwave radial line slot antenna plasma processing method and apparatus

Adjustable mass resolving aperture

Adjustable mass resolving aperture

Magnetic field fluctuation for beam smoothing

SYSTEMS AND METHODS FOR BEAM ANGLE ADJUSTMENT IN ION IMPLANTERS WITH BEAM DECELARATION

Device and method for optimizing diffusion section of electron beam

Combined multipole magnet and dipole scanning magnet

Interchangeable magnet pack

ARC-PLASMA FILM FORMATION DEVICE

Annular cooling fluid passage for magnets

Charged particle beam writing apparatus and charged particle beam writing method

Charged particle beam application device

Electromagnet support frame

Angular scanning using angular energy filter

Charged particle beam treatment apparatus and method of adjusting path length of charged particle beam

Ion implanter, beam energy measuring device, and method of measuring beam energy

High-energy ion implanter, beam collimator, and beam collimation method

Method and apparatus for control of coherent synchrotron radiation effects during recirculation with bunch compression

Circular accelerator and particle beam therapy apparatus

Method for transmitting a broadband ion beam and ion implanter

Method for manufacturing patterned layer and method for manufacturing electrochromic device

Apparatus for generating a hollow cathode arc discharge plasma

Method and arrangement for generating a jet of fluid, method and system for transforming the jet into a plasma, and uses of said system

Magnetic deflector for an electron column

PLASMA GENERATING APPARATUS AND FILM FORMING APPARATUS USING PLASMA GENERATING APPARATUS

Open-ended electromagnetic corrector assembly and method for deflecting, focusing, and controlling the uniformity of a traveling ion beam

Plasma ion source mass spectrometer

"Iontron" ion beam deposition source and a method for sputter deposition of different layers using this source

Broad energy-range ribbon ion beam collimation using a variable-gradient dipole

Techniques for confining electrons in an ion implanter

Beam line architecture for ion implanter

Beam tuning with automatic magnet pole rotation for ion implanters

Analyzing electromagnet

Electromagnet with active field containment

Technique for improving uniformity of a ribbon beam

Deflecting electromagnet and ion beam irradiating apparatus

Broad energy-range ribbon ion beam collimation using a variable-gradient dipole

Thermal compensation in magnetic field influencing of an electron beam

Magnet for scanning ion beams

Method and fine-control collimator for accurate collimation and precise parallel alignment of scanned ion beams

Ion beam slit extraction with mass separation

Electromagnetic regulator assembly for adjusting and controlling the current uniformity of continuous ion beams

Scan and corrector magnet designs for high throughput scanned beam ion implanter

Electron flood lithography

Charged particle beam device, system for a charged particle beam device, and method for operating a charged particle beam device

System for imaging a signal charged particle beam, method for imaging a signal charged particle beam, and charged particle beam device

Charged particle beam device, beam deflector device and methods of operating thereof

Beam separator device, charged particle beam device and methods of operating thereof