ClassID:

206441

H01J2237/188 - CPC Classification

Classification description:

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Vacuum control means Differential pressure

Recent Application in this class:
#1
20260120990
2026-04-30

ELECTRON GUN AND ELECTRON MICROSCOPE

#2
20250349493
2025-11-13

ELECTRON MICROSCOPE AND IMAGE CAPTURING METHOD THEREOF

#3
20250308867
2025-10-02

HIGH-PERFORMANCE ADAPTABLE SAMPLING SYSTEM

#4
20250046566
2025-02-06

Optical Apparatus and Charged Particle Beam Apparatus

#5
20240212971
2024-06-27

ELECTRON GUN CHAMBER FOR SCANNING ELECTRON MICROSCOPE, ELECTRON GUN CONTAINING SAME, AND SCANNING ELECTRON MICROSCOPE

#6
20230307205
2023-09-28

FOCUSED ION BEAM SYSTEM

#7
20230230818
2023-07-20

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM

#8
20220406558
2022-12-22

Electron gun and electron microscope

#9
20220384138
2022-12-01

ELECTRON BEAM WELDING SYSTEMS EMPLOYING A PLASMA CATHODE

#10
20220285124
2022-09-08

ABERRATION CORRECTION IN CHARGED PARTICLE SYSTEM

#11
20220020580
2022-01-20

Aperture device and analyzer arrangement

#12
20210249217
2021-08-12

Multi-stage vacuum equipment with stages separation controlled by SMA actuator

#13
20210050178
2021-02-18

Charged particle optical apparatus for through-the-lens detection of particles

#14
20210027978
2021-01-28

Stage device, charged particle beam apparatus, and vacuum apparatus

#15
20200135425
2020-04-30

Charged particle optical apparatus for through-the-lens detection of particles

#16
20200035448
2020-01-30

Vacuum condition controlling apparatus, system and method for specimen observation

#17
20190193192
2019-06-27

Enhanced electron beam generation

#18
20180342368
2018-11-29

Charged particle optical apparatus for through-the-lens detection of particles

#19
20180277334
2018-09-27

Aberration correction in charged particle system

#20
20180226221
2018-08-09

Wide field atmospheric scanning electron microscope

#21
20170372868
2017-12-28

Atom probe with vacuum differential

#22
20170271125
2017-09-21

X-ray analysis in air

#23
20170250053
2017-08-31

High voltage shielding and cooling in a charged particle beam generator

#24
20160233051
2016-08-11

X-ray analysis in air

#25
20160211109
2016-07-21

Sample holder and charged particle device

#26
20160203941
2016-07-14

Diaphragm mounting member and charged particle beam device

#27
20160172153
2016-06-16

Microscopy support structures

#28
20160111243
2016-04-21

Charged particle beam system and method of operating a charged particle beam system

#29
20160104598
2016-04-14

Charged particle beam system and method of operating a charged particle beam system

#30
20150380207
2015-12-31

Scanning electron microscope

#31
20150380204
2015-12-31

Imaging and processing for plasma ion source

#32
20150348742
2015-12-03

Charged particle optical apparatus having a selectively positionable differential pressure module

#33
20150332891
2015-11-19

User interface for an electron microscope

#34
20150255244
2015-09-10

Sample storage container, charged particle beam apparatus, and image acquiring method

#35
20150243475
2015-08-27

Scanning electron microscope, an interface and a method for observing an object within a non-vacuum environment

#36
20150179397
2015-06-25

Microscopy support structures

#37
20150124229
2015-05-07

Charged particle lithography system and beam generator

#38
20150008342
2015-01-08

Charged particle beam system and method of operating a charged particle beam system

#39
20150008341
2015-01-08

Charged particle beam system and method of operating a charged particle beam system

#40
20140213046
2014-07-31

Fabrication of III-nitride layers

#41
20140147998
2014-05-29

Ion implantation at high temperature surface equilibrium conditions

#42
20140117232
2014-05-01

Scanning electron microscope, an interface and a method for observing an object within a non-vacuum environment

#43
20140061497
2014-03-06

Charged particle lithography system with intermediate chamber

#44
20130320229
2013-12-05

Imaging and processing for plasma ion source

#45
20130098292
2013-04-25

Processing system

#46
20130040240
2013-02-14

Charged particle beam drawing apparatus, and method of manufacturing article

#47
20120328988
2012-12-27

Drawing apparatus, method of manufacturing article, and processing apparatus

#48
20120293780
2012-11-22

Charged particle lithography system with intermediate chamber

#49
20120199740
2012-08-09

Particle beam system

#50
20120138814
2012-06-07

Particle beam device with deflection system

#51
20120091338
2012-04-19

Environmental cell for a particle-optical apparatus

#52
20120091337
2012-04-19

Charged particle beam devices

#53
20110139986
2011-06-16

Electron microscope

#54
20110133083
2011-06-09

Compact scanning electron microscope

#55
20110079710
2011-04-07

Microscopy support structures

#56
20110031394
2011-02-10

High pressure charged particle beam system

#57
20110006209
2011-01-13

Electron beam apparatus

#58
20110000323
2011-01-06

Device and method for introducing gas for analysis device

#59
20100230590
2010-09-16

Compact Scanning Electron Microscope

#60
20100224777
2010-09-09

Layered scanning charged particle microscope with differential pumping aperture

#61
20100194874
2010-08-05

User interface for an electron microscope

#62
20100171126
2010-07-08

In situ dopant implantation and growth of a III-nitride semiconductor body

#63
20100171037
2010-07-08

Compact scanning electron microscope

#64
20100122901
2010-05-20

Vapor-barrier vacuum isolation system

#65
20100084582
2010-04-08

Method and apparatus for controlling beam current uniformity in an ion implanter

#66
20100038536
2010-02-18

Nanotip repair and characterization using field ion microscopy

#67
20100024730
2010-02-04

Processing system

#68
20090294697
2009-12-03

Charged particle beam apparatus

#69
20090289186
2009-11-26

Small electron gun

#70
20090242763
2009-10-01

Environmental cell for a particle-optical apparatus

#71
20090242386
2009-10-01

System and Method of Fabricating Pores in Polymer Membranes

#72
20090224650
2009-09-10

Device for sustaining differential vacuum degrees for electron column

#73
20090159797
2009-06-25

Transmission electron microscope

#74
20090152462
2009-06-18

Gas field ionization ion source, scanning charged particle microscope, optical axis adjustment method and specimen observation method

#75
20090095055
2009-04-16

Method for Differentially Pumping Endblock Seal Cavity

#76
20090045337
2009-02-19

Charged-particle beam instrument

#77
20080315129
2008-12-25

Ion implanting while growing a III-nitride layer

#78
20080315096
2008-12-25

Portable electron microscope using micro-column

#79
20080308741
2008-12-18

Focused ion beam apparatus

#80
20080283745
2008-11-20

EMITTER CHAMBER, CHARGED PARTICAL APPARATUS AND METHOD FOR OPERATING SAME

#81
20080185509
2008-08-07

Particle-optical apparatus for simultaneous observing a sample with particles and photons

#82
20080073571
2008-03-27

Exposure apparatus, pressure control method for the same, and device manufacturing method

#83
20080073534
2008-03-27

Scanning electron microscope

#84
20080073532
2008-03-27

Observational liquid/gas environment combined with specimen chamber of electron microscope

#85
20070236143
2007-10-11

Small electron gun

#86
20070145303
2007-06-28

Protecting Aperture for Charged Particle Emitter

#87
20070145289
2007-06-28

Closed observational device for electron microscope

#88
20070145288
2007-06-28

Semi-closed observational environment for electron microscope

#89
20070145287
2007-06-28

Specimen box for electron microscope capable of observing general specimen and live cell

#90
20070138404
2007-06-21

Chamber with low electron stimulated desorption

#91
20070125957
2007-06-07

Techniques for reducing effects of photoresist outgassing

#92
20070125955
2007-06-07

Techniques for preventing parasitic beamlets from affecting ion implantation

#93
20070102650
2007-05-10

Charged particle beam apparatus

#94
20060219912
2006-10-05

Environmental scanning electron microcope

#95
20060145087
2006-07-06

Apparatus and method for inspection and testing of flat panel display substrates

#96
20060076489
2006-04-13

Charged particle beam apparatus

#97
20060011834
2006-01-19

Low vacuum scanning electron microscope

#98
20050211925
2005-09-29

Sample repairing apparatus, a sample repairing method and a device manufacturing method using the same method

#99
20050205802
2005-09-22

Method and apparatus for improved processing with a gas-cluster ion beam

#100
20050205801
2005-09-22

Method and apparatus for improved beam stability in high current gas-cluster ion beam processing system

#101
20050053481
2005-03-10

Method for differentially pumping endblock seal cavity

#102
20050052103
2005-03-10

Small electron gun