206441 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Vacuum control means Differential pressure
ELECTRON GUN AND ELECTRON MICROSCOPE
#2ELECTRON MICROSCOPE AND IMAGE CAPTURING METHOD THEREOF
#3HIGH-PERFORMANCE ADAPTABLE SAMPLING SYSTEM
#4Optical Apparatus and Charged Particle Beam Apparatus
#5ELECTRON GUN CHAMBER FOR SCANNING ELECTRON MICROSCOPE, ELECTRON GUN CONTAINING SAME, AND SCANNING ELECTRON MICROSCOPE
#6FOCUSED ION BEAM SYSTEM
#7SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
#8Electron gun and electron microscope
#9ELECTRON BEAM WELDING SYSTEMS EMPLOYING A PLASMA CATHODE
#10ABERRATION CORRECTION IN CHARGED PARTICLE SYSTEM
#11Aperture device and analyzer arrangement
#12Multi-stage vacuum equipment with stages separation controlled by SMA actuator
#13Charged particle optical apparatus for through-the-lens detection of particles
#14Stage device, charged particle beam apparatus, and vacuum apparatus
#15Charged particle optical apparatus for through-the-lens detection of particles
#16Vacuum condition controlling apparatus, system and method for specimen observation
#17Enhanced electron beam generation
#18Charged particle optical apparatus for through-the-lens detection of particles
#19Aberration correction in charged particle system
#20Wide field atmospheric scanning electron microscope
#21Atom probe with vacuum differential
#22X-ray analysis in air
#23High voltage shielding and cooling in a charged particle beam generator
#24X-ray analysis in air
#25Sample holder and charged particle device
#26Diaphragm mounting member and charged particle beam device
#27Microscopy support structures
#28Charged particle beam system and method of operating a charged particle beam system
#29Charged particle beam system and method of operating a charged particle beam system
#30Scanning electron microscope
#31Imaging and processing for plasma ion source
#32Charged particle optical apparatus having a selectively positionable differential pressure module
#33User interface for an electron microscope
#34Sample storage container, charged particle beam apparatus, and image acquiring method
#35Scanning electron microscope, an interface and a method for observing an object within a non-vacuum environment
#36Microscopy support structures
#37Charged particle lithography system and beam generator
#38Charged particle beam system and method of operating a charged particle beam system
#39Charged particle beam system and method of operating a charged particle beam system
#40Fabrication of III-nitride layers
#41Ion implantation at high temperature surface equilibrium conditions
#42Scanning electron microscope, an interface and a method for observing an object within a non-vacuum environment
#43Charged particle lithography system with intermediate chamber
#44Imaging and processing for plasma ion source
#45Processing system
#46Charged particle beam drawing apparatus, and method of manufacturing article
#47Drawing apparatus, method of manufacturing article, and processing apparatus
#48Charged particle lithography system with intermediate chamber
#49Particle beam system
#50Particle beam device with deflection system
#51Environmental cell for a particle-optical apparatus
#52Charged particle beam devices
#53Electron microscope
#54Compact scanning electron microscope
#55Microscopy support structures
#56High pressure charged particle beam system
#57Electron beam apparatus
#58Device and method for introducing gas for analysis device
#59Compact Scanning Electron Microscope
#60Layered scanning charged particle microscope with differential pumping aperture
#61User interface for an electron microscope
#62In situ dopant implantation and growth of a III-nitride semiconductor body
#63Compact scanning electron microscope
#64Vapor-barrier vacuum isolation system
#65Method and apparatus for controlling beam current uniformity in an ion implanter
#66Nanotip repair and characterization using field ion microscopy
#67Processing system
#68Charged particle beam apparatus
#69Small electron gun
#70Environmental cell for a particle-optical apparatus
#71System and Method of Fabricating Pores in Polymer Membranes
#72Device for sustaining differential vacuum degrees for electron column
#73Transmission electron microscope
#74Gas field ionization ion source, scanning charged particle microscope, optical axis adjustment method and specimen observation method
#75Method for Differentially Pumping Endblock Seal Cavity
#76Charged-particle beam instrument
#77Ion implanting while growing a III-nitride layer
#78Portable electron microscope using micro-column
#79Focused ion beam apparatus
#80EMITTER CHAMBER, CHARGED PARTICAL APPARATUS AND METHOD FOR OPERATING SAME
#81Particle-optical apparatus for simultaneous observing a sample with particles and photons
#82Exposure apparatus, pressure control method for the same, and device manufacturing method
#83Scanning electron microscope
#84Observational liquid/gas environment combined with specimen chamber of electron microscope
#85Small electron gun
#86Protecting Aperture for Charged Particle Emitter
#87Closed observational device for electron microscope
#88Semi-closed observational environment for electron microscope
#89Specimen box for electron microscope capable of observing general specimen and live cell
#90Chamber with low electron stimulated desorption
#91Techniques for reducing effects of photoresist outgassing
#92Techniques for preventing parasitic beamlets from affecting ion implantation
#93Charged particle beam apparatus
#94Environmental scanning electron microcope
#95Apparatus and method for inspection and testing of flat panel display substrates
#96Charged particle beam apparatus
#97Low vacuum scanning electron microscope
#98Sample repairing apparatus, a sample repairing method and a device manufacturing method using the same method
#99Method and apparatus for improved processing with a gas-cluster ion beam
#100Method and apparatus for improved beam stability in high current gas-cluster ion beam processing system
#101Method for differentially pumping endblock seal cavity
#102Small electron gun