206488 ⎘
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging; Detection characterized by the detecting means Microchannel plates
Ion detection system
#2Multiple beam secondary ion mass spectrometry device
#3Microchannel plate and electron multiplier tube with improved gain and suppressed deterioration
#4Ion detection system
#5Phosphor screen for MEMS image intensifiers
#6Charged particle detecting device and charged particle beam system with same
#7System for recording spatial and temporal properties of ions emitted from a quadrupole mass filter
#8Particle detection system
#9Particle beam system
#10IN-CHAMBER ELECTRON DETECTOR
#11Particle detection system
#12Layered scanning charged particle microscope package for a charged particle and radiation detector
#13Charged particle detection devices
#14Charged particle system including segmented detection elements
#15In-chamber electron detector
#16Microchannel plate with segmented mounting pads
#17Electron beam apparatus
#18Sample surface inspection method and inspection system
#19Detector using microchannel plates and mass spectrometer
#20Multi-mode charged particle beam device
#21Recording spatial and temporal properties of ions emitted from a quadrupole mass filter