206444 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated Controlling environment of sample
Sub-classes:GRID BOX FOR ELECTRON MICROSCOPE SAMPLE CARRIERS
#2DEVICE FOR HOLDING A SAMPLE, SYSTEM AND MANUFACTURING METHOD
#3Charged Particle Beam System
#4SAMPLE HOLDER, ELECTRON MICROSCOPE SYSTEM AND SAMPLE OBSERVATION METHOD
#5APPARATUS FOR PREPARING ELECTRON MICROSCOPY SAMPLES AND METHODS OF USE THEREOF
#6DEPOSITION APPARATUS AND METHOD WITH EM RADIATION
#7IMPROVED TEMPERATURE CONTROL IN LIQUID PHASE TRANSMISSION ELECTRON MICROSCOPY
#8METHOD AND APPARATUS FOR AN IMAGING SYSTEM
#9Deposition Apparatus and Method with EM Radiation
#10SAMPLE HOLDER FOR DETECTION OF HYDROGEN PERMEATION AND HYDROGEN PERMEATION AND DIFFUSION PATH OBSERVATION DEVICE
#11INTEGRATION OF VAPOR DEPOSITION PROCESS INTO PLASMA ETCH REACTOR
#12SYSTEM FOR DEPOSITING PIEZOELECTRIC MATERIALS, METHODS FOR USING THE SAME, AND MATERIALS DEPOSITED WITH THE SAME
#13ANALYSIS SYSTEM, ANALYSIS METHOD, COMPUTER PROGRAM PRODUCT AND SAMPLE HOLDER
#14Deposition apparatus and method with EM radiation
#15TRANSMISSION ELECTRON MICROSCOPE IN-SITU CHIP AND PREPARATION METHOD THEREOF
#16TRANSMISSION ELECTRON MICROSCOPE IN-SITU CHIP AND PREPARATION METHOD THEREFOR
#17Sample loading method and charged particle beam apparatus
#18Transmission electron microscope provided with at least one ballistic material jet source
#19Substrate processing apparatus and substrate processing method
#20Sample attachment device
#21Portable vacuum antioxidant bag
#22Sample support and method of fabricating same
#23MEMS frame heating platform for electron imagable fluid reservoirs or larger conductive samples
#24Cryogenic transmission electron microscopy sample preparation
#25Electron beam inspection tool and method of controlling heat load
#26Vacuum cooling apparatus and ion milling apparatus
#27PROCESSING BIOMASS
#28MEMs frame heating platform for electron imagable fluid reservoirs or larger conductive samples
#29Semiconductor workpiece temperature measurement system
#30Equipment protecting enclosures
#31Charged particle beam apparatus
#32Processing biomass
#33Cryogenic cell for mounting a specimen in a charged particle microscope
#34Electron-Beam Inspection Systems with optimized throughput
#35MEMs frame heating platform for electron imagable fluid reservoirs or larger conductive samples
#36Specimen observation method
#37Multi charged particle beam inspection apparatus, and multi charged particle beam inspection method
#38Microscope sample preparation device
#39Method for safe control of gas delivery to an electron microscope sample holder
#40Specimen holder
#41Method for monitoring environmental states of a microscope sample with an electron microscope sample holder
#42Processing materials
#43APPARATUS AND METHOD FOR PROCESSING OR IMAGING A SAMPLE
#44Semiconductor workpiece temperature measurement system
#45Vacuum compatible fluid sampler
#46Multi-Stage/Multi-Chamber Electron-Beam Inspection System
#47Multi-stage/multi-chamber electron-beam inspection system
#48Electron microscope sample holder for forming a gas or liquid cell with two semiconductor devices
#49Equipment protecting enclosures
#50Cryostation system
#51Charged particle beam-induced etching
#52Equipment protecting enclosures
#53Method of cleaning electrostatic chuck
#54MEMs frame heating platform for electron imagable fluid reservoirs or larger conductive samples
#55Electron microscope sample holder for forming a gas or liquid cell with two semiconductor devices
#56Stage device and charged particle beam device using the same
#57Processing materials
#58Thin-ice grid assembly for cryo-electron microscopy
#59Protective agent for electron microscopic observation of biological sample in water-containing state, kit for electron microscopic observation, methods for observation, diagnosis, evaluation, and quantification by electron microscope, and sample stage
#60Apparatus for heating and processing a substrate
#61Inspection device
#62Inspection of a lithographic mask that is protected by a pellicle
#63Charged particle source arrangement for a charged particle beam device, charged particle beam device for sample inspection, and method for providing a primary charged particle beam for sample inspection in a charged particle beam
#64Charged particle beam device and sample holder for charged particle beam device
#65Diaphragm mounting member and charged particle beam device
#66Anti-contamination trap, and vacuum application device
#67Microscopy support structures
#68Fixture for in situ electromigration testing during X-ray microtomography
#69Ion milling device and processing method using the ion milling device
#70Electron microscope sample holder for forming a gas or liquid cell with two semiconductor devices
#71Method for safe control of gas delivery to an electron microscope sample holder
#72Scanning electron microscope
#73Charged particle optical apparatus having a selectively positionable differential pressure module
#74Specimen cryo holder and dewar
#75Charged particle beam device, sample stage unit, and sample observation method
#76Sample micromotion mechanism, method of using the same, and charged particle device
#77Scanning electron microscope, an interface and a method for observing an object within a non-vacuum environment
#78Interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope
#79Device for monitoring environmental states of a microscope sample with an electron microscope sample holder
#80Charged particle beam device and sample observation method
#81ASSEMBLY FOR USE IN A VACUUM TREATMENT PROCESS
#82Microscopy support structures
#83Electron microscope and electron microscope sample retaining device
#84Electron microscope sample holder for forming a gas or liquid cell with two semiconductor devices
#85Charged particle beam instrument
#86Charged particle beam instrument and sample container
#87Specimen holder used for mounting samples in electron microscopes
#88Processing System
#89Stage apparatus, and charged particle beam apparatus using same
#90Inspection of a lithographic mask that is protected by a pellicle
#91SUBSTRATE INSPECTION METHOD AND A SUBSTRATE PROCESSING METHOD
#92Sample holder for electron microscopy for low-current, low-noise analysis
#93Interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope
#94Charged particle beam irradiation apparatus
#95Transmission electron microscope, and method of observing specimen
#96Electron microscopic observation method for observing biological sample in shape as it is, and composition for evaporation suppression under vacuum, scanning electron microscope, and transmission electron microscope used in the method
#97Scanning electron microscope, an interface and a method for observing an object within a non-vacuum environment
#98Nano-Pipet Fabrication
#99Nano-Pipet Fabrication
#100In-vacuum high speed pre-chill and post-heat stations
#101Processing system
#102Method of studying a sample in an ETEM
#103Interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope
#104Microfluidic blotless cryo TEM device and method
#105Inspection device
#106Specimen potential measuring method, and charged particle beam device
#107In situ holder assembly
#108Electron beam device and sample holding device for electron beam device
#109Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former
#110Microscopy support structures
#111Electromagnetic field application system
#112Transmission electron microscope, and method of observing specimen
#113Particle beam apparatus having an aperture unit and method for setting a beam current in a particle beam apparatus
#114Shorten Temperature Recovery Time of Low Temperature Ion Implantation
#115Hermetic sample holder and method for performing microanalysis under controlled atmosphere environment
#116Apparatus and method for processing substrate
#117Interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope
#118ICE LAYERS IN CHARGED PARTICLE SYSTEMS AND METHODS
#119Vapor-barrier vacuum isolation system
#120Scanning transmission electron microscope using gas amplification
#121Method and device for examining a surface of an object
#122Processing system
#123Pre-Cryogenic Electron Microscope Specimen Holder
#124Cryo-charging specimen holder for electron microscope
#125Transmission electron microscope
#126Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former
#127SOLID SAMPLE, SOLID SAMPLE FABRICATING METHOD, AND SOLID SAMPLE FABRICATING APPARATUS
#128Microreactor for a transmission electron microscope and heating element and method of manufacture thereof
#129Charged particle beam system and its specimen holder
#130Deposition reduction system for an ion implanter
#131Stage for plasma processing apparatus, and plasma processing apparatus
#132Digital parallel electron beam lithography stamp
#133Parallel electron beam lithography stamp (PEBLS)
#134Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former
#135ION IMPLANTING APPARATUS AND METHOD
#136Method of operating high-pressure chamber in vacuum or low-pressure environment and observing the operation and device therefor
#137Device for operating gas in vacuum or low-pressure environment and for observation of the operation
#138TEM MEMS device holder and method of fabrication
#139Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former
#140Carrier and analyzing apparatus including the carrier
#141Microscope sample preparation device