ClassID:

206448

H01J2237/2006 - CPC Classification

Classification description:

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated; Seal mechanisms Vacuum seals

Recent Application in this class:
#1
20260011524
2026-01-08

MULTI-BEAM PARTICLE MICROSCOPE WITH A QUICKLY REPLACEABLE PARTICLE SOURCE, AND METHOD FOR QUICKLY REPLACING A PARTICLE SOURCE IN THE MULTI-BEAM PARTICLE MICROSCOPE

#2
20250112020
2025-04-03

BETA TILT SAMPLE HOLDER

#3
20240055234
2024-02-15

SUBSTRATE PROCESSING APPARATUS

#4
20220384157
2022-12-01

PLASMA PROCESSING DEVICE AND RETRACTABLE SEALING PART THEREOF

#5
20220223371
2022-07-14

Charged particle beam system

#6
20220216031
2022-07-07

Sample protection device for scanning electron microscopy

#7
20220051876
2022-02-17

Vacuum processing apparatus and method for controlling vacuum processing apparatus

#8
20210391139
2021-12-16

Replaceable module for a charged particle apparatus

#9
20210090847
2021-03-25

Portable vacuum antioxidant bag

#10
20200402760
2020-12-24

Scanning electron microscope

#11
20190287760
2019-09-19

Charged particle beam system, opto-electro simultaneous detection system and method

#12
20190287756
2019-09-19

Sample stage

#13
20190103245
2019-04-04

Scanning electron microscope

#14
20190066990
2019-02-28

Vacuum processing apparatus and mass spectrometer

#15
20180294138
2018-10-11

Method for optimizing fluid flow across a sample within an electron microscope sample holder

#16
20180197713
2018-07-12

Integrated circuit analysis systems and methods with localized evacuated volume for e-beam operation

#17
20170316913
2017-11-02

Sample Stage

#18
20160203941
2016-07-14

Diaphragm mounting member and charged particle beam device

#19
20160071685
2016-03-10

Charged particle beam device and filter member

#20
20150348745
2015-12-03

Method for optimizing fluid flow across a sample within an electron microscope sample holder

#21
20150332891
2015-11-19

User interface for an electron microscope

#22
20150318143
2015-11-05

Sample base, charged particle beam device and sample observation method

#23
20150255244
2015-09-10

Sample storage container, charged particle beam apparatus, and image acquiring method

#24
20150206705
2015-07-23

MEMBER FOR CHARGED PARTICLE BEAM DEVICE, CHARGED PARTICLE BEAM DEVICE AND DIAPHRAGM MEMBER

#25
20140361166
2014-12-11

Interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope

#26
20130094008
2013-04-18

Target positioning device, method for driving a target positioning device, and a lithography system comprising such a target positioning device

#27
20120241648
2012-09-27

HEAT LIP SEAL FOR CRYOGENIC PROCESSING

#28
20120241608
2012-09-27

Interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope

#29
20120145899
2012-06-14

Scanning electron microscope

#30
20110204255
2011-08-25

Stage device

#31
20110133083
2011-06-09

Compact scanning electron microscope

#32
20100327190
2010-12-30

Ion implantation apparatus and a method

#33
20100276592
2010-11-04

Slider bearing for use with an apparatus comprising a vacuum chamber

#34
20100230590
2010-09-16

Compact Scanning Electron Microscope

#35
20100224780
2010-09-09

Beam device system comprising a particle beam device and an optical microscope

#36
20100194874
2010-08-05

User interface for an electron microscope

#37
20100171037
2010-07-08

Compact scanning electron microscope

#38
20100140470
2010-06-10

Interface, a method for observing an object within a non-vacuum environment and a scanning electron microscope

#39
20090066031
2009-03-12

Compound sliding seal unit suitable for atmosphere to vacuum applications

#40
20090045349
2009-02-19

Sample enclosure for inspection and methods of use thereof

#41
20070210253
2007-09-13

Methods for SEM inspection of fluid containing samples

#42
20070151842
2007-07-05

APPARATUS FOR REACTIVE SPUTTERING

#43
20070125947
2007-06-07

Sample enclosure for a scanning electron microscope and methods of use thereof

#44
20070114434
2007-05-24

Multi-pixel electron microbeam irradiator systems and methods for selectively irradiating predetermined locations

#45
20060273277
2006-12-07

Plasma resistant seal assembly with replaceable barrier shield

#46
20060060259
2006-03-23

Moving vacuum chamber stage with air bearing and differentially pumped grooves

#47
20060027763
2006-02-09

Workpiece support structure for an ion beam implanter featuring spherical sliding seal vacuum feedthrough

#48
20060022135
2006-02-02

Method and apparatus for in-situ probe tip replacement inside a charged particle beam microscope

#49
20050173632
2005-08-11

Methods for SEM inspection of fluid containing samples