206477 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Treatment of data; Image processing Fourier techniques
COLLATION SYSTEM
#2PATTERN INSPECTION SYSTEM AND METHOD OF PATTERN INSPECTION USING THE SAME
#3Charged Particle Beam Apparatus
#4CRYO-ELECTRON MICROSCOPY IMAGE PROCESSING METHOD AND APPARATUS, TERMINAL, AND STORAGE MEDIUM
#5METHODS FOR HIGH-PERFORMANCE ELECTRON MICROSCOPY
#6METHOD OF DETERMINING AN ENERGY SPECTRUM OR ENERGY WIDTH OF A CHARGED PARTICLE BEAM, AND CHARGED PARTICLE BEAM IMAGING DEVICE
#7CRYOGENIC ELECTRON MICROSCOPY FULLY AUTOMATED ACQUISITION FOR SINGLE PARTICLE AND TOMOGRAPHY
#8SEM IMAGE ENHANCEMENT
#9Automated ion-beam alignment for dual-beam instrument
#10Method and Scanning Transmission Charged-Particle Microscope
#11IMAGING METHOD AND APPARATUS FOR DIRECT ELECTRON DETECTION CAMERAS AND COMPUTER DEVICE
#12SCANNING ELECTRON MICROSCOPE IMAGE-BASED PITCH WALK INSPECTION METHOD AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE COMPRISING THE INSPECTION METHOD
#13Observation method by means of scanning transmission electron microscope, scanning transmission electron microscope system, and computer readable medium
#14Methods for high-performance electron microscopy
#15Systems and methods for image enhancement for a multi-beam charged-particle inspection system
#16Freezable fluid cell for cryo-electron microscopy
#17Pattern measuring method and pattern measuring apparatus
#18Beam alignment method and electron microscope
#19Method for automatic correction of astigmatism
#20Pattern matching using a lamella of known shape for automated S/TEM acquisition and metrology
#21Device and method for computing amount of drift and charged particle beam system
#22Correlative optical and charged particle microscope
#23Diffraction microscopy
#24Charged particle beam apparatus
#25Blocking member for use in the diffraction plane of a TEM
#26Method for adjusting optical axis of charged particle radiation and charged particle radiation device
#27SCANNING CHARGED PARTICLE MICROSCOPE
#28Method for producing a representation of an object by means of a particle beam, as well as a particle beam device for carrying out the method
#29ATOM PROBE DATA PROCESSES AND ASSOCIATED SYSTEMS
#30Method and electron microscope for measuring the similarity of two-dimensional images
#31Charged particle beam equipment and charged particle microscopy
#32Evaluation method of fine pattern feature, its equipment, and method of semiconductor device fabrication
#33Inspection system and inspection method
#34Charged particle beam equipment with magnification correction
#35Transmission electron microscope
#36Method and device for observing a specimen in a field of view of an electron microscope
#37Apparatus and measuring method of aberration coefficient of scanning transmission electron microscope
#38Apparatus and adjusting method for a scanning transmission electron microscope
#39Charged particle beam equipment and charged particle microscopy
#40Method and device for observing a specimen in a field of view of an electron microscope
#41Electric charged particle beam microscopy, electric charged particle beam microscope, critical dimension measurement and critical dimension measurement system
#42Evaluation method of fine pattern feature, its equipment, and method of semiconductor device fabrication
#43Method and device for observing a specimen in a field of view of an electron microscope
#44Determination of elemental composition of substances from ultrahigh-resolved isotopic fine structure mass spectra