CONTAMINATION DETECTION SYSTEM AND METHOD

MULTI-SENSOR DETERMINATION OF A STATE OF SEMICONDUCTOR EQUIPMENT

NOTCH FILTER FOR HIGH THROUGHPUT X-RAY PHOTON SPECTROSCOPY

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

PLASMA PROCESSING APPARATUS

SEMICONDUCTOR MANUFACTURING EQUIPMENT

HIGH-VOLTAGE COLUMN WITH PERMANENT MAGNET LENS AND POSITIVE WAFER BIAS FOR OVERLAY

MAGNETIC SHIELDING OF THE PHOTOMULTIPLIER IN THE MAGNETIC IMMERSION FIELD

LIQUID-COOLED OPTICAL WINDOW FOR SEMICONDUCTOR PROCESSING CHAMBER

SAMPLE TIP

ELECTRON MICROSCOPE DETECTOR AND RELATED METHODS

SEMICONDUCTOR PROCESSING APPARATUS

METHOD AND APPARATUS FOR REVITALIZING PLASMA PROCESSING TOOLS

METHODS FOR DETERMINING THE VIRTUAL SOURCE LOCATION OF A LIQUID METAL ION SOURCE

IMPROVED OPTICAL ACCESS FOR SPECTROSCOPIC MONITORING OF SEMICONDUCTOR PROCESSES

SEMICONDUCTOR PROCESS DEVICE AND METHOD OF MONITORING SEMICONDUCTOR PROCESS

Electron Filter

SENSOR APPARATUS, PLASMA PROCESSING APPARATUS INCLUDING THE SAME, AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE USING THE SAME

PLASMA ANALYZER, PLASMA PROCESSING APPARATUS, AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE USING THE SAME

Optical Apparatus and Charged Particle Beam Apparatus

System and Method for Determining Properties of a Substrate

LOW OPEN AREA AND COUPON ENDPOINT DETECTION

LOW OPEN AREA AND COUPON ENDPOINT DETECTION

ELECTRON BEAM MONITORING DEVICE AND ELECTRON BEAM IRRADIATION SYSTEM

METHOD FOR OPERATING A MULTI-BEAM PARTICLE BEAM MICROSCOPE

SUBSTRATE POSITION MONITORING DEVICES

SYSTEM AND METHOD FOR TARGETED RE-EXAMINATION, INNER LAYER DEFECT ANALYSIS, PROTEIN IDENTIFICATION, AND PHOTON COMPUTER

ELECTRON MICROSCOPE, DEVICE FOR MEASURING ELECTRON-PHOTON CORRELATION, AND METHOD FOR MEASURING ELECTRON-PHOTON CORRELATION

PLASMA MONITORING SYSTEM, PLASMA MONITORING METHOD, AND MONITORING DEVICE

Scanning Electron Microscope and Map Display Method for Absorption Edge Structure

ANALYSIS DEVICE, ANALYSIS METHOD, AND ANALYSIS PROGRAM

Methods for determining the virtual source location of a liquid metal ion source

Method for operating a multi-beam particle beam microscope

APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING SUBSTRATE

Dual-mode silicon photomultiplier based LiDAR

PARTICLE BEAM SYSTEM

Blended energy ion implantation

METHOD FOR OPERATING A PARTICLE BEAM MICROSCOPE, PARTICLE BEAM MICROSCOPE AND COMPUTER PROGRAM PRODUCT

Time-gated detection, dual-layer SPAD-based electron detection

Plasma processing apparatus and plasma processing method

DETECTION AND LOCATION OF ANOMALOUS PLASMA EVENTS IN FABRICATION CHAMBERS

SNR for x-ray detectors in SEM systems by using polarization filter

TOOL FOR TESTING AN ELECTRON-OPTICAL ASSEMBLY

X-ray imaging in cross-section using un-cut lamella with background material

Method and apparatus for revitalizing plasma processing tools

Measuring device and optical fiber strain measuring jig thereof

APPARATUS AND METHOD FOR DETECTING ONE OR MORE SCANNING CHARGED PARTICLE BEAMS

Mass spectrometer detector and system and method using the same

Stroboscopic illumination synchronized electron detection and imaging

X-RAY REFERENCE OBJECT, X-RAY DETECTOR, ADDITIVE MANUFACTURING APPARATUS AND METHOD FOR CALIBRATING THE SAME

Silicon photomultiplier imaging system and method for cooling the same

Digital detector, apparatus of charged-particle beam such as electron microscope comprising the same, and method thereof

Low open area and coupon endpoint detection

Scanning electron microscope

Scanning electron microscope and a method for overlay monitoring

Apparatus for transmission electron microscopy cathodoluminescence

In situ angle measurement using channeling

Charged particle beam device for inspection of a specimen with a plurality of charged particle beamlets

Charged particle detection system

Charged particle beam device

Method for operating a multi-beam particle beam microscope

Method and system for testing an integrated circuit

JIG, PROCESSING SYSTEM AND PROCESSING METHOD

Scanning electron microscope with composite detection system and specimen detection method

System combination of a particle beam system and a light-optical system with collinear beam guidance, and use of the system combination

Electron microscope apparatus, inspection system using electron microscope apparatus, and inspection method using electron microscope apparatus

X-ray calibration standard object

Holder and charged particle beam apparatus

Charged particle scanners

Charged particle detection system

PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS

Holder and charged particle beam apparatus

System and method for spatially resolved optical metrology of an ion beam

Light guide, detector having light guide, and charged particle beam device

Substrate processing apparatus, substrate processing method, and method of fabricating semiconductor device using the same

System and method for spatially resolved optical metrology of an ion beam

Electron microscope and image processing method

Mass spectrometer detector and system and method using the same

Nondestructive sample imaging

Sample manipulation for nondestructive sample imaging

APPARATUS AND METHOD OF PRODUCING DIAMOND AND PERFORMING REAL TIME IN SITU ANALYSIS

Monolithic silicon pixel detector, and systems and methods for particle detection

Particle detection assembly, system and method

Signal separator for a multi-beam charged particle inspection apparatus

Retractable detector

X-ray spectroscopy in a charged-particle microscope

Light guide, detector having light guide, and charged particle beam device

Inspection method for wafer or DUT

X-ray analyzer and spectrum generation method

Sample holder and electron microscope

Charged particle beam device and scanning electron microscope

Electron microscope

High-performance, low-stress support structure with membrane

SEGMENTED DETECTOR FOR A CHARGED PARTICLE BEAM DEVICE

Wafer and DUT inspection apparatus and method using thereof

Multi-module photon detector and use thereof

Retractable detector

Plasma processing apparatus and operational method thereof

Method and device for characterizing an electron beam

X-ray analysis in air

Method and device for time-resolved pump-probe electron microscopy

Multi mode system with a dispersion X-ray detector

Multi mode systems with retractable detectors

Detecting charged particles

INVESTIGATION OF HIGH-TEMPERATURE SPECIMENS IN A CHARGED PARTICLE MICROSCOPE

X-ray calibration standard object

Sample holder with light emitting and transferring elements for a charged particle beam apparatus

Charged particle detecting device and charged particle beam system with same

SAMPLE HOLDER FOR CHARGED PARTICLE BEAM DEVICE, AND CHARGED PARTICLE BEAM DEVICE

Apparatus and Method of Producing Diamond and Performing Real Time In Situ Analysis

Inspection device and measurement device

Control device, control method, and analysis system

Method of generating a zoom sequence and microscope system configured to perform the method

X-ray analysis in air

Method and device for characterizing an electron beam

Charged particle microscope with improved spectroscopic functionality

Image creating method and imaging system for performing the same

Source for selectively providing positively or negatively charged particles for a focusing column

Electron microscope with plural X-ray detectors for acquiring elemental spectrum

Method for monitoring ion implantation

Charged particle beam device, sample observation method, sample platform, observation system, and light emitting member

Radiation analyzer including a support for tilting an energy-dispersive radiation detector

Charged-particle lens that transmits emissions from sample

Charged particle beam device, method for adjusting charged particle beam device, and method for inspecting or observing sample

Phase analyzer, phase analysis method, and surface analyzer

Spectroscopic element and charged particle beam device using the same

Sample base, charged particle beam device and sample observation method

APPARATUS FOR IMAGING PLASMA PARTICLES AND METHOD FOR DETECTING ETCHING END POINT USING SAME

Electron microscope and electron beam detector

High-voltage energy-dispersive spectroscopy using a low-voltage scanning electron microscope

Multi-module photon detector and use thereof

Light signal detecting circuit, light amount detecting device, and charged particle beam device

Charged particle beam apparatus

Position sensitive STEM detector

Plasma processing apparatus and operational method thereof

Detection method for use in charged-particle microscopy

Back scattered electron detector

Device and method for determining the energetic composition of electromagnetic waves

Method and apparatus for photon counting with optical space spreading

Multi-spot collection optics

SYSTEM AND METHOD FOR MEASURING ANGULAR LUMINESCENCE IN A CHARGED PARTICLE MICROSCOPE

Inspection apparatus and replaceable door for a vacuum chamber of such an inspection apparatus and a method for operating an inspection apparatus

Electronic state calculation method, electronic state calculation device, and recording medium

APPARATUS FOR COLLECTION OF CATHODOLUMINESCENCE SIGNALS

SYSTEM AND METHOD FOR SAMPLE ANALYSIS BY THREE DIMENSIONAL CATHODOLUMINESCENCE

Inductively coupled plasma source as an electron beam source for spectroscopic analysis

Integrated backscattered electron detector with cathodoluminescence collection optics

Charged particle radiation device

Method for checking ion implantation condition and method for manufacturing semiconductor wafer

Clustering of multi-modal data

Particle beam microscope

Particle Beam Microscope

Specimen supporting member for X-ray microscope image observation, specimen containing cell for X-ray microscope image observation, and X-ray microscope

Method for determining a distance between two beamlets in a multi-beamlet exposure apparatus

Charged-particle microscopy with occlusion detection

X-RAY ANALYSER

Charged particle beam analyzer and analysis method

Sensor head for an X-ray detector, X-ray detector with sensor head and sensor arrangement

Detector for use in charged-particle microscopy

IN-CHAMBER ELECTRON DETECTOR

Environmental cell for charged particle beam system

Method and apparatus for acquiring simultaneous and overlapping optical and charged particle beam images

Charged particle radiation device

Particle detection system

Detection device and particle beam device having a detection device

X-RAY WINDOW WITH BERYLLIUM SUPPORT STRUCTURE

Sample inspection methods, systems and components

Device and method for introducing gas for analysis device

METHODS AND APPARATUSES TO ALIGN ENERGY BEAM TO ATOM PROBE SPECIMEN

Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus

Electron microscope device

Monitoring device of gas introducing device for analyzer

Device and method for analyzing a sample

Retractable lens-coupled electron microscope camera with image sensor in electron microscope vacuum chamber

Radiation window with coated silicon support structure

CHARGED PARTICLE APPLICATION APPARATUS

Charged particle detection devices

Techniques for optical ion beam metrology

Charged particle system including segmented detection elements

In-chamber electron detector

Electron beam inspection system and inspection method and method of manufacturing devices using the system

Emission detecting analysis system and method of detecting emission on object

Use of ion induced luminescence (IIL) as feedback control for ion implantation

Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus

X-ray analyzer using electron beam

TDI detecting device, a feed-through equipment, an electron beam apparatus using these device and equipment, and a semiconductor device manufacturing method using the same electron beam apparatus

Method of inspecting a specimen surface, apparatus and use of fluorescent material

Charged particle beam apparatus

Sample measuring device

Charged particle beam apparatus

Charged particle beam apparatus

Image pickup device and method of manufacturing the same

Optical axis adjusting mechanism for X-ray lens, X-ray analytical instrument, and method of adjusting optical axis of X-ray lens

Three-dimensional structure analyzing system

X-ray detecting devices and apparatus for analyzing a sample using the same

Imaging device comprising optically coupled fiber optic plate assembly

Electron beam inspection system and inspection method and method of manufacturing devices using the system

Scanning electron microscope

Electron beam apparatus and method with surface height calculator and a dual projection optical unit

Charged particle beam apparatus

System and method for targeted re-examination, inner layer defect analysis, protein identification, and photon computer

Method for detecting voids in interconnects and an inspection system