METHOD FOR SUBSTRATE PROCESSING

GRID-LESS ION ENERGY DETECTOR

GRID-LESS ION ANGLE DETECTOR

ION COLLECTOR FOR USE IN PLASMA SYSTEMS

ION BEAM CURRENT MEASUREMENT DEVICE AND ION BEAM IMPLANTATION SYSTEM

Closed loop faraday correction of a horizontal beam current profile for uniform current tuning

Systems and methods for optimizing full horizontal scanned beam distance

Ion collector for use in plasma systems

Device and method for measuring electron beam

Ion collector for use in plasma systems

APPARATUS AND TECHNIQUES FOR BEAM MAPPING IN ION BEAM SYSTEM

Ion implantation apparatus and measurement device

Apparatus and techniques for beam mapping in ion beam system

Assessment and calibration of a high energy beam

Ion implantation apparatus and measurement device

Systems for controlling a high power ion beam

Ion implantation apparatus and semiconductor manufacturing method

Measurement of the electric current profile of particle clusters in gases and in a vacuum

System and method to improve productivity of hybrid scan ion beam implanters

Method of measuring vertical beam profile in an ion implantation system having a vertical beam angle device

Micro machined two dimensional faraday collector grid

Assessment and calibration of a high energy beam

Ion implanter, ion implantation method, and beam measurement apparatus

Beam imaging sensor and method for using same

Mechanisms for monitoring ion beam in ion implanter system

Ion beam measuring device and method of measuring ion beam

Electron beam diagnostic system using computed tomography and an annular sensor

Lithography apparatus, lithography method, and method of manufacturing article

Beam monitoring device, method, and system

Beam imaging sensor

Dose measurement device for plasma-immersion ion implantation

System and method for ion implantation with improved productivity and uniformity

Beam monitoring device, method, and system

DEVICE AND METHOD FOR ANALYZING THE DENSITY OF A BEAM OF CHARGED PARTICLES

ION IMPLANTATION METHOD AND ION IMPLANTER

Ion beam tuning

Ion beam irradiation system and ion beam irradiation method

Electron beam diagnostic system using computed tomography and an annular sensor

Faraday cup array integrated with a readout IC and method for manufacture thereof

Charged particle beam writing apparatus and optical axis deviation correcting method for charged particle beam

Method and apparatus for monitoring leakage current of a faraday cup

Integrated optical element and Faraday cup

Ion current measurement device

Charged particle beam profile measurement

Slit disk for modified faraday cup diagnostic for determining power density of electron and ion beams

System and method of performing uniform dose implantation under adverse conditions

Ion implanters

TECHNIQUES FOR MEASURING AND CONTROLLING ION BEAM ANGLE AND DENSITY UNIFORMITY

Apparatus for ion beam fabrication

Method and system for ion beam profiling

Ion implantation apparatus

Ion beam diagnostics

Magnetic monitoring of a Faraday cup for an ion implanter

Miniature modified Faraday cup for micro electron beams

Sensor for ion implanter

Ion beam current uniformity monitor, ion implanter and related method

Ion beam irradiating apparatus and method of adjusting uniformity of a beam

Ion beam measuring method and ion implanting apparatus

ION BEAM PROFILER

Automated faraday sensor test system

Beam stop for an ion implanter

Determining ion beam parallelism using refraction method

Electron beam displacement measuring method, electron beam displacement measuring device, and electron beam recording apparatus

Wafer charge monitoring

Faraday system integrity determination

Method, system, and apparatus for improving doping uniformity in high-tilt ion implantation

Faraday cup assembly and method of controlling the same

Faraday system and ion implantation apparatus comprising the faraday system

Ion beam profiler

Ion beam measuring method and ion implanting apparatus

Method of measuring ion beam position

Electron beam welding method and apparatus

Ion beam measurement apparatus and method

Process and device for measuring ions

Irradiation system ion beam and method to enhance accuracy of irradiation

Irradiation system with ion beam

Method to increase low-energy beam current in irradiation system with ion beam

Trigger probe for determining the orientation of the power distribution of an electron beam

Ion implantation monitor system and method thereof

Method and device of monitoring and controlling ion beam energy distribution

Electron beam diagnostic for profiling high power beams

Faraday dose and uniformity monitor for plasma based ion implantation

Fast Faraday cup with high bandwidth

Ion beam neutral detection