206435 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Vessels Sealing means
VACUUM SIMULATION FOR CHARGED-PARTICLE MICROSCOPY GRID RECEPTACLES
#2PRINTED CIRCUIT BOARD FOR SEALING VACUUM SYSTEM
#3WALL MEMBER AND PLASMA PROCESSING APPARATUS
#4CHARGED PARTICLE PROCESSING SYSTEM
#5SEALING ARTICLES FOR PLASMA RESISTANCE APPLICATIONS
#6In-Vacuum Rotatable RF Component
#7SEAL ASSEMBLY WITH A RETAINING MECHANISM
#8Optical Apparatus and Charged Particle Beam Apparatus
#9CHARGED PARTICLE BEAM DEVICES AND MEMBRANE ASSEMBLIES USEFUL THEREIN
#10FOCUSED ION BEAM SYSTEM
#11PROCESSING APPARATUS
#12PROCESS CHAMBER, SUBSTRATE TREATING APPARATUS INCLUDING THE SAME, AND OPERATING METHOD OF THE SUBSTRATE TREATING APPARATUS
#13GATE VALVE APPARATUS AND SEMICONDUCTOR MANUFACTURING APPARATUS
#14Gas reservoir, gas feed device having a gas reservoir, and particle beam apparatus having a gas feed device
#15Refillable ion chamber with automated purging system
#16PLASMA PROCESSING APPARATUS AND LID MEMBER
#17Refillable ion chamber with automated purging system
#18Pedestal support design for precise chamber matching and process control
#19PRINTED CIRCUIT BOARD FOR SEALING VACUUM SYSTEM
#20Substrate processing apparatus and method of driving relay member
#21CORROSION-RESISTANT COMPONENTS
#22Charged particle beam device
#23SHUTTER MECHANISM AND SUBSTRATE PROCESSING APPARATUS
#24VACUUM CHAMBER OPENING SYSTEM
#25SUBSTRATE PROCESSING CHAMBER COMPONENT ASSEMBLY WITH PLASMA RESISTANT SEAL
#26Rotary module for an accelerator system
#27Sample chamber device for electron microscope, and electron microscope comprising same
#28SUBSTRATE PROCESSING CHAMBER COMPONENT ASSEMBLY WITH PLASMA RESISTANT SEAL
#29Corrosion-resistant components and methods of making
#30CORROSION-RESISTANT COMPONENTS AND METHODS OF MAKING
#31X-ray tube including support for latitude supply wires
#32Inspection device
#33System and method for protection of vacuum seals in plasma processing systems
#34Charged particle beam device, method for adjusting charged particle beam device, and method for inspecting or observing sample
#35Method for assembling an electron exit window and an electron exit window assembly
#36Inspection apparatus
#37Enclosure for a target processing machine
#38Methods for Discretized Processing and Process Sequence Integration of Regions of a Substrate
#39Inspection or observation apparatus and sample inspection or observation method
#40Sealing groove methods for semiconductor equipment
#41Inspection apparatus
#42Inspection or observation apparatus and sample inspection or observation method
#43Charged particle beam device, method for adjusting charged particle beam device, and method for inspecting or observing sample
#44Methods for discretized processing and process sequence integration of regions of a substrate
#45Gasket with positioning feature for clamped monolithic showerhead electrode
#46APPARATUS FOR GENERATING ELECTRON BEAMS, AND METHOD FOR MANUFACTURING SAME
#47Method for assembling an electron exit window and an electron exit window assembly
#48Inspection device
#49Magnetron sputtering apparatus
#50Methods for discretized processing and process sequence integration of regions of a substrate
#51Methods for discretized processing and process sequence integration of regions of a substrate
#52Methods for discretized processing and process sequence integration of regions of a substrate
#53Methods for discretized processing and process sequence integration of regions of a substrate
#54Effective algorithm for warming a twist axis for cold ion implantations
#55Heated rotary seal and bearing for chilled ion implantation system
#56DEVICE FOR SEALING A CHAMBER INLET OR A CHAMBER OUTLET FOR A FLEXIBLE SUBSTRATE, SUBSTRATE PROCESSING APPARATUS, AND METHOD FOR ASSEMBLING SUCH A DEVICE
#57Ion implantation apparatus and a method
#58Ion implantation apparatus
#59Slider bearing for use with an apparatus comprising a vacuum chamber
#60Charged particle lithography apparatus and method of generating vacuum in a vacuum chamber
#61Gasket with positioning feature for clamped monolithic showerhead electrode
#62Apparatus and method for ion beam implantation using scanning and spot beams with improved high dose beam quality
#63Apparatus and method for ion beam implantation using scanning and spot beams
#64DOOR FOR VACUUM CHAMBER
#65Electron beam processing device
#66Material processing system and method
#67Method for Differentially Pumping Endblock Seal Cavity
#68Chamber isolation valve RF grounding
#69Sealing between vacuum chambers
#70Alternating current rotatable sputter cathode
#71Ion source arc chamber seal
#72Methods for discretized processing and process sequence integration of regions of a substrate
#73Methods for discretized processing and process sequence integration of regions of a substrate
#74Methods for discretized processing and process sequence integration of regions of a substrate
#75Method and apparatus for scanning a workpiece in a vacuum chamber of an ion beam implanter
#76Chamber isolation valve RF grounding
#77Material processing system and method
#78Plasma resistant seal assembly with replaceable barrier shield
#79Sealing mechanism for sealing a vacuum chamber
#80Moving vacuum chamber stage with air bearing and differentially pumped grooves
#81Mechanism for sealing
#82Material processing system and method
#83Method for differentially pumping endblock seal cavity
#84Integrated feedthrough for high voltage cables