ClassID:

206444

H01J2237/2002 - CPC Classification

Classification description:

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated Controlling environment of sample

Sub-classes:
Recent Application in this class:
#1
20260142119
2026-05-21

GRID BOX FOR ELECTRON MICROSCOPE SAMPLE CARRIERS

#2
20250349499
2025-11-13

DEVICE FOR HOLDING A SAMPLE, SYSTEM AND MANUFACTURING METHOD

#3
20250253116
2025-08-07

Charged Particle Beam System

#4
20240429020
2024-12-26

SAMPLE HOLDER, ELECTRON MICROSCOPE SYSTEM AND SAMPLE OBSERVATION METHOD

#5
20240412942
2024-12-12

APPARATUS FOR PREPARING ELECTRON MICROSCOPY SAMPLES AND METHODS OF USE THEREOF

#6
20240384409
2024-11-21

DEPOSITION APPARATUS AND METHOD WITH EM RADIATION

#7
20240290573
2024-08-29

IMPROVED TEMPERATURE CONTROL IN LIQUID PHASE TRANSMISSION ELECTRON MICROSCOPY

#8
20240186104
2024-06-06

METHOD AND APPARATUS FOR AN IMAGING SYSTEM

#9
20230383403
2023-11-30

Deposition Apparatus and Method with EM Radiation

#10
20230333032
2023-10-19

SAMPLE HOLDER FOR DETECTION OF HYDROGEN PERMEATION AND HYDROGEN PERMEATION AND DIFFUSION PATH OBSERVATION DEVICE

#11
20230260759
2023-08-17

INTEGRATION OF VAPOR DEPOSITION PROCESS INTO PLASMA ETCH REACTOR

#12
20230257869
2023-08-17

SYSTEM FOR DEPOSITING PIEZOELECTRIC MATERIALS, METHODS FOR USING THE SAME, AND MATERIALS DEPOSITED WITH THE SAME

#13
20230178333
2023-06-08

ANALYSIS SYSTEM, ANALYSIS METHOD, COMPUTER PROGRAM PRODUCT AND SAMPLE HOLDER

#14
20230151489
2023-05-18

Deposition apparatus and method with EM radiation

#15
20230103943
2023-04-06

TRANSMISSION ELECTRON MICROSCOPE IN-SITU CHIP AND PREPARATION METHOD THEREOF

#16
20230072075
2023-03-09

TRANSMISSION ELECTRON MICROSCOPE IN-SITU CHIP AND PREPARATION METHOD THEREFOR

#17
20220216030
2022-07-07

Sample loading method and charged particle beam apparatus

#18
20210241994
2021-08-05

Transmission electron microscope provided with at least one ballistic material jet source

#19
20210225618
2021-07-22

Substrate processing apparatus and substrate processing method

#20
20210098225
2021-04-01

Sample attachment device

#21
20210090847
2021-03-25

Portable vacuum antioxidant bag

#22
20210005418
2021-01-07

Sample support and method of fabricating same

#23
20200411277
2020-12-31

MEMS frame heating platform for electron imagable fluid reservoirs or larger conductive samples

#24
20200264079
2020-08-20

Cryogenic transmission electron microscopy sample preparation

#25
20200203117
2020-06-25

Electron beam inspection tool and method of controlling heat load

#26
20200185187
2020-06-11

Vacuum cooling apparatus and ion milling apparatus

#27
20200070120
2020-03-05

PROCESSING BIOMASS

#28
20200043697
2020-02-06

MEMs frame heating platform for electron imagable fluid reservoirs or larger conductive samples

#29
20190170591
2019-06-06

Semiconductor workpiece temperature measurement system

#30
20190151815
2019-05-23

Equipment protecting enclosures

#31
20190148105
2019-05-16

Charged particle beam apparatus

#32
20190139660
2019-05-09

Processing biomass

#33
20190131105
2019-05-02

Cryogenic cell for mounting a specimen in a charged particle microscope

#34
20190088442
2019-03-21

Electron-Beam Inspection Systems with optimized throughput

#35
20190080882
2019-03-14

MEMs frame heating platform for electron imagable fluid reservoirs or larger conductive samples

#36
20190051489
2019-02-14

Specimen observation method

#37
20180286630
2018-10-04

Multi charged particle beam inspection apparatus, and multi charged particle beam inspection method

#38
20180209880
2018-07-26

Microscope sample preparation device

#39
20180203423
2018-07-19

Method for safe control of gas delivery to an electron microscope sample holder

#40
20180096817
2018-04-05

Specimen holder

#41
20180068827
2018-03-08

Method for monitoring environmental states of a microscope sample with an electron microscope sample holder

#42
20180036706
2018-02-08

Processing materials

#43
20180033586
2018-02-01

APPARATUS AND METHOD FOR PROCESSING OR IMAGING A SAMPLE

#44
20180003567
2018-01-04

Semiconductor workpiece temperature measurement system

#45
20170348686
2017-12-07

Vacuum compatible fluid sampler

#46
20170301509
2017-10-19

Multi-Stage/Multi-Chamber Electron-Beam Inspection System

#47
20170301508
2017-10-19

Multi-stage/multi-chamber electron-beam inspection system

#48
20170278670
2017-09-28

Electron microscope sample holder for forming a gas or liquid cell with two semiconductor devices

#49
20170263346
2017-09-14

Equipment protecting enclosures

#50
20170213693
2017-07-27

Cryostation system

#51
20170200589
2017-07-13

Charged particle beam-induced etching

#52
20170140845
2017-05-18

Equipment protecting enclosures

#53
20170125211
2017-05-04

Method of cleaning electrostatic chuck

#54
20170062177
2017-03-02

MEMs frame heating platform for electron imagable fluid reservoirs or larger conductive samples

#55
20170025245
2017-01-26

Electron microscope sample holder for forming a gas or liquid cell with two semiconductor devices

#56
20160365219
2016-12-15

Stage device and charged particle beam device using the same

#57
20160358744
2016-12-08

Processing materials

#58
20160351374
2016-12-01

Thin-ice grid assembly for cryo-electron microscopy

#59
20160343539
2016-11-24

Protective agent for electron microscopic observation of biological sample in water-containing state, kit for electron microscopic observation, methods for observation, diagnosis, evaluation, and quantification by electron microscope, and sample stage

#60
20160329190
2016-11-10

Apparatus for heating and processing a substrate

#61
20160307726
2016-10-20

Inspection device

#62
20160282714
2016-09-29

Inspection of a lithographic mask that is protected by a pellicle

#63
20160240345
2016-08-18

Charged particle source arrangement for a charged particle beam device, charged particle beam device for sample inspection, and method for providing a primary charged particle beam for sample inspection in a charged particle beam

#64
20160217971
2016-07-28

Charged particle beam device and sample holder for charged particle beam device

#65
20160203941
2016-07-14

Diaphragm mounting member and charged particle beam device

#66
20160203940
2016-07-14

Anti-contamination trap, and vacuum application device

#67
20160172153
2016-06-16

Microscopy support structures

#68
20160169782
2016-06-16

Fixture for in situ electromigration testing during X-ray microtomography

#69
20160155602
2016-06-02

Ion milling device and processing method using the ion milling device

#70
20160126056
2016-05-05

Electron microscope sample holder for forming a gas or liquid cell with two semiconductor devices

#71
20160033355
2016-02-04

Method for safe control of gas delivery to an electron microscope sample holder

#72
20150380207
2015-12-31

Scanning electron microscope

#73
20150348742
2015-12-03

Charged particle optical apparatus having a selectively positionable differential pressure module

#74
20150340199
2015-11-26

Specimen cryo holder and dewar

#75
20150311033
2015-10-29

Charged particle beam device, sample stage unit, and sample observation method

#76
20150255246
2015-09-10

Sample micromotion mechanism, method of using the same, and charged particle device

#77
20150243475
2015-08-27

Scanning electron microscope, an interface and a method for observing an object within a non-vacuum environment

#78
20150235806
2015-08-20

Interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope

#79
20150235805
2015-08-20

Device for monitoring environmental states of a microscope sample with an electron microscope sample holder

#80
20150228447
2015-08-13

Charged particle beam device and sample observation method

#81
20150194295
2015-07-09

ASSEMBLY FOR USE IN A VACUUM TREATMENT PROCESS

#82
20150179397
2015-06-25

Microscopy support structures

#83
20150179396
2015-06-25

Electron microscope and electron microscope sample retaining device

#84
20150162164
2015-06-11

Electron microscope sample holder for forming a gas or liquid cell with two semiconductor devices

#85
20150137001
2015-05-21

Charged particle beam instrument

#86
20150137000
2015-05-21

Charged particle beam instrument and sample container

#87
20150129778
2015-05-14

Specimen holder used for mounting samples in electron microscopes

#88
20150114294
2015-04-30

Processing System

#89
20150053857
2015-02-26

Stage apparatus, and charged particle beam apparatus using same

#90
20150028203
2015-01-29

Inspection of a lithographic mask that is protected by a pellicle

#91
20140367570
2014-12-18

SUBSTRATE INSPECTION METHOD AND A SUBSTRATE PROCESSING METHOD

#92
20140361194
2014-12-11

Sample holder for electron microscopy for low-current, low-noise analysis

#93
20140361166
2014-12-11

Interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope

#94
20140353151
2014-12-04

Charged particle beam irradiation apparatus

#95
20140264017
2014-09-18

Transmission electron microscope, and method of observing specimen

#96
20140227734
2014-08-14

Electron microscopic observation method for observing biological sample in shape as it is, and composition for evaporation suppression under vacuum, scanning electron microscope, and transmission electron microscope used in the method

#97
20140117232
2014-05-01

Scanning electron microscope, an interface and a method for observing an object within a non-vacuum environment

#98
20140105794
2014-04-17

Nano-Pipet Fabrication

#99
20140103582
2014-04-17

Nano-Pipet Fabrication

#100
20140034846
2014-02-06

In-vacuum high speed pre-chill and post-heat stations

#101
20130098292
2013-04-25

Processing system

#102
20130040400
2013-02-14

Method of studying a sample in an ETEM

#103
20120241608
2012-09-27

Interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope

#104
20120241607
2012-09-27

Microfluidic blotless cryo TEM device and method

#105
20120235036
2012-09-20

Inspection device

#106
20120119085
2012-05-17

Specimen potential measuring method, and charged particle beam device

#107
20120025103
2012-02-02

In situ holder assembly

#108
20110303845
2011-12-15

Electron beam device and sample holding device for electron beam device

#109
20110104830
2011-05-05

Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former

#110
20110079710
2011-04-07

Microscopy support structures

#111
20110073759
2011-03-31

Electromagnetic field application system

#112
20110057100
2011-03-10

Transmission electron microscope, and method of observing specimen

#113
20110049361
2011-03-03

Particle beam apparatus having an aperture unit and method for setting a beam current in a particle beam apparatus

#114
20100301236
2010-12-02

Shorten Temperature Recovery Time of Low Temperature Ion Implantation

#115
20100294049
2010-11-25

Hermetic sample holder and method for performing microanalysis under controlled atmosphere environment

#116
20100288728
2010-11-18

Apparatus and method for processing substrate

#117
20100140470
2010-06-10

Interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope

#118
20100136255
2010-06-03

ICE LAYERS IN CHARGED PARTICLE SYSTEMS AND METHODS

#119
20100122901
2010-05-20

Vapor-barrier vacuum isolation system

#120
20100108881
2010-05-06

Scanning transmission electron microscope using gas amplification

#121
20100102223
2010-04-29

Method and device for examining a surface of an object

#122
20100024730
2010-02-04

Processing system

#123
20090283696
2009-11-19

Pre-Cryogenic Electron Microscope Specimen Holder

#124
20090242795
2009-10-01

Cryo-charging specimen holder for electron microscope

#125
20090159797
2009-06-25

Transmission electron microscope

#126
20080308729
2008-12-18

Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former

#127
20080293832
2008-11-27

SOLID SAMPLE, SOLID SAMPLE FABRICATING METHOD, AND SOLID SAMPLE FABRICATING APPARATUS

#128
20080179518
2008-07-31

Microreactor for a transmission electron microscope and heating element and method of manufacture thereof

#129
20080093565
2008-04-24

Charged particle beam system and its specimen holder

#130
20080073576
2008-03-27

Deposition reduction system for an ion implanter

#131
20080041312
2008-02-21

Stage for plasma processing apparatus, and plasma processing apparatus

#132
20070257212
2007-11-08

Digital parallel electron beam lithography stamp

#133
20070228296
2007-10-04

Parallel electron beam lithography stamp (PEBLS)

#134
20070194235
2007-08-23

Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former

#135
20070023698
2007-02-01

ION IMPLANTING APPARATUS AND METHOD

#136
20060249688
2006-11-09

Method of operating high-pressure chamber in vacuum or low-pressure environment and observing the operation and device therefor

#137
20060249687
2006-11-09

Device for operating gas in vacuum or low-pressure environment and for observation of the operation

#138
20060025002
2006-02-02

TEM MEMS device holder and method of fabrication

#139
20050121611
2005-06-09

Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former

#140
20050035303
2005-02-17

Carrier and analyzing apparatus including the carrier

#141
15263949
2018-05-01

Microscope sample preparation device