H01J2237/244 - CPC Classification Index

ClassID:

206481 ⎘

H01J2237/244 - CPC Classification

Classification description:

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging Detection characterized by the detecting means

Sub-classes:

H01J2237/24405 » Faraday cages 81
H01J2237/2441 » Semiconductor detectors, e.g. diodes 74
H01J2237/2443 » Scintillation detectors 118
H01J2237/24435 » Microchannel plates 20
H01J2237/2444 » Electron Multiplier 30
H01J2237/2445 » Photon detectors for X-rays, light, e.g. photomultipliers 186
H01J2237/24455 » Transmitted particle detectors 62
H01J2237/2446 » Position sensitive detectors 158
H01J2237/24475 » Scattered electron detectors 247
H01J2237/2448 » Secondary particle detectors 374
H01J2237/24485 » Energy spectrometers 135
H01J2237/2449 » Detector devices with moving charges in electric or magnetic fields 64
H01J2237/24495 » Signal processing, e.g. mixing of two or more signals 178

Recent Application in this class:

20260040896

2026-02-05

APPARATUS TO DETECT AND QUANTIFY RADICAL CONCENTRATION IN SEMICONDUCTOR PROCESSING SYSTEMS

20240382166

2024-11-21

CHARGED PARTICLE IMAGING SYSTEM AND USE THEREOF

20240186126

2024-06-06

MONITORING SYSTEM, APPARATUS, AND METHOD FOR DETERMINING MAINTENANCE CYCLE OF PROCESSING CHAMBER

20230005702

2023-01-05

Defective pixel management in charged particle microscopy

20220392812

2022-12-08

APPARATUS TO DETECT AND QUANTIFY RADICAL CONCENTRATION IN SEMICONDUCTOR PROCESSING SYSTEMS

20220384147

2022-12-01

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING SYSTEM

20210257197

2021-08-19

SUBSTRATE PROCESSING METHOD, GAS FLOW EVALUATION SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS

20210210303

2021-07-08

Particle beam system for adjusting the current of individual particle beams

20200185185

2020-06-11

Particle beam system and method for operating a particle beam system

#10

20190187174

2019-06-20

Miniature device for ultra high sensitivity and stability probing in vacuum

#11

20190051489

2019-02-14

Specimen observation method

#12

20180068828

2018-03-08

In situ beam current monitoring and control in scanned ion implantation systems

#13

20180067294

2018-03-08

Scanning microscope with controlled variable measurement parameters

#14

20170372868

2017-12-28

Atom probe with vacuum differential

#15

20170025257

2017-01-26

Arc management with voltage reversal and improved recovery

#16

20160329195

2016-11-10

Smart device fabrication via precision patterning

#17

20160282714

2016-09-29

Inspection of a lithographic mask that is protected by a pellicle

#18

20160189927

2016-06-30

Method of measuring vertical beam profile in an ion implantation system having a vertical beam angle device

#19

20150136979

2015-05-21

Charged particle beam device

#20

20150028203

2015-01-29

Inspection of a lithographic mask that is protected by a pellicle

#21

20150014529

2015-01-15

Charged particle beam device

#22

20140367042

2014-12-18

SYSTEMS FOR AUTOMATICALLY CHARACTERIZING A PLASMA

#23

20120298863

2012-11-29

Method for detecting information of an electronic potential on a sample and charged particle beam apparatus

#24

20120241640

2012-09-27

Ion sources, systems and methods

#25

20110272577

2011-11-10

Electron beam device with dispersion compensation, and method of operating same

#26

20110168889

2011-07-14

Scanning electron microscope, an interface and a method for observing an object within a non-vacuum environment

#27

20110139978

2011-06-16

CHARGED PARTICLE BEAM DEVICE, METHOD OF OPERATING A CHARGED PARTICLE BEAM DEVICE

#28

20110068266

2011-03-24

Method and device for visualizing distribution of local electric field

#29

20100294929

2010-11-25

Sample electrification measurement method and charged particle beam apparatus

#30

20100001202

2010-01-07

SPHERICAL ABERRATION CORRECTION DECELERATING LENS, SPHERICAL ABERRATION CORRECTION LENS SYSTEM, ELECTRON SPECTROMETER, AND PHOTOELECTRON MICROSCOPE

#31

20090322342

2009-12-31

Methods for automatically characterizing a plasma

#32

20090289191

2009-11-26

Ultra high precision measurement tool with control loop

#33

20090289185

2009-11-26

Ultra high precision measurement tool

#34

20090272899

2009-11-05

Method for detecting information of an electric potential on a sample and charged particle beam apparatus

#35

20090242762

2009-10-01

Apparatus and method for inspecting sample

#36

20090206272

2009-08-20

Variable-ratio double-deflection beam blanker

#37

20090152461

2009-06-18

Hole inspection apparatus and hole inspection method using the same

#38

20090095923

2009-04-16

Installation and method of nanofabrication

#39

20080302955

2008-12-11

Techniques for ion beam current measurement using a scanning beam current transformer

#40

20080201091

2008-08-21

Sample electrification measurement method and charged particle beam apparatus

#41

20080191154

2008-08-14

Ion implanting apparatus and method for implanting ions

#42

20080142702

2008-06-19

Gas field ION source for multiple applications

#43

20080135755

2008-06-12

Scanning electron microscope

#44

20080035855

2008-02-14

Particle detector

#45

20070262271

2007-11-15

Ribbon beam ion implanter cluster tool

#46

20070215814

2007-09-20

Particle beam current measurement system

#47

20070114432

2007-05-24

Exposed conductor system and method for sensing an electron beam

#48

20070023652

2007-02-01

Electron beam detection device and electron tube

#49

20060219918

2006-10-05

Sample electrification measurement method and charged particle beam apparatus

#50

20060169922

2006-08-03

Ion implant ion beam parallelism and direction integrity determination and adjusting

#51

20060113470

2006-06-01

High resolution atom probe

#52

20060097194

2006-05-11

Ion beam processing method

#53

20060060790

2006-03-23

System and method for evaluation using electron beam and manufacture of devices

#54

20060033035

2006-02-16

Electron microscope array for inspection and lithography

#55

20050161600

2005-07-28

Sample electrification measurement method and charged particle beam apparatus

#56

20050139773

2005-06-30

Scanning electron microscope