ClassID:

206432

H01J2237/16 - CPC Classification

Classification description:

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging Vessels

Sub-classes:
Recent Application in this class:
#1
20240363308
2024-10-31

Concentrated Solar Irradiation of Targets in Plasmas

#2
20230386696
2023-11-30

Vacuum chamber arrangement for charged particle beam generator

#3
20210383941
2021-12-09

Vacuum chamber arrangement for charged particle beam generator

#4
20200194141
2020-06-18

Vacuum chamber arrangement for charged particle beam generator

#5
20200185189
2020-06-11

Charged-particle beam apparatus

#6
20190080881
2019-03-14

Examination container and electron microscope

#7
20190006207
2019-01-03

SUBSTRATE PROCESSING APPARATUS

#8
20180228009
2018-08-09

XRF analyzer with separate source and detector heat sinks

#9
20170299529
2017-10-19

XRF analyzer with a hand shield

#10
20170250053
2017-08-31

High voltage shielding and cooling in a charged particle beam generator

#11
20170229276
2017-08-10

High voltage feedthrough assembly, time-resolved transmission electron microscope and method of electrode manipulation in a vacuum environment

#12
20170221674
2017-08-03

Vacuum chamber arrangement for charged particle beam generator

#13
20170213694
2017-07-27

Loading station for transferring frozen samples at low temperatures

#14
20170213692
2017-07-27

Universal liquid sample device and process for high resolution transmission electron microscope imaging and multimodal analyses of liquid sample materials

#15
20170032943
2017-02-02

Time varying segmented pressure control

#16
20160189987
2016-06-30

Substrate processing apparatus

#17
20160071734
2016-03-10

Process gas enhancement for beam treatment of a substrate

#18
20150228454
2015-08-13

High-energy ion implanter, beam collimator, and beam collimation method

#19
20150221469
2015-08-06

Top opening-closing mechanism and inspection apparatus

#20
20150179387
2015-06-25

Charged particle beam generating apparatus, charged particle beam apparatus, high voltage generating apparatus, and high potential apparatus

#21
20150137010
2015-05-21

Multi-electrode stack arrangement

#22
20150137009
2015-05-21

Multi-electrode cooling arrangement

#23
20150136995
2015-05-21

Multi-electrode electron optics

#24
20150124936
2015-05-07

Rotating-anode X-ray tube assembly with cooling system

#25
20150124229
2015-05-07

Charged particle lithography system and beam generator

#26
20150076347
2015-03-19

Charged particle beam apparatus

#27
20140369470
2014-12-18

Radiation generating tube, and radiation generating apparatus and radiation imaging system using the same

#28
20140175278
2014-06-26

Charged particle beam apparatus

#29
20130094008
2013-04-18

Target positioning device, method for driving a target positioning device, and a lithography system comprising such a target positioning device

#30
20130075253
2013-03-28

Titanium diboride coating for plasma processing apparatus

#31
20120100703
2012-04-26

Ion implantation system and ion implantation method using the same

#32
20110042579
2011-02-24

CHARGED PARTICLE LITHOGRAPHY APPARATUS AND METHOD OF GENERATING VACUUM IN A VACUUM CHAMBER

#33
20110017247
2011-01-27

Cleaning device for transmission electron microscopes

#34
20100327156
2010-12-30

Self-aligning floating ion-optics components

#35
20100258262
2010-10-14

Method and apparatus for producing large diameter superalloy ingots

#36
20100006756
2010-01-14

CHARGED PARTICLE BEAM APPARATUS AND METHOD FOR GENERATING CHARGED PARTICLE BEAM IMAGE

#37
20090280628
2009-11-12

Plasma immersion ion implantation process with chamber seasoning and seasoning layer plasma discharging for wafer dechucking

#38
20090250340
2009-10-08

Ion source and plasma processing apparatus

#39
20090215251
2009-08-27

Plasma immersion ion implantation process with chamber seasoning and seasoning layer plasma discharging for wafer dechucking

#40
20090200493
2009-08-13

Methods for in situ surface treatment in an ion implantation system

#41
20090039295
2009-02-12

DETACHABLE INNER SHIELD

#42
20080218054
2008-09-11

Carbon tube for electron beam application

#43
20080190928
2008-08-14

APPARATUS HAVING VACUUM VESSEL

#44
20080179033
2008-07-31

Method and apparatus for producing large diameter superalloy ingots

#45
20080087842
2008-04-17

Multivalent ion generating source and charged particle beam apparatus using such ion generating source

#46
20080073576
2008-03-27

Deposition reduction system for an ion implanter

#47
20080048118
2008-02-28

Electron beam apparatus and method for production of its specimen chamber

#48
20070152150
2007-07-05

Charged particle beam apparatus

#49
20070010097
2007-01-11

Apparatus and method for selected site backside unlayering of si, GaAs, GaAlAsof SOI technologies for scanning probe microscopy and atomic force probing characterization

#50
20060289754
2006-12-28

Charged particle beam apparatus

#51
20060289753
2006-12-28

Charged particle beam apparatus

#52
20060232445
2006-10-19

Electron beam apparatus and method for production of its specimen chamber

#53
20060219946
2006-10-05

Electron beam apparatus and method for production of its specimen chamber

#54
20050274910
2005-12-15

Ion beam system

#55
20050178966
2005-08-18

Light weight portable scanning electron microscope

#56
20050045822
2005-03-03

Charged particle beam apparatus