206447 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated Seal mechanisms
Sub-classes:SELF-COMPLIANT SEAL ASSEMBLY
#2ELECTROSTATICALLY SECURED SUBSTRATE SUPPORT ASSEMBLY
#3DEVICE FOR HOLDING A SAMPLE, SYSTEM AND MANUFACTURING METHOD
#4ELECTROSTATIC CHUCK WITH SEAL SURFACE
#5SAMPLE HOLDER AND ELECTRON MICROSCOPE
#6SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND RECORDING MEDIUM
#7APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR ALIGNING DIELECTRIC PLATE USING THE SAME
#8PLASMA PROCESSING APPARATUS AND SUBSTRATE SUPPORT BODY
#9Sample holder, intermembrane distance adjustment mechanism, and charged particle beam device
#10PROCESS CHAMBER AND SEMICONDUCTOR PROCESS DEVICE
#11SUBSTRATE PROCESSING SYSTEM
#12SUBSTRATE TREATMENT APPARATUS
#13WAFER PLACEMENT TABLE
#14DEVICE FOR SUPPORTING SUBSTRATE HAVING THERMAL EXPANSION COEFFICIENT
#15Cryotransfer holder and workstation
#16WAFER SUPPORT UNIT AND WAFER TREATMENT SYSTEM INCLUDING THE SAME
#17Electrostatic chuck with seal surface
#18Ion beam etching system
#19Specimen holder
#20Micro-chamber for inspecting sample material
#21Linkage conduit for vacuum chamber applications
#22Workpiece support structure with four degree of freedom air bearing for high vacuum systems
#23Apparatus and method of temperature control during cleaving processes of thick materials
#24Method of use of reusable sample holding device permitting ready loading of very small wet samples
#25Effective algorithm for warming a twist axis for cold ion implantations
#26Conductive seal ring electrostatic chuck
#27Ion implantation apparatus
#28Hermetic sample holder and method for performing microanalysis under controlled atmosphere environment
#29Substrate support structure, clamp preparation unit, and lithography system
#30Reusable sample holding device permitting ready loading of very small wet samples
#31Table guided by aerostatic bearing elements for vacuum application
#32Sample holder, method for observation and inspection, and apparatus for observation and inspection
#33Method for Differentially Pumping Endblock Seal Cavity
#34APPARATUS AND METHOD OF TEMPERATURE CONROL DURING CLEAVING PROCESSES OF THICK FILM MATERIALS
#35Plasma resistant seal assembly with replaceable barrier shield
#36Substrate processing apparatus and substrate processing method
#37Method and apparatus for in-situ probe tip replacement inside a charged particle beam microscope
#38Stage devices and exposure systems comprising same
#39Method for differentially pumping endblock seal cavity