206487 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Detection characterized by the detecting means Scintillation detectors
MOBILE RADIATION DETECTOR SYSTEM FOR ION IMPLANTERS
#2ELECTRON BEAM MICROSCOPE
#3MAGNETIC SHIELDING OF THE PHOTOMULTIPLIER IN THE MAGNETIC IMMERSION FIELD
#4METHODS FOR DETERMINING THE VIRTUAL SOURCE LOCATION OF A LIQUID METAL ION SOURCE
#5CHARGED-PARTICLE OPTICAL DEVICE
#6METHOD FOR OPERATING A MULTI-BEAM PARTICLE BEAM MICROSCOPE
#7PARTICLE BEAM MICROSCOPE
#8ELECTRON BEAM MICROSCOPE
#9PARTICLE BEAM MICROSCOPE
#10SYSTEM AND METHOD FOR MULTI-BEAM ELECTRON MICROSCOPY USING A DETECTOR ARRAY
#11Methods for determining the virtual source location of a liquid metal ion source
#12Charged Particle Beam Device and Specimen Observation Method
#13STROBOSCOPIC ELECTRON-BEAM SIGNAL IMAGE MAPPING
#14Method and apparatus for Schottky TFE inspection
#15Method for operating a multi-beam particle beam microscope
#16PARTICLE BEAM SYSTEM
#17TOOL FOR TESTING AN ELECTRON-OPTICAL ASSEMBLY
#18Charged particle beam device
#19Method and apparatus for Schottky TFE inspection
#20Charged particle beam device and charged particle beam device calibration method
#21Scintillator for charged particle beam apparatus and charged particle beam apparatus
#22Charged particle beam apparatus
#23Scanning electron microscope and a method for overlay monitoring
#24Sensor for electron detection
#25Charged particle detection system
#26Arrayed column detector
#27Method for operating a multi-beam particle beam microscope
#28Method for detector equalization during the imaging of objects with a multi-beam particle microscope
#29Holder and charged particle beam apparatus
#30Charged particle scanners
#31Charged particle detection system
#32Holder and charged particle beam apparatus
#33Charged particle beam device
#34Light guide, detector having light guide, and charged particle beam device
#35Charged-particle beam apparatus
#36Multiple electron beam inspection apparatus with through-hole with spiral shape
#37Charged-particle beam system
#38Multi-beam electron microscope
#39Charged particle beam apparatus
#40Charged particle detector and charged particle beam apparatus
#41Particle detection assembly, system and method
#42Light guide, detector having light guide, and charged particle beam device
#43Charged particle detector including a light-emitting section having lamination structure, charged particle beam device, and mass spectrometer
#44Charged particle detector and charged particle beam device using the same
#45Scanning electron microscope
#46Image capture assembly and method for electron back scatter diffraction
#47Electron microscope and image acquisition method
#48Scintillation detector for detection of ionising radiation
#49Method for characterizing two dimensional nanomaterial
#50Charged particle bean device and information-processing device
#51Hybrid energy conversion and processing detector
#52Detecting charged particles
#53Apparatus and method for inspecting a sample using a plurality of charged particle beams
#54INVESTIGATION OF HIGH-TEMPERATURE SPECIMENS IN A CHARGED PARTICLE MICROSCOPE
#55Detection assembly, system and method
#56Charged particle detecting device and charged particle beam system with same
#57Device for correlative scanning transmission electron microscopy (STEM) and light microscopy
#58Inspection device and measurement device
#59Multi-beam current quantity measuring method, multi-charged particle drawing control device, and multi-charged particle beam drawing device
#60Charged particle beam device, sample observation method, sample platform, observation system, and light emitting member
#61System for electron beam detection
#62System and method for simultaneous detection of secondary electrons and light in a charged particle beam system
#63Multi-beam particle microscope and method for operating same
#64Hybrid energy conversion and processing detector
#65Electron microscope and electron beam detector
#66Light signal detecting circuit, light amount detecting device, and charged particle beam device
#67Method of detecting electrons, an electron-detector and an inspection system
#68Position sensitive STEM detector
#69Detection method for use in charged-particle microscopy
#70Scanning electron microscope
#71Method and apparatus for photon counting with optical space spreading
#72In-column detector for particle-optical column
#73X-ray detector including integrated electron detector
#74High efficiency scintillator detector for charged particle detection
#75High efficiency secondary and back scattered electron detector
#76Sample observing device and sample observing method
#77Charged particle detector system comprising a conversion electrode
#78Electron detector including one or more intimately-coupled scintillator-photomultiplier combinations, and electron microscope employing same
#79Charged particle radiation device
#80IN-COLUMN DETECTOR FOR PARTICLE-OPTICAL COLUMN
#81Electron detecting mechanism and charged particle beam system equipped therewith
#82Detector for use in charged-particle microscopy
#83Particle beam system
#84IN-CHAMBER ELECTRON DETECTOR
#85System and method for localization of large numbers of fluorescent markers in biological samples
#86Secondary-electron detector and charged particle beam apparatus
#87Electron detector including an intimately-coupled scintillator-photomultiplier combination, and electron microscope and X-ray detector employing same
#88Electron microscope device
#89Charged particle radiation device
#90Lithography system, sensor, converter element and method of manufacture
#91Electron detection device and scanning electron microscope
#92Scanning electron microscope
#93Luminous body, electron beam detector using the same, scanning electron microscope, and mass analysis device
#94Apparatus and Method for Inspecting Samples
#95Electron beam apparatus and method of operating the same
#96Retractable lens-coupled electron microscope camera with image sensor in electron microscope vacuum chamber
#97Apparatus and method including a direct bombardment detector and a secondary detector for use in electron microscopy
#98Electron-beam device and detector system
#99Electron microscopy
#100Method and apparatus allowing simultaneous direct observation and electronic capture of scintillation images in an electron microscope
#101Beam current calibration system
#102CHARGED PARTICLE APPLICATION APPARATUS
#103Charged particle detection devices
#104Method for creating reference images in electron microscopes
#105Method and system for generating and reviewing a thin sample
#106Charged particle system including segmented detection elements
#107In-chamber electron detector
#108Charged particle detector assembly, charged particle beam apparatus and method for generating an image
#109Use of ion induced luminescence (IIL) as feedback control for ion implantation
#110Luminous body, electron beam detector using the same, scanning electron microscope, and mass analysis device
#111Asymmetric annular detector
#112Method of inspecting a specimen surface, apparatus and use of fluorescent material
#113Ion implanation method and device using thereof
#114Electron-beam device and detector system
#115Apparatus and method for electron beam inspection with projection electron microscopy
#116Lithography system, sensor and measuring method
#117High-resolution scintillation screen for digital imaging
#118Method and system for the directional detection of electrons in a scanning electron microscope
#119Detector system of secondary and backscattered electrons for a scanning electron microscope
#120Image pickup device and method of manufacturing the same
#121Secondary electron detector unit for a scanning electron microscope
#122Multi-mode charged particle beam device
#123Light sensor assembly in a vacuum environment
#124Apparatus, method and system for imaging and utilization of SEM charged particles
#125Compact arrangement for aberration correction of electron lenses