COLLATION SYSTEM

Electron gun and system and method using electron gun

METHOD OF DETERMINING AN ENERGY SPECTRUM OR ENERGY WIDTH OF A CHARGED PARTICLE BEAM, AND CHARGED PARTICLE BEAM IMAGING DEVICE

Control method for multi-phase winding deflection scanning device

Charged particle beam device

Electron beam vaporizer and method for vaporizing a vaporization material by means of an electron beam

Compact deflecting magnet

Compact deflecting magnet

Multicolumn charged particle beam exposure apparatus

Magnetic field fluctuation for beam smoothing

Apparatus of plural charged particle beams with multi-axis magnetic lenses

Annular cooling fluid passage for magnets

MAGNETIC SCANNING SYSTEM FOR ION IMPLANTERS

Annular cooling fluid passage for magnets

Magnetic field fluctuation for beam smoothing

Magnetic scanning system with improved efficiency

Pattern modification schemes for improved FIB patterning

Apparatus and method for ion beam implantation using scanning and spot beams with improved high dose beam quality

Technique for reducing magnetic fields at an implant location

Ion implantation apparatus

Electric charged particle beam microscopy and electric charged particle beam microscope

Irradiating device and method for controlling the same

Method of aberration correction and electron beam system

Method and system for discharging a sample

Electron beam apparatus and a device manufacturing method using the same apparatus

Beam directing system and method for use in a charged particle beam column

Low-aberration deflectors for use in charged-particle-beam optical systems, and methods for fabricating such deflectors