H01J2237/164 - CPC Classification Index

#1

20180122617

2018-05-03

Electron scanning microscope and image generation method

#2

20180033589

2018-02-01

Electron microscope with multiple types of integrated x-ray detectors arranged in an array

#3

20170271125

2017-09-21

X-ray analysis in air

#4

20160343538

2016-11-24

Electron scanning microscope and image generation method

#5

20160336145

2016-11-17

Charged-particle-beam device, specimen-image acquisition method, and program recording medium

#6

20160307724

2016-10-20

Electron exit window foil

#7

20160282714

2016-09-29

Inspection of a lithographic mask that is protected by a pellicle

#8

20160240345

2016-08-18

Charged particle source arrangement for a charged particle beam device, charged particle beam device for sample inspection, and method for providing a primary charged particle beam for sample inspection in a charged particle beam

#9

20160233051

2016-08-11

X-ray analysis in air

#10

20160203944

2016-07-14

Charged particle beam apparatus and sample image acquiring method

#11

20150380208

2015-12-31

Charged particle beam device, method for adjusting charged particle beam device, and method for inspecting or observing sample

#12

20150380207

2015-12-31

Scanning electron microscope

#13

20150380197

2015-12-31

Method for assembling an electron exit window and an electron exit window assembly

#14

20150255244

2015-09-10

Sample storage container, charged particle beam apparatus, and image acquiring method

#15

20150243475

2015-08-27

Scanning electron microscope, an interface and a method for observing an object within a non-vacuum environment

#16

20150228449

2015-08-13

Charged particle beam device, position adjusting method for diaphragm, and diaphragm position adjusting jig

#17

20150228448

2015-08-13

Observation apparatus and optical axis adjustment method

#18

20150213999

2015-07-30

Charged Particle Beam Apparatus

#19

20150129763

2015-05-14

Charged particle beam device

#20

20150076347

2015-03-19

Charged particle beam apparatus

#21

20150028220

2015-01-29

Electron exit window foil

#22

20150028203

2015-01-29

Inspection of a lithographic mask that is protected by a pellicle

#23

20140361166

2014-12-11

Interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope

#24

20140175278

2014-06-26

Charged particle beam apparatus

#25

20140151553

2014-06-05

Charged particle beam device, method for adjusting charged particle beam device, and method for inspecting or observing sample

#26

20140132299

2014-05-15

Electrical inspection of electronic devices using electron-beam induced plasma probes

#27

20140117232

2014-05-01

Scanning electron microscope, an interface and a method for observing an object within a non-vacuum environment

#28

20130313430

2013-11-28

Charged particle beam device

#29

20130094993

2013-04-18

Assembly and method for reducing foil wrinkles

#30

20130009077

2013-01-10

Electron beam exit window in electron beam emitter and method for forming the same

#31

20130000253

2013-01-03

Assembly and method for reducing foil wrinkles

#32

20120269997

2012-10-25

Method for assembling an electron exit window and an electron exit window assembly

#33

20120241608

2012-09-27

Interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope

#34

20120160999

2012-06-28

High collection efficiency X-ray spectrometer system with integrated electron beam stop, electron detector and X-ray detector for use on electron-optical beam lines and microscopes

#35

20110233414

2011-09-29

Method and device for monitoring the intensity of an electron beam

#36

20110210247

2011-09-01

Vacuumed device and a scanning electron microscope

#37

20110168889

2011-07-14

Scanning electron microscope, an interface and a method for observing an object within a non-vacuum environment

#38

20110012495

2011-01-20

Methods and apparatuses for reducing heat on an emitter exit window

#39

20100140470

2010-06-10

Interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope

#40

20090212681

2009-08-27

Electron beam generating apparatus

#41

20090173897

2009-07-09

Radiation window with coated silicon support structure

#42

20080067406

2008-03-20

Irradiating device and method for controlling the same

#43

20070114433

2007-05-24

Sensor and system for sensing an electron beam

#44

20060000986

2006-01-05

Liquid crystal alignment using electron beam exposure