Patents-Review.com
ClassID:

206469 ⎘

H01J2237/2065 - CPC Classification

Classification description:

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated; Modifying objects while observing Temperature variations

Recent Application in this class:
#1
20260071316
2026-03-12

TEMPERATURE-TUNED SUBSTRATE SUPPORT FOR SUBSTRATE PROCESSING SYSTEMS

 #2
20260024718
2026-01-22

HIGH TEMPERATURE NV CENTER SENSING UP TO 1400K

 #3
20250357074
2025-11-20

Stage Device and Charged Particle Beam Device Equipped with the Same

 #4
20250349499
2025-11-13

DEVICE FOR HOLDING A SAMPLE, SYSTEM AND MANUFACTURING METHOD

 #5
20250323009
2025-10-16

SYSTEMS AND METHODS FOR TEMPERATURE CONTROL IN ELECTRON MICROSCOPY

 #6
20250246437
2025-07-31

SELECTIVE ETCHING IN SEMICONDUCTOR DEVICES

 #7
20240213000
2024-06-27

PROCESSING METHOD AND PLASMA PROCESSING APPARATUS

 #8
20240153734
2024-05-09

SAMPLE HOLDER FOR TRANSMISSION ELECTRON MICROSCOPE, SAMPLE ANALYSIS SYSTEM INCLUDING THE SAME, AND METHOD FOR ANALYZING SAMPLE USING THE SAME

 #9
20230420224
2023-12-28

Operating a gas feed device for a particle beam apparatus

 #10
20230103943
2023-04-06

TRANSMISSION ELECTRON MICROSCOPE IN-SITU CHIP AND PREPARATION METHOD THEREOF

 #11
20230072075
2023-03-09

TRANSMISSION ELECTRON MICROSCOPE IN-SITU CHIP AND PREPARATION METHOD THEREFOR

 #12
20230038565
2023-02-09

METHOD AND APPARATUS FOR CONTINUOUS CHAINED ENERGY ION IMPLANTATION

 #13
20220076931
2022-03-10

Plasma processing apparatus and method of manufacturing semiconductor device using the same

 #14
20210375647
2021-12-02

Semiconductor manufacturing apparatus and wafer holding table for semiconductor manufacturing apparatus

 #15
20210299665
2021-09-30

Method for temperature monitoring in cryo-electron microscopy

 #16
20210265144
2021-08-26

TEMPERATURE-TUNED SUBSTRATE SUPPORT FOR SUBSTRATE PROCESSING SYSTEMS

 #17
20200335309
2020-10-22

Operating a gas supply device for a particle beam device

 #18
20200203117
2020-06-25

Electron beam inspection tool and method of controlling heat load

 #19
20200152466
2020-05-14

Method and apparatus for non line-of-sight doping

 #20
20190310209
2019-10-10

Specimen holder

 #21
20190295813
2019-09-26

Method of observing liquid specimen, method of analyzing liquid specimen and electron microscope

 #22
20190051543
2019-02-14

Wafer holder

 #23
20180148843
2018-05-31

Roll to roll fabrication apparatus for preventing thermal impact

 #24
20160260580
2016-09-08

High temperature intermittent ion implantation

 #25
20160172152
2016-06-16

Electron microscope having a carrier

 #26
20160133436
2016-05-12

Contactless temperature measurement in a charged particle microscope

 #27
20150276487
2015-10-01

Technique for temperature measurement and calibration of semiconductor workpieces using infrared

 #28
20140367571
2014-12-18

Method of welding a frozen aqueous sample to a microprobe

 #29
20140042318
2014-02-13

Sample holding apparatus for electron microscope, and electron microscope apparatus

 #30
20120305769
2012-12-06

Electron microscope and sample holder

 #31
20120292505
2012-11-22

Methods of using temperature control devices in electron microscopy

 #32
20120112064
2012-05-10

Sample holder, method for use of the sample holder, and charged particle device

 #33
20120025103
2012-02-02

In situ holder assembly

 #34
20110284744
2011-11-24

Method and system for 4D tomography and ultrafast scanning electron microscopy

 #35
20100320381
2010-12-23

Method for characterizing identified defects during charged particle beam inspection and application thereof

 #36
20100171044
2010-07-08

Vapor compression refrigeration chuck for ion implanters

 #37
20090236521
2009-09-24

Method and system for ultrafast photoelectron microscope

 #38
20090224788
2009-09-10

Apparatus for detecting defect by examining electric characteristics of a semiconductor device

 #39
20090134022
2009-05-28

Method and apparatus for producing photocatalyst

 #40
20080293832
2008-11-27

SOLID SAMPLE, SOLID SAMPLE FABRICATING METHOD, AND SOLID SAMPLE FABRICATING APPARATUS

 #41
20080093565
2008-04-24

Charged particle beam system and its specimen holder

 #42
20080042078
2008-02-21

Techniques for temperature-controlled ion implantation

 #43
20080017796
2008-01-24

Method and system for ultrafast photoelectron microscope

 #44
20060060777
2006-03-23

Apparatus and method for evaluating cross section of specimen

 #45
20050253069
2005-11-17

Method and system for ultrafast photoelectron microscope

 #46
20050020444
2005-01-27

Method and apparatus for producing photocatalyst